磁控溅射镀膜技术在（Cr,Ti,Al）N涂层上的应用*

doi:10.13385/j.cnki.vacuum.2024.04.05

Abstract

Abstract: Transition metal nitride hard coatings are widely used for cutting tools, precision molds and mechanical parts. With the development of cutting technology and the increase of difficult-to-process materials, hard coatings have been continuously developed from traditional binary coatings to ternary coatings and quaternary coatings. The (Cr,Ti,Al)N quaternary coatings have attracted much attention because of their excellent comprehensive properties. Based on the basic principle and technical characteristics of magnetron sputtering deposition, this paper introduces the common magnetron sputtering deposition technology for the preparation of (Cr,Ti,Al)N coating, analyzes the effect of using elemental target and alloy target for deposition, and studies the influence of magnetron sputtering process parameters on the mechanical properties of (Cr,Ti,Al)N coating, and finally discusses the function and preparation method of (Cr,Ti,Al)N gradient coating. This paper may provide theoretical reference and guidance for designing the preparation process and improving the properties of (Cr,Ti,Al)N coating.

Key words: (Cr, Ti, Al)N coating, magnetron sputtering, target selection, process parameter, gradient coating

CLC Number: TB43;TG174.444

ZHAO Fan, XIANG Yan-xiong, ZOU Chang-wei, YU Yun-jiang, LIANG Feng. Application of Magnetron Sputtering Deposition Technology for （Cr,Ti,Al）N Coatings[J].VACUUM, 2024, 61(4): 22-29.

References

[1] 刘聪, 张钧, 张热寒, 等. (Ti,Al,Cr)N膜系的研究进展[J]. 材料保护, 2021, 54(3): 131-136.
[2] 赵升升. 氮化物硬质薄膜残余应力的研究进展[J]. 深圳职业技术学院学报, 2013, 12(3): 64-69.
[3] 李根, 张高会. 硬质薄膜研究综述[J]. 宁波教育学院学报, 2010, 12(5): 82-85.
[4] 唐凯, 朱生发, 吴艳萍. TiAlN 和 TiCrAlN 薄膜的制备和耐磨性能[J]. 功能材料, 2015(23): 23148-23152.
[5] 韩亮, 杨立, 陈仙, 等. 氮化物硬质涂层中Cr、Ti和Al元素对摩擦磨损特性的影响[J].真空, 2012, 49(2): 47-51.
[6] 白力静, 蒋百灵, 文晓斌, 等. 热氧化温度对磁控溅射CrTiAlN梯度镀层表面形貌与组织结构的影响[J]. 材料热处理学报, 2005, 26(4): 111-114.
[7] 楼白杨, 王肖璟, 周艳, 等. 温度对复合CrTiAlN涂层摩擦磨损性能的影响[J]. 稀有金属材料与工程, 2018, 47(3): 949-953.
[8] 蔡志海, 胡佳帅, 杜月和, 等. TiN基复合涂层硬质合金刀具的力学性能与切削性能研究[J]. 装甲兵工程学院学报, 2007, 21(2): 87-90.
[9] 王均涛, 刘平, 李伟, 等. TiAlN硬质涂层的研究进展[J]. 热加工工艺, 2010, 39(20): 104-109.
[10] 王目孔, 马瑞新, 林炜, 等. TiAlN硬质薄膜/涂层材料的研究进展[J]. 硬质合金, 2008, 25(3): 186-191.
[11] 郑康培, 刘平, 李伟, 等. AlCrN硬质涂层材料的研究进展[J]. 材料导报, 2010, 24(17): 44-48.
[12] 金浩, 张莹莹, 时卓, 等. 磁控溅射技术制备CrAlN涂层的研究进展[J]. 材料导报, 2016, 30(3): 54-59.
[13] 朱雪飞, 刘云超, 施雯. SDC90钢CrTiAlN和AlTiN涂层承载能力和耐磨性的研究[J]. 上海金属, 2016, 38(1): 15-19.
[14] 王宇星, 陈凯南, 周艳, 等. CrTiAlN薄膜的微观结构及其高温摩擦磨损性能[J]. 材料科学与工程学报,2016, 34(5): 716-720.
[15] 陈迪春, 蒋百灵, 吴文文. 磁控溅射CrAlTiN镀层的微观结构研究[J]. 西安理工大学学报, 2010, 26(4): 398-402.
[16] 楼白杨, 周艳. CrTiAlN涂层的高温抗氧化性能[J]. 材料科学与工程学报, 2016, 34(2): 204-207.
[17] XU Y X, RIEDL H, HOLEC D, et al.Thermal stability and oxidation resistance of sputtered Ti-Al-Cr-N hard coatings[J]. Surface and Coatings Technology, 2017, 324: 48-56.
[18] ZOU C W, ZHANG J, XIE W, et al.Characterization and mechanical properties of Ti-Al-Cr-N nanocomposite coatings deposited by closed field unbalanced middle frequency magnetron sputtering[J]. Japanese Journal of Applied Physics, 2011, 50(12): 125806.
[19] 贠柯, 鲁元, 杨旭, 等. 磁控溅射制备CrTiAlN梯度镀层的热冲击性能研究[J]. 材料导报, 2014, 28(20): 102-105.
[20] STRNAD G, BIRO D, BOLOS V, et al.Researches on nanocomposite self-lubricated coatings[J]. Metalurgia International, 2009, 14: 121-124
[21] ZHOU Z F, TAM P L, SHUM P W, et al.High temperature oxidation of CrTiAlN hard coatings prepared by unbalanced magnetron sputtering[J]. Thin Solid Films, 2009, 517(17): 5243-5247.
[22] FERNANDES F, DANEK M, POLCAR T, et al.Tribological and cutting performance of TiAlCrN films with different Cr contents deposited with multilayered structure[J]. Tribology International, 2018, 119: 345-353.
[23] HUANG F, WEI G H, BARNARD J A, et al. Microstructure and stress development in magnetron sputtered TiAlCr(N) films[J]. Surface & Coatings Technology, 2001, 146/147: 391-397.
[24] WANG Q Z, ZHOU F, YAN J W.Evaluating mechanical properties and crack resistance of CrN, CrTiN, CrAlN and CrTiAlN coatings by nanoindentation and scratch tests[J]. Surface & Coatings Technology, 2016, 285: 203-213.
[25] HORLING A, HULTMAN L, SJOLEN J, et al. Composite structured wear resistant coating: EP1452621A2[P].2004-09-01.
[26] HORLING A, HULTMAN L, SJOLEN J, et al. Precipitation hardened wear resistant coating: US7056602B2[P].2006-06-06.
[27] ZHANG J, LV H M, CUI G Y, et al.Effects of bias voltage on the microstructure and mechanical properties of (Ti,Al,Cr)N hard films with N-gradient distributions[J]. Thin Solid Films, 2011, 519(15): 4818-4823.
[28] FUKUMOTO N, EZURA H, YAMAMOTO K, et al.Effects of bilayer thickness and post-deposition annealing on the mechanical and structural properties of (Ti,Cr,Al)N/(Al,Si)N multilayer coatings[J]. Surface & Coatings Technology, 2009, 203(10/11): 1343-1348.
[29] KONG D J, FU G Z.Friction and wear behaviors of AlTiCrN coatings by cathodic arc ion plating at high temperatures[J]. Journal of Materials Research, 2015, 30(4): 503-511.
[30] BOEHLMARK J, CURTINS H, GENVAD A. Coated cutting tool: WO2013041576A1[P].2013-03-28.
[31] GOTHELID E, PETTERSSON M. Coated cutting tool: WO2017009101A1[P].2017-01-19.
[32] 李芬, 朱颖, 李刘合, 等. 磁控溅射技术及其发展[J]. 真空电子技术, 2011(3): 49-54.
[33] PRIETO-NOVOA G, VALLEJO F, PIAMBA O, et al.Effects of Cr concentration on the structure and the electrical and optical properties of Ti-Al-Cr-N thin films prepared by means of reactive co-sputtering[J]. Crystals. 2022, 12(12): 1831.
[34] 徐万劲. 磁控溅射技术进展及应用(上)[J]. 现代仪器, 2005, 11(5): 1-5.
[35] 郝晓亮. 磁控溅射镀膜的原理与故障分析[J].电子工业专用设备, 2013, 42(6): 57-60.
[36] 杨文茂, 刘艳文, 徐禄祥, 等. 溅射沉积技术的发展及其现状[J]. 真空科学与技术学报, 2005, 25(3): 204-210.
[37] 余东海, 王成勇, 成晓玲, 等. 磁控溅射镀膜技术的发展[J]. 真空, 2009, 46(2): 19-25.
[38] 张继成, 吴卫东, 许华, 等. 磁控溅射技术新进展及应用[J]. 材料导报, 2004(4): 56-59.
[39] 杨林生, 王君, 陈长琦. 硬质薄膜技术的最新发展[J]. 真空, 2009, 46(6): 35-39.
[40] 白力静, 李玉庆, 肖继明, 等. 闭合场非平衡磁控溅射离子镀技术在切削刀具上的应用[J]. 西安理工大学学报, 2006, 22(1): 20-23.
[41] 白力静, 肖继明, 蒋百灵, 等. 磁控溅射CrTiAlN涂层钻头的制备及其钻削性能研究[J]. 表面技术, 2005, 34(4): 21-23.
[42] 种艳琳, 蒋白灵, 白力静. 闭合场非平衡磁控溅射离子CrAlTiN镀层在PCB用微钻中的应用[J]. 表面技术, 2006, 35(2): 65-68.
[43] LU L, WANG Q M, CHEN B Z, et al.Microstructure and cutting performance of CrTiAlN coating for high-speed dry milling[J]. Transactions of Nonferrous Metals Society of China, 2014, 24(6): 1800-1806.
[44] KIRYUKHANTSEV-KORNEEV V, PHIRI J, GLADKOV V I, et al.Erosion and abrasion resistance, mechanical properties, and structure of the TiN, Ti-Cr-Al-N and Cr-Al-Ti-N coatings deposited by CFUBMS[J]. Protection of Metals and Physical Chemistry of Surfaces, 2019, 55, 913-923.
[45] ZHANG G, YANG S, JIANG B, et al.Up-scaled Teer-UDP850/4 unbalanced magnetron deposition system used for mass-production of CrTiAIN hard coatings[J]. Transactions of Materids and Heat Treatment, 2004, 25(5): 827-831.
[46] 暴一品, 李刘合, 刘峻曦, 等. 高功率脉冲磁控溅射研究进展[J]. 原子核物理评论, 2015, 32(增刊1): 52-58.
[47] 吴志立, 朱小鹏, 雷明凯. 高功率脉冲磁控溅射沉积原理与工艺研究进展[J]. 中国表面工程, 2012, 25(5): 15-20.
[48] 王启民, 张小波, 张世宏, 等. 高功率脉冲磁控溅射技术沉积硬质涂层研究进展[J]. 广东工业大学学报, 2013(4): 1-13.
[49] 吴忠振, 朱宗涛, 巩春志, 等. 高功率脉冲磁控溅射技术的发展与研究[J]. 真空, 2009, 46(3): 18-22.
[50] 马安博. 高功率脉冲磁控溅射技术的研究及应用[J].真空, 2018, 55(2): 26-29.
[51] ALHAFIAN M R, CHEMIN J B, VALLE N, et al.Study of the oxidation mechanism at high temperature of nanofiber textured AlTiCrN coatings produced by physical vapor deposition using high-resolution characterization techniques[J]. Corrosion Science, 2022, 201: 110226.
[52] LIN J L, ZHANG X H, OU Y X, et al.The structure, oxidation resistance, mechanical and tribological properties of CrTiAlN coatings[J]. Surface & Coatings Technology, 2015, 277: 58-66.
[53] YANG S, TEER D G.Properties and performance of CrTiAlN multilayer hard coatings deposited using magnetron sputter ion plating[J]. Surface Engineering, 2002, 18(5): 391-396.
[54] 付泽钰, 王天国. TiAlCrN涂层的研究现状及发展前景[J]. 世界有色金属, 2021(1): 176-177.
[55] JUNG D H, MOON K I, SHIN S Y, et al.Influence of ternary elements (X=Si, B, Cr) on TiAlN coating deposited by magnetron sputtering process with single alloying targets[J]. Thin Solid Films, 2013, 546: 242-245.
[56] 贵宾华, 周晖, 郑军, 等. 脉冲峰值电流对HIPIMS/DCMS共沉积制备AlCrTiN涂层性能的影响[J]. 中国表面工程, 2016, 29(5): 56-65.
[57] 刘云超, 罗艳艳, 朱雪飞, 等. 光发射谱对CrTiAlN涂层性能的影响[J]. 中国有色金属学报, 2017, 27(4): 760-765.
[58] 石永敬, 潘复生, 王维青, 等. 溅射沉积铝合金基CrTiAlN涂层的结构、力学以及摩擦学特性[J]. 中国有色金属学报, 2011, 21(9): 2099-2104.
[59] 邓建伟, 田灿鑫, 黎明, 等. 等离子体沉积CrN和CrTiAlN薄膜[C]//.中国核科学技术进展报告——中国核学会2009年学术年会论文集(第一卷·第6册). 北京: 中国核学会, 2009: 482-488.
[60] 贵宾华, 周晖, 郑军, 等. N₂流量对HIPIMS/DCMS共沉积制备TiAlCrN涂层结构及性能的影响[J]. 真空科学与技术学报, 2016, 36(7): 800-806.
[61] 金杰, 李娜, 田正磊, 等. 靶/基距对CrTiAlN薄膜性能影响的研究[J]. 浙江工业大学学报, 2013, 41(1): 73-75.
[62] 林静, 张硕, 马德政, 等. 沉积温度对AlCrTiN涂层组织结构与性能的影响[J]. 中国表面工程, 2021, 34(6): 114-123.
[63] 罗艳艳, 施雯, 万紫. Ti靶电流对CrTiAlN涂层摩擦磨损性能的影响[J]. 上海金属, 2019, 41(2): 76-80.
[64] 贠柯, 蒋百灵, 白力静. Ti靶电流对CrTiAlN镀层组织结构及硬度的影响[J]. 材料热处理学报, 2009, 30(6): 149-153.
[65] 宋庆功, 程立军. 磁控溅射制备(Ti,Al,Cr)N硬质薄膜及其力学性能的研究[J]. 真空, 2009, 46(5): 26-29.
[66] 程立军, 宋庆功. 磁控溅射制备TiAlCrN硬质薄膜及其抗腐蚀性能[J]. 材料保护, 2009, 42(9): 16-18.
[67] DANEK M, FERNANDES F, CAVALEIRO A, et al.Influence of Cr additions on the structure and oxidation resistance of multilayered TiAlCrN films[J]. Surface & Coatings Technology, 2017, 313: 158-167.
[68] SUI X D, LI G J, ZHOU H B, et al.Evolution behavior of oxide scales of TiAlCrN coatings at high temperature[J]. Surface & Coatings Technology, 2019, 360: 133-139.
[69] ASTRAND M, AHLGREN M, BLOMQVIST H. A PVD method for deposition a coating onto a body and coated bodies made thereof: WO2011034492A1[P].2011-03-24.
[70] 严少平, 孙雅琴, 段冰, 等. 基体偏压对CrTiAlN镀层摩擦磨损性能的影响[J]. 合肥工业大学学报(自然科学版), 2007, 30(8): 966-970.
[71] 白力静, 张国君, 蒋百灵. 偏压对CrTiAlN镀层组织形貌及磨损性能的影响[J]. 材料热处理学报, 2006,27(5): 100-103.
[72] 陈迪春, 蒋百灵, 吴文文, 等. 镁合金表面磁控溅射CrAlTiN镀层的制备技术研究[J]. 表面技术, 2008, 37(2): 8-10.
[73] TAM P L, ZHOU Z F, SHUM P W, et al.Structural, mechanical, and tribological studies of Cr-Ti-Al-N coating with different chemical compositions[J]. Thin Solid Films, 2008, 516(16): 5725-5731.
[74] 李凌, 蒋百灵, 白力静. CrAlTiN镀层在精密铣刀上的应用研究[J]. 材料保护, 2007, 40(1): 56-59.
[75] 肖继明, 李言, 白力静, 等. CrAlTiN涂层高速钢刀具的切削性能和磨损特性[J]. 材料热处理学报, 2005, 26(6): 117-121.
[76] 于磊, 鲍明东, 应鹏展. Al、Ti共掺杂CrN基镀层的结构调变和摩擦学性能[J]. 热加工工艺, 2008, 37(24): 45-48.
[77] 李凌, 文晓斌, 李小泉. 闭合场非平衡磁控溅射离子镀技术在PCB铣刀上的应用与研究[J]. 印制电路信息, 2006(1): 43-45.
[78] 张豪, 许向敏, 费晓燕, 等. CrTiAlN涂层在800 ℃和900 ℃时对H13钢氧化性能的影响[J]. 人工晶体学报, 2013, 42(12): 2715-2719.
[79] 严少平, 孙雅琴, 段冰, 等. 非平衡磁控溅射CrTiAlN镀层摩擦学性能分析[J]. 安徽理工大学学报(自然科学版), 2006, 26(4): 92-96.
[80] 肖继明, 白力静, 李言, 等. 磁控溅射CrAlTiN涂层高速钢麻花钻的钻削试验研究[J]. 西安理工大学学报, 2006, 22(2): 119-122.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[4]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[5]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[6]	XU Fa-jian, WANG Hai-lei, ZHAO Cai-xia, HUANG Zhi-ting. Application of chemical gases vacuum-compression recovery system in environmental engineering[J]. VACUUM, 2018, 55(5): 29 -33 .
[7]	XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[8]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[9]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[10]	CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping. Reflectance spectroscopy study on TBCs prepared by EB-PVD[J]. VACUUM, 2018, 55(5): 46 -50 .

