不同温度下氮化铬薄膜的疏水性能研究*

doi:10.13385/j.cnki.vacuum.2024.01.04

摘要/Abstract

摘要： 利用电弧离子镀膜技术,以硅片、不锈钢、玻璃片为基底,在脉冲偏压分别为50 V、100 V、150 V的条件下制备了三组氮化铬薄膜样品,对其物相、表面形貌、力学性能及不同温度下的疏水性能进行了分析研究。结果表明：所制备薄膜样品组分单一,表面存在些许“大颗粒”,当脉冲偏压为100 V时“大颗粒”数量最多;氮化铬薄膜力学性能优良,150 V脉冲偏压下沉积的薄膜具有较高的硬度和杨氏模量,50 V脉冲偏压样品具有较高的膜基结合力;常温（20 ℃）下薄膜疏水性均较好,基底材料对疏水性能影响不大;各组薄膜疏水性能随环境温度的增加而降低,当环境温度上升至80 ℃时脉冲偏压为50 V的薄膜丧失疏水性能, 脉冲偏压为100 V的薄膜样品疏水性能整体较优。

关键词: 氮化铬薄膜, 温度, 疏水性能, 力学性能

Abstract: Arc ion plating was adopted to prepare three sets of chromium nitride (CrN) thin films with pulsed bias voltages of 50, 100, and 150 V, respectively on silicon, stainless steel and glass substrates. The phase components, surface morphology, mechanical properties and hydrophobicity at different temperatures of the films were analyzed. The results show that the as-prepared samples present a pure component, and there are some macro-particles on the surface of the films. The films fabricated at 100 V show excellent mechanical properties despite there are a lot of macro-particles on the surface. The films fabricated at 150 V have high hardness and excellent Young modulus, while the films fabricated at 50 V have high adhesion strength, indicating that mechanical properties of the CrN thin films are excellent. The films exhibit good hydrophobicity at room temperature (20 ℃), and the substrate material has little effect on the hydrophobicity. The hydrophobicity of the films decreases with increasing environmental temperatures. The films deposited at 50 V lose hydrophobicity when the ambient temperature rises to 80 ℃, and the films deposited at 100 V have the optimized hydrophobicity.

Key words: CrN thin film, temperature, hydrophobic performance, mechanical property

中图分类号: TB79

赵祯赟, 陈定君, 郭圆萌, 杨皓, 东帅, 孙铁生, 黄美东. 不同温度下氮化铬薄膜的疏水性能研究^*[J]. 真空, 2024, 61(1): 27-33.

ZHAO Zhen-yun, CHEN Ding-jun, GUO Yuan-meng, YANG Hao, DONG Shuai, SUN Tie-sheng, HUANG Mei-dong. Hydrophobic Properties of Chromium Nitride Thin Films at Different Temperatures[J]. VACUUM, 2024, 61(1): 27-33.

