真空 ›› 2021, Vol. 58 ›› Issue (1): 1-5.doi: 10.13385/j.cnki.vacuum.2021.01.01
• 测量与控制 • 下一篇
王杰, 康颂, 董长昆
WANG Jie, KANG Song, DONG Chang-kun
摘要: 对于X射线管等小型真空器件,其内部真空监测还缺乏可靠的方法。基于碳纳米管的气体吸附影响场电子发射的特性,我们开发了一种微型低压传感器,本工作是对该传感器的场发射性能、传感性能、重复性和应用性进行研究。实验结果表明:合金材料制备的碳纳米管分布均匀、晶体性高,有良好的场发射性能;传感器对氮气和水汽具有传感效应,场发射电流能够随系统内部压力的升高而增加;在同一个压力值点的多次测试表明传感器测量一致性优于10 %,能够稳定的工作。对传感器在X射线管的应用测试表明:传感器能够监测X射线管工作时内部真空的变化,可以有效的测量微小真空电子器件内部的真空。
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