实验优化设计中频反应溅射Al2O3：Ce薄膜发光性质研究

实验优化设计中频反应溅射Al₂O₃：Ce薄膜发光性质研究

The Luminescent Property of Al₂O₃：Ce MFRMS Thin Films Sputtered by Optimal Design of Experiments

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doi:10.13385/j.cnki.vacuum.2022.01.05

摘要： 为了得到最优发光的薄膜材料成分参数,采用均匀设计和二次通用旋转组合设计相结合的方法建立发光强度与薄膜中氧含量和Ce³⁺离子掺杂浓度的回归方程,并用遗传算法求其取最大值时的解。用中频反应磁控溅射技术制备了相应成分的Al₂O₃：Ce非晶薄膜。在320nm光激发下,获得了较理想的发射光谱,对薄膜发光机理分析表明：薄膜的光致发光来自于Ce³⁺离子的5d¹激发态向基态4f¹的两个劈裂能级的跃迁。发光强度强烈的依赖于薄膜的掺杂浓度和氧元素含量。XPS检测表明,Al₂O₃：Ce薄膜中存在Ce³⁺。Ce³⁺含量和薄膜的化学成分是通过X射线散射能谱（EDS）测量的。薄膜试样的晶体结构应用X射线衍射分析。

关键词: 光致发光, 实验优化, Al₂O₃, 薄膜, 稀土元素

Abstract: The method of optimally designing experiments was introduced to study the properties of Al₂O₃:Ce luminescence thin films.Uniform design and quadratic general rotary unitized design were combined to build the equation between the luminescent intensity and the O^2-/Ce³⁺ doping concentration.Genetic algorithm was introduced into the calculation to obtain the best luminescent intensity.The optimal amorphous Al₂O₃:Ce thin films were deposited by the MF reactive magnetron sputtering technique.Under 320nm ultraviolet excitation,the blue emission spectrum was detected.The luminescence mechanism was studied.The photoluminescence emission from these films was associated with 5d¹ to 4f¹ transitions of Ce³⁺ ions.The intensity of these peaks was strongly dependent on the amount of cerium and oxygen incorporated in the films.There were some Ce³⁺ in the Al₂O₃:Ce thin films by XPS measurement.The presence of cerium as well as the stoichiometry of these films were determined by energy dispersive X-ray spectroscope measurements.The crystalline structure of the sample was analyzed by X-ray diffractometry.

Key words: photoluminescence, experiment optimization, Al₂O₃, thin films, rare earth

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TB43

廖国进, 闫绍峰, 仪登利, 戴晓春. 实验优化设计中频反应溅射Al₂O₃：Ce薄膜发光性质研究[J]. 真空, 2022, 59(1): 24-28.

LIAO Guo-jin, YAN Shao-feng, YI Deng-li, DAI Xiao-chun. The Luminescent Property of Al₂O₃：Ce MFRMS Thin Films Sputtered by Optimal Design of Experiments[J]. VACUUM, 2022, 59(1): 24-28.

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