欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2026, Vol. 63 ›› Issue (2): 84-89.doi: 10.13385/j.cnki.vacuum.2026.02.12

• Measurement and Control • Previous Articles     Next Articles

Test of Vacuum and Outgassing Characteristic of Domestic Vacuum Motor

GUAN Jie1, LI Runxia1, LU Qishuai2, HUANG Li2, LU Shaobo1, TANG Rong1, PING Yu1, WANG Gang2, SONG Wei2   

  1. 1. Beijing Vacuum Electronic Technology Co., Ltd., Beijing 100015, China;
    2. Suzhou Hangyu Space Power Technology Co., Ltd., Suzhou 215552, China
  • Received:2025-04-21 Online:2026-03-25 Published:2026-03-27

Abstract: As a kind of special motor, vacuum motor is widely used in aerospace, semiconductor, scientific instrument, large scientific device and other fields. The requirements for transmission components vary with different application scenarios, such as volatiles, outgassing, heat dissipation characteristics, and the radiation resistance of materials. The vacuum motor includes stator, rotor, cable and bearing, etc. The material is complex and diverse, and the outgassing characteristic has great influence on the stability of the vacuum system. Different models with excellent vacuum performance were selected from domestic vacuum motors, and the vacuum and outgassing characteristics of the motors were tested and analyzed based on the theory of orifice conductance method. The vacuum comparison test was carried out simultaneously. By setting up a vacuum test system and combining with QMS, the vacuum degree characteristic, as well as the outgassing rate, gas composition and time evolution of vacuum motor under static conditions were tested experimentally. After 20 minutes without baking, the optimal vacuum degree of the domestic vacuum motor can reach 2×10-4 Pa. After 10 hours without baking, the partial pressure of H2O is 1×10-6 Pa and that of CxHy is 1×10-8 Pa. The work may provide a reference for related outgassing rate test, domestic vacuum motor selection, technology optimization and quality improvement, as well as domestic substitution.

Key words: vacuum environment, vacuum motor, outgassing rate, testing, partial pressure

