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VACUUM ›› 2022, Vol. 59 ›› Issue (3): 29-34.doi: 10.13385/j.cnki.vacuum.2022.03.07

• Thin Film • Previous Articles     Next Articles

Effect of Modulation Structure on Properties of Cr-CrN-Cr-CrAlN Multilayer Films

CHEN Qu-ping1, LIN Song-sheng2, LIU Ling-yun2, GUO Chao-qian2, SHI Qian2, WANG Yun-cheng1, LÜ Liang1, LIU Ruo-yu1, YI Chu-shan1   

  1. 1. Aecc South Industry Company Limited, Zhuzhou, 412000, China;
    2. Institute of New Materials, Guangdong Academy of Sciences, National Engineering Laboratory of Modern Materials Surface Engineering Technology, Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology, Guangzhou 510651, China
  • Received:2021-11-11 Online:2022-05-25 Published:2022-06-01

Abstract: In order to improve the service performance of titanium alloy, multilayer films with different RCr-CrN:RCr-CrAlN modulation ratio were prepared on TC4 titanium alloy by vacuum cathodic arc ion plating. Scanning electron microscope(SEM), X-ray diffraction (XRD), microhardness tester, scratch tester, stress tester and sand erosion tester were used to detect and analyze the cross-section morphology, structure, thickness, hardness, adhesion, residual stress and sand erosion resistance of the multilayer films. The results show that the thickness of multilayer films is 7-8μm, the transition layer is about 1.5 μm, and the thickness of single cycle is 150-200nm. All the multilayer films exhibit (200) preferred growth face centered cubic structure. With the increase of the proportion of Cr-CrAlN layer, the hardness, residual stress and adhesion of the film increase accordingly. The sand erosion resistance of multilayer films with different modulation ratios at 90° angle of attack is more than 3 times that of TC4 substrate before they are completely damaged, and at 30° angle of attack, the sand erosion resistance of multilayer films is about 8 times that of TC4 substrate. When the modulation ratio of RCr-CrN:RCr-CrAlN is 1∶2, the multilayer films have the best comprehensive properties.

Key words: modulation ratio, multilayer film, sand erosion resistance, arc ion plating, titanium alloy

CLC Number: 

  • TG174
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