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VACUUM ›› 2026, Vol. 63 ›› Issue (2): 75-83.doi: 10.13385/j.cnki.vacuum.2026.02.11

• Vacuum Metallurgy and Thermal Engineering • Previous Articles     Next Articles

Design and Application of Continuous IGBT Vacuum Welding Equipment

LI Jinwei1,2, LU Yu2, CAI Chuanhui2   

  1. 1. The CETC 43rd Research Institute, HeFei 230088 China;
    2. HengLi Eletek Co., Ltd, HeFei 230088 China
  • Received:2025-04-29 Online:2026-03-25 Published:2026-03-27

Abstract: In order to solve the problems of DBC substrate oxidation, rapid temperature rise and fall of homogenization, and continuous production, a continuous IGBT vacuum welding equipment was designed in this paper. The system has a long-term use temperature of 400 ℃, a working vacuum degree of 1 mbar, and an ultimate vacuum degree of 0.1 mbar. The logic of the continuous operation of the equipment was introduced in detail. The IGBT chip passed through the import platform, preheating chamber, welding cavity, cooling cavity and outlet platform on the carrier in turn. The formic acid was used as the reducing agent, and the vacuum welding process of the IGBT chip was completed by controlling the temperature, pressure and other parameters of the vacuum welding process. The design included the equipment layout, action logic, reaction chamber, vacuum system, gas circuit system, other mechanical systems, and electrical system. After the assembly and commissioning of the equipment was completed, the test was carried out according to the vacuum welding process of the IGBT chip. Its void rate is <1%, and the performance of the equipment meets the requirements of the vehicle specification level.

Key words: IGBT chip, vacuum welding, continuous design, void rate

CLC Number:  TB79

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