减摩耐磨高性能TiCN薄膜工艺优化及性能研究

doi:10.13385/j.cnki.vacuum.2025.06.01

摘要/Abstract

摘要： 通过四因素三水平正交试验设计方法,采用PVD多功能离子镀膜机在Cr12MoV模具钢表面制备TiCN薄膜,研究了不同工艺参数对TiCN薄膜力学和摩擦磨损性能的影响,优化了薄膜制备工艺参数。结果表明,各因素对TiCN薄膜结合力的影响权重为甲烷和氮气流量比>弧电流>气体总流量>偏压,对TiCN薄膜硬度的影响权重为甲烷和氮气流量比>气体总流量>偏压>弧电流,甲烷和氮气流量比主要通过改变碳含量对TiCN薄膜力学性能产生影响。以结合力为指标的工艺方案所得TiCN薄膜性能最好,工艺参数为气体总流量为450 sccm,甲烷和氮气流量比为5∶1,偏压为200 V,弧电流为60 A,所制备TiCN薄膜硬度为3 456.76 HV,结合力为36.7 N,平均摩擦因数为0.281 3,显著提高了基体的抗摩擦磨损性能。

关键词: TiCN薄膜, 正交试验, 碳含量, 力学性能, 减摩耐磨

Abstract: Based on the orthogonal test method of four factors and three levels, TiCN films were prepared on Cr12MoV die steel under different process parameters using PVD multi-function ion coating machines. The effects of different process parameters on mechanical and friction performance of TiCN thin films were studied, and the preparation process parameters of the film were optimized. The results show that the influence weight of factors on the bonding force of TiCN thin films is methane and nitrogen flow ratio > arc current> total gas flow> partial pressure, and the influence weight of factors on the hardness is methane and nitrogen flow ratio> total gas flow> partial pressure> arc current. The methane and nitrogen flow ratio affects the mechanical properties of TiCN films mainly by changing the carbon content. The TiCN film obtained by the process scheme with the bonding force as the index has the best performance, and the process parameters are the total gas flow of 450 sccm, methane and nitrogen flow ratio of 5∶1, partial pressure of 200 V, and current of 60 A. The hardness value of as-prepared TiCN film is 3 456.76 HV, the binding force is 36.7 N, and the average friction coefficient is 0.281 3, which significantly improves the anti-wear performance of the substrate.

Key words: TiCN thin film: orthogonal test, carbon content, mechanical property, reduction and wear resistance

中图分类号: TB43

于朋, 何箐, 袁涛, 王世兴, 刘桂欣. 减摩耐磨高性能TiCN薄膜工艺优化及性能研究[J]. 真空, 2025, 62(6): 1-8.

YU Peng, HE Qing, YUAN Tao, WANG Shixin, LIU Guixin. Study on Fabrication Process Optimization and Performance of Decreasing Wear-Resistant High Performance TiCN Thin Film[J]. VACUUM, 2025, 62(6): 1-8.

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