高比容钽粉钝化装置及钝化工艺研究*

doi:10.13385/j.cnki.vacuum.2025.05.14

摘要/Abstract

摘要： 介绍了一种比容达到100 000 μF·V/g及以上高比容钽粉高温热处理后的钝化方法及配套的强冷装置设计。该强冷装置通过快速降温技术可显著提高钽粉的生产效率,同时避免了炉内挥发物对钽粉的潜在污染,确保产品的纯净度。此外,还提出了一种三步钝化技术,包含一次钝化、二次钝化和最终钝化,这种方法可以有效解决钝化过程中含氧气体与钽粉反应所产生的热量滞留问题,避免金属钽粉出现温升而造成氧高,实现了钽粉的充分稳定钝化,缩短了处理时间,且未引入额外污染,具有较高的实用价值。

关键词: 钽粉, 热处理, 钝化, 强冷装置, 工艺优化

Abstract: A passivation method for high specific volume tantalum powder with a specific volume of 100 000 μF·V/g and above after high temperature heat treatment and the design of a strong cooling device were introduced. Through rapid cooling technology, the strong cooling device significantly improves the production efficiency of tantalum powder, and avoids potential pollution of tantalum powder by volatiles in the furnace, ensuring the purity of the product. In addition, a three-step passivation technology was proposed, including primary passivation, secondary passivation and final passivation. This method can effectively solve the problem of heat retention caused by the reaction of oxygen-containing gas with tantalum powder in the passivation process, avoid the high oxygen caused by the temperature rise of tantalum metal powder, realize the fully stable passivation of tantalum powder, shorten the processing time, and do not introduce additional pollution. It has high practical value.

Key words: tantalum powder, heat treatment, passivation, forced cooling device, process optimization

中图分类号: TG146.4+16

桂愉平, 雒国清, 杜蛰, 李少军, 杜威. 高比容钽粉钝化装置及钝化工艺研究^*[J]. 真空, 2025, 62(5): 91-97.

GUI Yuping, LUO Guoqing, DU Zhe, LI Shaojun, DU Wei. Research on High Specific Capacity Tantalum Powder Passivation Device and Process[J]. VACUUM, 2025, 62(5): 91-97.

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