欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2020, Vol. 57 ›› Issue (6): 5-6.doi: 10.13385/j.cnki.vacuum.2020.06.02

• Thin Film • Previous Articles     Next Articles

Effect of Hall Source Sputtering Cleaning Process on Bonding Properties of Ion Plating TiN Coatings

ZHONG Li, DAN Min, SHEN Li-ru, JIN Fan-ya, CHEN Mei-yan, LIU Tong, DENG Zhi   

  1. Southwestern Institute of Physics, Chengdu 610207, China
  • Received:2019-09-06 Online:2020-11-25 Published:2020-11-30

Abstract: Aiming for studying the mechanism and regularity of the effect of sputtering cleaning process on the surface characteristics of substrates, the Hall ion source was used to generate argon ion beam to clean substrates. The surface characteristics of substrates after ion beam cleaning under different discharge voltage and the bonding strength of coatings were then compared after changing discharge voltage of ion beam by adjusting the vacuum degree. The results show that with the increase of vacuum, the discharge voltage of ion beam increased gradually, the contact angle of substrate decreased gradually, and the surface roughness of substrate decreased first and then increased. The bonding strength of the coatings increased gradually with the increase of ion beam discharge voltage, up to 60N. It can be a concluded that the substrate surface could obtain good wettability, ductility and cleanliness after high energy argon ion beam sputtering cleaning, which can effectively improve the bonding performance of the coating.

Key words: Hall source, sputtering cleaning, ion beam discharge voltage, ion plating, TiN

CLC Number: 

