VACUUM ›› 2025, Vol. 62 ›› Issue (4): 89-96.doi: 10.13385/j.cnki.vacuum.2025.04.16
• Vacuum Technology Application • Previous Articles Next Articles
LIU Yuchen1, JIA Shouya2, ZHANG Pengze1
CLC Number: TG232.6;U262.23+2
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