CLC Number:  TB771

[1] 段春俭,邵明超,李宋,等. 极端条件下的聚酰亚胺自润滑复合材料的研究进展[J]. 中国科学:化学,2018,48(12): 1561-1567.
[2] 卢少波,姚铮,宋艳鹏,等. 空间行波管专用排气工艺极高真空系统的研制[J]. 真空,2022,59(5):50-54.
[3] 陈辰,钱华,李志鹏,等. 真空环境用有刷直流电机三维瞬态温度场的计算与分析[J]. 微特电机, 2021,49(6): 34-37.
[4] 姚应峰,张耀平,于照洋.真空管道中直线电机冷却方案研究[J].真空, 2007, 44(5):66-68.
[5] 高佳丽,李伟奇,董琴,等. 高性能聚醚醚酮熔融沉积成型及真空放气特性[J]. 高分子材料科学与工程, 2024,40(12):97-106.
[6] 原青云,张希军,段赛赛. 真空环境温度对聚酰亚胺表面充电特性的影响[J]. 太赫兹科学与电子信息学报, 2024,22(10):1172-1179.
[7] 陈文庆,毕海权,周远龙. 真空管道内直线电机定子温度分布与散热特性研究[J]. 制冷与空调(四川), 2024,38(3):293-298,312.
[8] 崔寓淏,孙立臣,杜春林,等. 卫星内部真空度预判模拟仿真研究[J]. 真空科学与技术, 2024,44(7):559-563.
[9] 曾祥坡,张涤新,冯焱,等.小孔流导法测量材料放气率研究[J].真空, 2010,47(3):55-58.
[10] 庞嘉炜,高建强,陈光奇,等. 薄壁构件的氦质谱正压-真空检漏试验研究[J]. 真空, 2025,62(1):15-20.
[11] 王剑. 大型真空铝钎焊炉控制系统[J]. 金属热处理, 2013,38(1):123-126.
[12] 师立侠,王凯,汪力,等. 面向探月工程应用的几种新型工质检漏技术[J]. 航天器环境工程,2020,37(3):310-314.
[13] YOSHIMURA N, OIKAWA H, MIKAMI O.Measurement of outgassing rates from materials by differential pressurerise method[J]. Shinku,1970,13(1):23-28.
[14] 冯焱,曾祥坡, 张涤新,等. 小孔流导法材料放气率测量装置的设计[J]. 宇航计测技术, 2010, 30(3): 66-69.
[15] YOSHIMURA N, HIRANO H.Two point pressure method formeasuring the outgassing rate[J]. Journal of Vacuum Science & Technology A,1989, 7(6): 3351-3355.
[16] SAITO K, SATO Y, INAYOSHI S, et al.Measurement system for low outgassing materials by switching between two pumping paths[J]. Vacuum,1996, 47(6-8):749-752.
[17] LUO Y, WU X, WANG K, et al.Comparative study on surface influence to outgassing performance of aluminum alloy[J]. Applied Surface Science,2020,502:144166.
[18] 高云飞,何远新,南晋峰,等. LNG罐式集装箱主要组成材料放气速率测试[J]. 真空与低温, 2022,28(6): 682-687.
[19] 王婧华,王蓝陵,林文豫,等.差压法测定NEG吸氢性能[J].真空, 2024,61(3):51-56.
[20] 王星辉,成永军,董猛,等. 基于四极质谱计质量歧视效应修正的材料CxHy放气率测试方法研究[J]. 真空科学与技术学报,2023,43(11): 938-946.
[21] 沈逍,靳海,詹衡,等.颗粒改性复合真空绝热板的制备与表征[J].真空, 2025,62(2):22-27.
[22] SCHINDLER N, SCHLEUBNER D. EDELMANN C.Measurements of partial outgassing rates[J]. Vacuum,1996,47(4):351-355.
[23] GARKE B, EDELMANN C, GÜNZEL R, et al. Modification of the outgassing rate of stainless steel surfaces by plasmaimmersion ion implantation[J]. Surface and Coating Technology,1997,93:318-326.
[24] 张涤新,曾祥坡,冯焱,等.材料放气率测量方法评述[J].真空, 2010,47(6):5:1-5.
[25] 卯鑫,冯思庆,刘鹏,等.带有防咬死铜镀层的标准螺纹紧固件放气率测试[J].真空, 2024,61(4):80-84.
[26] 李津铭,王进伟,刘俊男,等.真空材料放气率高精度测量装置[J]. 真空,2023,60(4):60-64.
[27] 刘胜,崔寓淏,窦仁超,等.真空试验压力变化数值模拟研究[J].真空, 2022,59(3):12-15.
[1] TAN Biao, YU Jiebing, WANG Pengcheng, LI Yanmin, LIU Jiaming, LIU Shunming, GUAN Yuhui, SUN Xiaoyang, WANG Yigang, ZHU Bangle. Study on the Outgassing Performance of Graphite/Copper Composite [J]. VACUUM, 2025, 62(5): 17-22.
[2] WEI Jun, HAN Jiang, ZUO Guizhong, WU Jiefeng, HU Yufeng, SHANG Mingming. Development and Testing of Air Tightness Test System for Divertor of EAST [J]. VACUUM, 2025, 62(4): 1-6.
[3] CHEN Yu-yun, WANG Xiao-xu, CHEN Yuan-ming, SHEN Yi, HUANG Rui. Study of Electrical Insulation Property of Magnetron Sputtered Silicon Oxide and Silicon Oxide/Silicon Nitride/Silicon Oxide Films [J]. VACUUM, 2024, 61(6): 15-20.
[4] CHEN Cheng, ZHU Ming-liang, LI Ming-yue, HE Zhen-feng, WANG Zhi-guo, HE Chen. Eddy Current Testing Simulation for Surface Defects for Laser Melting Deposition [J]. VACUUM, 2024, 61(4): 96-101.
