内嵌式紧凑型ECR离子源设计及初步实验研究*

doi:10.13385/j.cnki.vacuum.2026.01.08

摘要/Abstract

摘要： 本文设计了一套内嵌式紧凑型2.45 GHz ECR离子源,包含微波馈入结构、等离子体腔室、引出电极的设计。该离子源的整体尺寸为Φ200 mm×178 mm,等离子体腔室尺寸为Φ30 mm×50 mm。设计引出电压参数为50 kV,氢等离子体束流为20 mA。通过仿真验证设计的可行性,束流模拟结果显示,三电极引出结构可以在50 kV高压下实现20 mA束流引出,束流在传输路径中几乎没有损失,束散角不超过1.2×10^-3 rad。在50 kV引出电压下,产生的电场模量最大4.17 kV/mm,小于击穿条件10 kV/mm。热模拟结果显示,在设计的水冷结构下,等离子体腔室的表面最高温度有明显降低,约92 ℃。仿真结果显示在真空环境下,氧化铝陶瓷腔室外部受大气压产生的最大应力为2.38 MPa,小于陶瓷材料的屈服强度160 MPa。基于以上设计,成功搭建了ECR离子源平台并开展了初步的实验研究。实验结果表明,在极限真空5.7×10^-5 Pa下陶瓷腔室未发生破裂,系统耐压达到65 kV。目前,系统可以在25 kV高压下成功引出9 mA的氢等离子体束流。

关键词: ECR离子源, 紧凑型, 等离子体, 引出电极

Abstract: This work presents the design of a compact embedded 2.45 GHz ECR ion source, including the microwave feed, plasma chamber and the extraction electrode. The overall size of the source is Φ200 mm×178 mm, with a plasma chamber size of Φ30 mm×50 mm. The design parameters of extraction voltage and hydrogen ion current are 50 kV and 20 mA, respectively. The feasibility of the design is verified by simulation. Flow field simulations show that the tri-electrode extraction structure can achieve a 20 mA extracted ion beam at 50 kV, with a beam divergence angle below 1.2×10^-3 rad. The electric field magnitude reaches 4.17 kV/mm under a 50 kV voltage, which is below the breakdown threshold 10 kV/mm of Al₂O₃ material. Thermal simulation results indicate that the as-designed water-cooling structure significantly reduces the maximum surface temperature of the cavity. Simulation results show that the maximum stress of the ceramic chamber is 2.38 MPa under atmospheric pressure with an internal vacuum, which is less than the yield strength (160 MPa) of the Al₂O₃ ceramic material. Based on these results, an ECR ion source system was developed, achieving initial experimental results. Under a vacuum pressure of 5.7×10^-5 Pa, the ceramic cavity did not experience breakdown, and the system demonstrated resistance to voltages exceeding 50 kV. At present, the system successfully outputs a 9 mA hydrogen ion beam at 25 kV.

Key words: ECR ion source, compact design, plasma, extraction electrode

中图分类号: O539

李晨暄, 孟献才, 李旭, 闫振, 钱玉忠, 谢亚红, 梁立振. 内嵌式紧凑型ECR离子源设计及初步实验研究^*[J]. 真空, 2026, 63(1): 46-53.

LI Chenxuan, MENG Xiancai, LI Xu, YAN Zhen, QIAN Yuzhong, XIE Yahong, LIANG Lizhen. Design and Preliminary Experimental Study of an Embedded Compact ECR Ion Source[J]. VACUUM, 2026, 63(1): 46-53.

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