新型大排量高压比离心真空机组研制

doi:10.13385/j.cnki.vacuum.2024.06.05

摘要/Abstract

摘要： 随着大型真空系统对真空抽吸设备抽吸效率的要求不断提高,传统罗茨真空机组因抽气能力局限性已难以满足应用需求。本文将大排量、宽压力、高转速离心真空泵应用于大型高真空系统,研制出一种离心真空泵+罗茨真空泵+水环真空泵串联运行的新型复合离心真空机组,重点介绍了离心真空机组的构成和研制过程,并测试了其极限性能和负载。结果表明：该机组排气量,极限压力和运行稳定性均满足设计指标要求,具有占地面积小、运行效率高、抽气能力强等特点,是目前大型高真空系统最佳抽气解决方案。

关键词: 真空系统, 罗茨真空机组, 离心真空泵, 气动设计

Abstract: With the increasing requirement of the suction efficiency of vacuum pumping equipment in large vacuum system, the suction capacity of traditional Roots vacuum unit is obviously insufficient, which can not meet the application requirements. In this paper, the centrifugal vacuum pump with large displacement, wide pressure and high rotating speed is applied to large-scale high vacuum system, and a new type of centrifugal vacuum unit is developed, which combines centrifugal vacuum pump, Roots vacuum pump and water ring vacuum pump in series. The composition of centrifugal vacuum unit and the development process of this centrifugal vacuum pump is introduced, its extreme performance and load are tested. The results show that the pumping capacity, ultimale pressure and operational stablity of the unit meet the design requirements. This unit has the characteristics of small footprint, high operation efficiency and strong pumping capacity, and is the best pumping scheme for large-scale high vacuum system at present.

Key words: vacuum system, Roots vacuum unit, centrifugal vacuum pump, aerodynamic design

中图分类号: TH452

齐大伟, 陈德江, 吕德润. 新型大排量高压比离心真空机组研制[J]. 真空, 2024, 61(6): 26-32.

QI Da-wei, CHEN De-jiang, LÜ De-run. Development of a New Centrifugal Vacuum Unit with Large Displacement and High Pressure Ratio[J]. VACUUM, 2024, 61(6): 26-32.

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