[5] MAO Xin, FENG Si-qing, LIU Peng, PENG Xue-bing, WU Huan. Test of Outgassing Rates of Threaded Fasteners with Copper Anti-seize Coating [J]. VACUUM, 2024, 61(4): 80-84.
[6] CHANG Xue-sen, WANG Yi-ting, ZHAO Yue, GE Pan, LU Han-bin, WENG Chen-hao. Analysis and Experimental Study of the Piston Compressor Vibration [J]. VACUUM, 2024, 61(4): 47-51.
[7] LI Xiao-jin, LI Zheng-qing, HAN Xian-hu, CAI Yu-hong, YANG Jian-bin, LIU Xiao-wen. A Design Method Based on TRIZ Theory to Enhance the Base Pressure of Roots Vacuum Pump [J]. VACUUM, 2024, 61(2): 62-67.
[8] ZHANG Hong-bo, QU Tian-liang, WANG Peng. High Vacuum Maintaining Technology for Hemispherical Resonator Gyro [J]. VACUUM, 2023, 60(4): 75-79.
[9] WANG Jing-zhe, ZHOU Fei-ge, FENG Hui-hua. Experimental Study on the Vacuum Outgassing Rate of FRP and Multilayer Insulation Materials [J]. VACUUM, 2023, 60(4): 65-68.
[10] LI Jin-ming, WANG Jin-wei, LIU Jun-nan, CHEN Ming. High-precision Measurement Device for Outgassing Rate of Vacuum Materials [J]. VACUUM, 2023, 60(4): 60-64.
[11] LU Shao-bo, YAO Zheng, SONG Yan-peng, HAN Yong-chao, ZHANG Ji-feng, TANG Rong. Development of XHV System for Customized Vacuum Exhaust Process for Space TWTs [J]. VACUUM, 2022, 59(5): 50-54.
[12] SONG Yan-peng, QIANG Bo, HAN Yong-chao, TANG Rong, ZHANG Ji-feng. Detection Method for Small Leaks of Missile-Borne Klystron [J]. VACUUM, 2022, 59(4): 18-21.
[13] HUANG Fan, LI Bin, LIU Yi-qun, CAO Hui. Influence of Paper Barcode on Helium Leak Detection Output of the Fuel Rod and Solution [J]. VACUUM, 2021, 58(5): 89-92.
[14] QI Da-wei, GAO Jun-wang, WU Bin, WANG Hui, LV De-run. Optimal Design of Large Caliber Vacuun Gate Valve [J]. VACUUM, 2021, 58(5): 46-49.
[15] DING Xu, LUO Wen-yong, HUANG Wen-jun, WU Shu-jian, YU Zhi-qiang. Simulation and Application of PCVD Fiber Precast Rod Microwave System [J]. VACUUM, 2021, 58(2): 6-9.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[2] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] MA Jia-jie, LI Jian-chang, CHEN Bo. Latest studies on memristor's integration and application[J]. VACUUM, 2018, 55(5): 71 -85 .
[5] LIU Shun-ming, SONG Hong, DONG Hai-yi, GUAN Yu-hui, LIU Sheng-hua. Applications of quadrupole mass spectrometer in drift tube linear accelerator[J]. VACUUM, 2018, 55(6): 5 -9 .
[6] SHEN Fu-bo, WANG Jie, ZHAI Yue, ZHOU Zhi-peng. Light shell design of low temperature adsorption bed and its optimization[J]. VACUUM, 2018, 55(6): 42 -44 .
[7] Alessandro Abatecola. A new high-conductance ion pump for particle accelerator[J]. VACUUM, 2019, 56(1): 16 -19 .
[8] ZHONG Zhao-jin, CAO Xin, GAO Qiang, HAN Na, CUI Jie-dong, SHI Li-fen, YAO Ting-ting, MA Li-yun, PENG Shou. Effect of RF sputtering power on properties of AZO thin films deposited at room temperature[J]. VACUUM, 2019, 56(1): 45 -48 .
[9] CHEN Wen-bo, CHEN Lun-jiang, Liu Chuan-dong, CHENG Chang-ming, TONG Hong-hui, ZHU Hai-long. Numerical simulation of a DC arc thermal plasma torch[J]. VACUUM, 2019, 56(1): 56 -58 .
[10] HAN Feng, ZHANG Shi-wei, WANG De-xi, LIU Bo, WANG Meng. Dangerous industrial wastewater treatment based on vacuum evaporation technology[J]. VACUUM, 2019, 56(1): 67 -71 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd