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VACUUM ›› 2025, Vol. 62 ›› Issue (3): 53-57.doi: 10.13385/j.cnki.vacuum.2025.03.10

• Thin Film • Previous Articles     Next Articles

Research on Key Technologies of Vacuum Magnetron Sputtering Double-Sided Copper Coating on Ultra-Thin Flexible Substrates

LUO Junwen   

  1. Guangdong Huicheng Vacuum Technology Co., Ltd., Dongguan 511700, China
  • Received:2025-02-13 Online:2025-05-25 Published:2025-05-23

Abstract: The working principle, structural composition, and key technical design points of the vacuum magnetron sputtering winding copper coating equipment for ultra-thin flexible substrates with double-sided coating were introduced in detail. The main factors affecting the coating quality and production efficiency were analyzed. The technical difficulties and solutions of ultra-thin substrate coating were mainly discussed. By optimizing the roll system layout of winding system and the structure of magnetron sputtering system, and adding insulating ceramic layer on the coating roller surface, the thermal damage of the film is effectively solved. This optimization method can improve the production quality and efficiency of composite copper foil materials for new energy lithium batteries, and accelerate the mass production of composite current collector negative electrode materials for new energy lithium batteries.

Key words: ultra-thin substrate, magnetron sputtering, double-sided coating, insulation ceramic layer, thermal damage

CLC Number:  TB79;TB43

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