  • TB79
[1] 周晓君, 韩延峰, 王法永. 喷砂除锈机理及参数优化研究[J]. 船舶工程, 2008, 30(1): 66-68.
[2] 陈连生, 李跃, 宋进英, 等. 热轧带钢表面氧化皮残留的拉矫破鳞及酸洗工艺优化[J]. 热加工工艺, 2017(9): 167-170.
[3] 余万华, 周斌斌, 陈龙. 去除氧化铁皮的新方法介绍[J]. 金属世界, 2010(3): 46-51.
[4] 张素银, 杜凯, 谌加军, 等. 电解抛光技术研究进展[J]. 电镀与涂饰, 2007, 26(2): 48-50.
[5] 杨雄, 黄利, 王海明.一种含Ni钢加热及去除氧化铁皮的方法; , CN103602925A[P]. 2014.
[6] Muller K H.Theoretical analysis of removal of oxides of sulphur and nitrogen in pulsed operation of electrostatic precipitators[J]. IEEE Transactions on Plasma Science, 1995, 23(4): 661-671.
[7] Belykh S F, Tolstogouzov A B, Lozovan A A, et al.Analysis of the conditions underlying the formation of emitted atomic ion fluxes in the nonlinear collision-cascade mode of the sputtering of metals[J]. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2015, 9(1): 172-177.
[8] 王树立. 等离子清洗技术在大面积磁控溅射玻璃镀膜中的应用[J]. 消费电子, 2012(7X): 229-229.
[9] 王敬义, 何笑明, 王宇, 等. 反应溅射中的溅射产额研究[J]. 微细加工技术, 2002(2): 33-37.
[10] 林莘, 李鑫涛, 徐建源. 均匀电场下SF_6气体击穿电压的数值计算及光谱实验研究[J]. 中国电机工程学报, 2016, 36(1): 301-309.
[11] 舒胜文, 阮江军, 黄道春. 基于电场特征量和SVM的空气间隙击穿电压预测[J]. 中国电机工程学报, 2015, 35(3): 742-750.
[12] Cohen-Tannoudji C, Diu B, Laloё F.量子力学[M]. 刘家谟, 陈星奎, 译. 北京; 北京高等教育出版社, 1987.
[13] 贾克辉, 黄建兵, 徐颖, 等. 霍尔源用于光学镀膜[J]. 光子学报, 2003, 32(10): 1228-1230.
[14] Gilo M, Croitoru N.Properties of TiO2 films prepared by ion-assisted deposition using a gridless end-Hall ion source[J]. Thin Solid Films, 1996, 283(1-2): 84-89.
[15] Kaufman H R, Cuomo J J, Harper J M E. Technology and applications of broad‐beam ion sources used in sputtering. Part I. Ion source technology[J]. Journal of Vacuum Science & Technology, 1982, 21(3): 725-736.
[16] Dilsiz N.Plasma surface modification of carbon fibers; a review[J]. Journal of Adhesion Science & Technology, 2000, 14(7): 975-987.
[17] 倪新亮, 金凡亚, 但敏, 等. 等离子体活化改善碳纤维复合材料浸润性[J]. 功能材料, 2014, 45(21): 0-0.
[18] 陈康华, 包崇玺. 金属/陶瓷润湿性(上)[J]. 材料科学与工程学报, 1997(3): 6-10.
[19] 朱定一, 张远超, 戴品强, 等. 润湿性表征体系及液固界面张力计算的新方法(Ⅱ)[J]. 科学技术与工程, 2007, 7(13): 3063-3069.
[20] 陈国樑. 二元化合物总原子溅射率和刻蚀速率的经验公式[J]. Journal of Semiconductors, 1987, 8(4): 395-401.
[21] 丁大杰. 高电荷态离子Ar, Pb在Si, Cu, W靶表面上的原子溅射研究[D]. 兰州: 兰州大学, 2007.
[22] 李艳峰, 于志家, 于跃飞, 等. 化学刻蚀法制备黄铜基超疏水表面[J]. 化工学报, 2007, 58(12): 3117-3121.
[23] 岳珠峰. 多晶体光滑表面疲劳微裂纹形核机理研究[J]. 应用数学和力学, 2004, 25(8): 809-814.
[24] Sundgren J E.Structure and properties of TiN coatings[J]. Thin Solid Films, 1985, 128(1): 21-44.
[25] Levin S.Corrosion behavior of TiN coated type 316 stainless steel in simulated PEMFC environments[J]. Corrosion Science, 2004, 46(6): 1369-1380.
[26] Hotchkiss K M, Reddy G B, Hyzy S L, et al.Titanium surface characteristics, including topography and wettability, alter macrophage activation[J]. Acta Biomaterialia, 2016, 31: 425-434.
[27] 李小兵, 刘莹. 材料表面润湿性的控制与制备技术[J]. 材料工程, 2008(4): 74-80.
[1] LIU Lu-sheng, ZHAI Zhao-feng, YANG Bing, SONG Hao-zhe, YU Qi, SHI Dan, YUAN Zi-yao, LU Zhi-gang, CHEN Bin, ZHOU Mei-qi, LI Hai-ning, YU Biao, HUANG Nan, JIANG Xin. Development of Hot Filament Chemical Vapor Deposition Equipment for Continuous Diamond Film Preparation [J]. VACUUM, 2020, 57(6): 1-4.
[2] GUO Zhi-shuai, FEI Shu-guo, YIN Xiao-jun, GAO Peng, ZHAO Shuai-feng, WANG Yin-he, SONG Guang-hui. Design and Coating Technology of Optical Filter for Infrared Thermometry Imaging [J]. VACUUM, 2020, 57(6): 18-22.
[3] MA Jing, LI Jiao, GONG Xiao-tao, GENG Pei, ZHOU Chao. Effect of Electron Beam Melting Process on Surface Quality of Ta Ingot [J]. VACUUM, 2020, 57(6): 45-47.
[4] XIE Bo, LI Jian-jun, QIAO Zhong-lu. Study on Oxygenation Amount of TC4 Powder for 3D Printing Prepared by Electrode Induction Gas Atomization [J]. VACUUM, 2020, 57(6): 80-83.
[5] TAN Fei, LIN Song-sheng, SHI Qian, DAI Ming-jiang, DU Wei, WANG Yun-cheng, LV Liang. Fabrication of NiCrAlY Coating by Arc Ion Plating and Its High Temperature Oxidation Resistance [J]. VACUUM, 2020, 57(5): 7-10.
[6] WANG Zhao-yong, LI Wei, WANG Kai-hong, LI Zong-ze, LIU Zhi-qing, YU Chen-sheng, WANG Xin-lian, WANG Xiao-ni, WU Hao, MA Pei-fang. Study on Depositing Rate of the Anatase TiO2Thin Film Preparated by the Direct Current Magnetron Sputtering Technique, Its Application in the Fabricating of Multilayer Films [J]. VACUUM, 2020, 57(5): 19-23.
[7] HAO Wei-jin, CHEN Rong-fa, CAO Pei, GONG Zi-yu, LI Jing, GENG Hao-ran, WANG Zi-li. Study on Friction and Wear Properties of CrAlNx Coating on Roller Surface [J]. VACUUM, 2020, 57(5): 28-31.
[8] SUN Fei, Wang Lei, He Yun-peng, BA De-chun, SONG Gui-qiu, LIN Zeng. Research Progress of Fretting Damage and Interface Strengthening in Dental Implant System [J]. VACUUM, 2020, 57(5): 32-37.
[9] DENG Wen-yu, WANG Peng-yang, QI Li-jun, DUAN Yong-li, SUN Bao-yu, WAN Yi, ZHANG Xin-jie, XIE Yuan-hua, DU Guang-yu, LIU Kun. Research Progress on Corrosion Mechanism, Protection of NdFeB Permanent Magnet Materials [J]. VACUUM, 2020, 57(5): 45-51.
[10] ZHANG Yang-wei, LI Hong. Study on the Main Circuit Scheme and Efficiency of Vacuum DC Electric Arc Furnace [J]. VACUUM, 2020, 57(5): 70-74.
[11] WANG Fu-zhen. Heat Treatment and Vacuum Coating Towards Integration [J]. VACUUM, 2020, 57(5): 1-6.
[12] GAO Peng, JIN Xiu, REN Shao-peng, WANG Zhong-lian, ZHAO Shuai-feng, YIN Xiao-jun. Discussion on Optical Coating Standards at Home and Abroad [J]. VACUUM, 2020, 57(4): 19-23.
[13] KONG Yuan, ZHANG Hai-ou, GAO Jian-cheng, CHEN Xi, WANG Gui-lan. Numerical Simulation of Multi-Scale Double Time Steps Multi-Physical Fields During Laser Metal Melting Deposition Process [J]. VACUUM, 2020, 57(4): 77-84.
[14] WANG Xin, XU Zhen-hua, PENG Chao, DAI Jian-wei, HE Li-min, MU Ren-de. High Temperature Protection Properties of Pt Modified Aluminide Coating on the Single Crystal Superalloy [J]. VACUUM, 2020, 57(3): 11-16.
[15] WANG Kai, XU Zhen-hua, ZHEN Zhen, DAI Jian-wei, WANG Xin, HE Li-min. Effect of Grit Blasting on the Recrystallization, Elemental Diffusion Behaviors of Single Crystal Superalloy [J]. VACUUM, 2020, 57(3): 25-29.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
No Suggested Reading articles found!
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd