亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究*

doi:10.13385/j.cnki.vacuum.2024.01.03

真空 ›› 2024, Vol. 61 ›› Issue (1): 21-26.doi: 10.13385/j.cnki.vacuum.2024.01.03

亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究^*

刘招贤, 孟冬辉, 任国华, 张骁, 韩琰, 刘楚彦, 孙立臣, 闫荣鑫

北京卫星环境工程研究所,北京 100094

收稿日期:2023-04-28 出版日期:2024-01-25 发布日期:2024-01-24
通讯作者: 闫荣鑫,研究员。
作者简介:刘招贤（1990-）,男,河北邢台人,博士,工程师。
基金资助:
* 科工局技术基础科研项目（JSJL2018203B016）

Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes

LIU Zhao-xian, MENG Dong-hui, REN Guo-hua, ZHANG Xiao, HAN Yan, LIU Chu-yan, SUN Li-chen, YAN Rong-xin

Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China

Received:2023-04-28 Online:2024-01-25 Published:2024-01-24

摘要/Abstract

摘要： 标准漏孔是氦质谱检漏仪的校准装置,为了提高氦质谱仪检漏灵敏度,必须降低标准漏孔漏率下限。针对目前传统材料加工制作的标准漏孔难以通过改进加工工艺降低漏率下限的情况,利用CVD法制作了一种亚纳米孔石墨烯复合薄膜新型标准漏孔,研究了其渗氦性能和制备工艺稳定性。结果表明：单层石墨烯/PMMA复合薄膜单位面积漏率为4.17×10^-12~1.09×10^-11 Pa·m³/（cm²·s·Pa）,通过调节新型材料渗透面积,可制作漏率下限达10^-12 Pa·m³/s量级的标准漏孔。

关键词: 石墨烯, 标准漏孔, 极小漏率

Abstract: The standard leak element is the essential calibration device for the helium mass spectrometry leak detector. To improve the sensitivity of the helium mass spectrometry leak detector, the lower leak limit of the standard leak element should be reduced. In view of the problem that it is difficult to reduce the lower leak limit of the standard leak element made of traditional materials by improving the processing technology. A new type of standard leak element based on subnanoporous graphene composite membranes was prepared using CVD method, and the helium permeation performance and preparation process stability were studied. The results show that the leak rate per unit area of single-layer graphene/PMMA composite membranes is 4.17×10^-12~1.09×10^-11 Pa·m³/(cm²·s·Pa), and the leak element with a lower limit leak rate of 10^-12 Pa·m³/s can be made by adjusting the penetration area of the composite membranes.

Key words: graphene, leak element, ultralow leak rate

中图分类号: TB774

刘招贤, 孟冬辉, 任国华, 张骁, 韩琰, 刘楚彦, 孙立臣, 闫荣鑫. 亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究^*[J]. 真空, 2024, 61(1): 21-26.

LIU Zhao-xian, MENG Dong-hui, REN Guo-hua, ZHANG Xiao, HAN Yan, LIU Chu-yan, SUN Li-chen, YAN Rong-xin. Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes[J]. VACUUM, 2024, 61(1): 21-26.

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亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究^*

Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes

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