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VACUUM ›› 2026, Vol. 63 ›› Issue (1): 109-112.doi: 10.13385/j.cnki.vacuum.2026.01.17

• Lectures on Vacuum Technology and Its Application • Previous Articles    

No. 23: Ion Implantation and Ion Assisted Deposition Technology

ZHANG Yichen   

  • Online:2026-01-25 Published:2026-02-02

CLC Number:  O484;TB43

[1] YU Zhiqiang, WANG Zhonglian, REN Shaopeng, LOU Haiyu, LIN Xiaomin, LI Bing, LIU Weihang, YANG Zhaoxiang, CHENG Jiaxiang. Development of Medium Wave Infrared Narrowband Filter for CO2 Gas Analysis [J]. VACUUM, 2026, 63(1): 9-14.
[2] ZHANG Yichen. No. 23: Ion Implantation and Ion Assisted Deposition Technology [J]. VACUUM, 2025, 62(6): 112-114.
[3] . [J]. VACUUM, 2025, 62(4): 97-100.
[4] . [J]. VACUUM, 2025, 62(3): 94-96.
[5] OGATA Kiyoshi, SUZUKI Yasuo, BI Tingting. Development and Application of Intelligent DLC Thin Films by PIAD Technology——Study on Application to Metal Separators for Fuel Cells [J]. VACUUM, 2025, 62(2): 68-76.
[6] LU Meijie, ZHENG Zihong, GAO Weinan, ZHENG Haozhi, LIU Gongwen, LIAN Songyou, XU Rongwang, WANG Jiangyong. Development of Quantitative Analysis Software for Film Depth Profiling [J]. VACUUM, 2025, 62(1): 37-43.
[7] . [J]. VACUUM, 2025, 62(1): 86-88.
[8] CHEN Yu-yun, WANG Xiao-xu, CHEN Yuan-ming, SHEN Yi, HUANG Rui. Study of Electrical Insulation Property of Magnetron Sputtered Silicon Oxide and Silicon Oxide/Silicon Nitride/Silicon Oxide Films [J]. VACUUM, 2024, 61(6): 15-20.
[9] . [J]. VACUUM, 2024, 61(6): 85-88.
[10] BAI Hao-yu, YAO Chun-long, DONG Ming, QIN Rui, BAI Yong-hao, WANG Yi-nan. Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter [J]. VACUUM, 2024, 61(4): 12-16.
[11] LI Rui-dong, JIN Da-li, ZHANG Mei-dong, YU Li-ping, WANG Jian-wei. Effect of Different Experimental Conditions on Charge Carrier Mobility of α-Se Films [J]. VACUUM, 2024, 61(4): 17-21.
[12] ZHANG Yi-chen. No. 22:Chemical Vapor Deposition Technology [J]. VACUUM, 2024, 61(4): 102-104.
[13] LI Can-min, DONG Zhong-lin, XIA Zheng-wei, ZHANG Xin-feng, WEI Rong-hua. Microstructure and Properties of TiCr-based Nanocomposite Coatings by Plasma Enhanced Magnetron Sputtering [J]. VACUUM, 2024, 61(2): 10-15.
[14] . [J]. VACUUM, 2024, 61(2): 86-88.
[15] . [J]. VACUUM, 2024, 61(1): 87-88.
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