Application of Magnetron Sputtering Deposition Technology for （Cr,Ti,Al）N Coatings

Abstract

Cite this article

share this article

References

Related Articles 15

Metrics

Comments

Recommended 10

[1]	FU Xue-cheng, LIU Min, ZHANG Di, CHENG Xiu-lan, WANG Ying. Exploration and Research on the Technology of High Aspect Ratio Silicon Hole Sputtering Copper Seed Layer [J]. VACUUM, 2024, 61(4): 1-5.
[2]	LI Xiang, JIANG Xiao-jiao, ZHAN Chun-ming, LIU Ang, SUN Ning, LI Jia-ping. Research on Design Method of Liquid Cooled Heater for Vacuum Coating Equipment Based on System Regression Model [J]. VACUUM, 2024, 61(4): 6-11.
[3]	BAI Hao-yu, YAO Chun-long, DONG Ming, QIN Rui, BAI Yong-hao, WANG Yi-nan. Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter [J]. VACUUM, 2024, 61(4): 12-16.
[4]	LI Rui-dong, JIN Da-li, ZHANG Mei-dong, YU Li-ping, WANG Jian-wei. Effect of Different Experimental Conditions on Charge Carrier Mobility of α-Se Films [J]. VACUUM, 2024, 61(4): 17-21.
[5]	SONG Tao, ZHANG Bai-cheng, WANG Chun-lei, JIANG Zheng-he. Design and Research on Vacuum System of Large Series Electron Beam Melting Furnace [J]. VACUUM, 2024, 61(4): 30-34.
[6]	JIANG Yuan-zhen, DENG Jia-liang, HAN Yu-song, WU Yi-feng. Latest Research Progress and Simulation Optimization of Pulse Tube Cryocooler [J]. VACUUM, 2024, 61(4): 35-41.
[7]	LU Zheng-yang, GUAN Cheng-hong, YANG Chen, CHEN Jie, LI Yan-feng, DONG Wen-qing. Development of KDCP-16 Cryopump with Large Pumping Speed and High Capacity [J]. VACUUM, 2024, 61(4): 42-46.
[8]	CHANG Xue-sen, WANG Yi-ting, ZHAO Yue, GE Pan, LU Han-bin, WENG Chen-hao. Analysis and Experimental Study of the Piston Compressor Vibration [J]. VACUUM, 2024, 61(4): 47-51.
[9]	WANG Guo-fang, LIU Jia-lin, SUN Cheng-kai, LIU Hai-jing, ZHANG Jing, DONG De-sheng. Design and Research of a High Precision External Heat Flow Simulation Control System [J]. VACUUM, 2024, 61(4): 65-70.
[10]	GE Li, GAO Chen-jia, QIU Bin, SHEN Ying-xiang, CHEN Bo. Influence of Concentration Uniformity on the Detection Results of Sniffer Probe Accumulation Method [J]. VACUUM, 2024, 61(4): 71-74.
[11]	MAO Xin, FENG Si-qing, LIU Peng, PENG Xue-bing, WU Huan. Test of Outgassing Rates of Threaded Fasteners with Copper Anti-seize Coating [J]. VACUUM, 2024, 61(4): 80-84.
[12]	ZHANG Hai-chao, LIU Jun-jie. Application of Grinding Process in the Post-treatment Stage of Titanium Alloy Castings [J]. VACUUM, 2024, 61(4): 92-95.
[13]	CHEN Cheng, ZHU Ming-liang, LI Ming-yue, HE Zhen-feng, WANG Zhi-guo, HE Chen. Eddy Current Testing Simulation for Surface Defects for Laser Melting Deposition [J]. VACUUM, 2024, 61(4): 96-101.
[14]	ZHANG Pi-xian, ZHANG Yi-chen, ZHAN Chun-ming, JIN Wei-da. Application and Development Trend of Dry Vacuum Pump in the Field of Semiconductor and New Energy [J]. VACUUM, 2024, 61(3): 1-8.
[15]	HAN Feng, ZHANG Zhi-jun, ZHANG Shi-wei, WANG Xiao-wei. Simulation Study of the Effect of Surface Properties on Gas Separation Characteristics for Ratchet-type Knudsen Pumps [J]. VACUUM, 2024, 61(3): 13-19.