参考文献 22

[1]	ZHANG M J, GUO C F, HU J .One-step fabrication of flexible superhydrophobic surfaces to enhance water repellency[J]. Surface & Coatings Technology, 2020, 400:126155.
[2]	ZHANG B B, XU W C, XIA D H, et al.Spray coated superamphiphobic surface with hot water repellency and durable corrosion resistance[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2020, 596: 124750.
[3]	LI J, ZHAO Z H, KANG R M, et al.Robust superhydrophobic candle soot and silica composite sponges for efficient oil/water separation in corrosive and hot water[J]. Journal of Sol-Gel Science and Technology, 2017, 82(3): 817-826.
[4]	YI L, HAN J P, CAI M Y, et al.Durable and robust transparent superhydrophobic glass surfaces fabricated by femtosecond laser with exceptional water repellency and thermostability[J]. Journal of Materials Chemistry A, 2018, 6(19): 9049-9056.
[5]	BEATRIZ G, JAVIER S P, ROSER G C.Mussel-inspired hydrophobic coatings for water-repellent textiles and oil removal[J]. ACS Applied Materials & Interfaces, 2014, 6(20): 17616-17625.
[6]	HECKENTHALER T, SADHUJAN S, MORGENSTERN Y, et al.The self-cleaning mechanism: why nanotexture and hydrophobicity matter[J]. Langmuir, 2019, 35: 15526-15534.
[7]	LU Y, SATHASIVAM S, SONG J, et al.Repellent materials. Robust self-cleaning surfaces that function when exposed to either air or oil[J]. Science, 2015, 347(6226): 1132-1135.
[8]	ZANG D M, ZHU R W, ZHANG W, et al.Corrosion- resistant superhydrophobic coatings on Mg alloy surfaces inspired by lotus seedpod[J]. Advanced Functional Materials, 2017, 27(8): 1605446.
[9]	SHI S E, ZHANG Z M, YU L M.Hydrophobic polyaniline/modified SiO2 coatings for anticorrosion protection[J]. Synthetic Metals, 2017, 233: 94-100.
[10]	HU H B, WEN J, BAO L Y, et al.Significant and stable drag reduction with air rings confined by alternated superhydrophobic and hydrophilic strips[J]. Science Advances, 2017, 3(9): 1603288.
[11]	WANG Z C, LIU X J, JI J W, et al.Underwater drag reduction and buoyancy enhancement on biomimetic antiabrasive superhydrophobic coatings[J]. ACS Applied Materials & Interfaces, 2021, 13(40): 48270-48280.
[12]	ZHAO X X, PARK D S, CHOI J, et al.Robust, transparent, superhydrophobic coatings using novel hydrophobic/hydrophilic dual-sized silica particles[J]. Journal of Colloid and Interface Science, 2020, 574: 347-354.
[13]	XU C L, SONG F, WANG X L, et al.Surface modification with hierarchical CuO arrays toward a flexible, durable superhydrophobic and self-cleaning material[J]. Chemical Engineering Journal, 2017, 313: 1328-1334.
[14]	FENG X, FENG L, JIN M, et al.Reversible super-hydrophobicity to super-hydrophilicity transition of aligned ZnO nanorod films[J]. Journal of the American Chemical Society, 2004, 126(1): 62-63.
[15]	HE X M, BAKER N, KEHLER B A, et al.Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films[J]. Journal of Vacuum Science & Technology A, 2000, 18(1): 30-36.
[16]	杨娟. 脉冲偏压电弧离子镀氮化铬涂层的制备技术及性能[D]. 重庆:西南大学, 2009.
[17]	车德良. 多弧离子镀氮化物薄膜的性能及应用[D]. 大连:大连理工大学, 2005.
[18]	王福贞, 周友苏, 唐希源, 等. 多弧离子镀中磁场对电弧运动影响的研究[J]. 真空科学与技术, 1991(3): 191-196.
[19]	WANG X, LIU X H, ZOU S C, et al.Atomic force microscopy study on topography of films produced by ion-based techniques[J]. Journal of Applied Physics, 1996, 80(5): 2658-2664.
[20]	JONAS A M, CAI R, VERMEYEN R, et al.How roughness controls the water repellency of woven fabrics[J]. Materials & Design, 2019, 187: 108389.
[21]	ZDZIENNICKA A, KRAWCZYK J, SZYMCZYK K, et al.Components and parameters of liquids and some polymers surface tension at different temperature[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2017, 529: 864-875.
[22]	宋嘉文. 高温高压环境下水在固体表面接触角的温度和压力依赖性研究[D]. 杭州:浙江大学, 2022.

相关文章 15

[1]	刘海静, 董德胜, 王晓占, 李灿伦, 冯蕾, 季琨, 靳兆峰. 高真空冷黑环境下大面阵黑体定标器控温应用研究[J]. 真空, 2024, 61(1): 74-77.
[2]	卢少波, 韩永超, 宋艳鹏, 张吉峰. 用于核电元件制造的深井式真空钎焊设备设计[J]. 真空, 2023, 60(3): 72-75.
[3]	苏菲, 王魁汉, 夏春明, 赵晓东. AMS2750F标准的解读与温度传感器的开发[J]. 真空, 2023, 60(2): 78-85.
[4]	刘兴龙, 沈佩, 王光文, 岳向吉, 蔺增. 真空电弧源冷却结构对温度场的影响研究^*[J]. 真空, 2022, 59(6): 29-33.
[5]	翟艳坤, 白雪卫, 张凤宇, 徐铭泽, 苑仁月, 陈俊寅, 黄海波. 高能束熔覆涂层质量缺陷形成机理及控制方法研究现状^*[J]. 真空, 2022, 59(6): 78-86.
[6]	刘洋, 张雅楠, 高晟元, 赵祯赟, 郑明昊, 黄美东. 多弧离子镀Zr/ZrN多层膜的力学性能研究^*[J]. 真空, 2022, 59(5): 28-31.
[7]	刘海静, 李灿伦, 路同山, 孙成恺, 李卓慧, 祁松松, 刘家林. 大口径超长U型气体池研制与分析[J]. 真空, 2021, 58(6): 55-58.
[8]	解永强, 靳丽岩, 杨晓东, 王成君, 夏丹, 苏春. 基于半导体器件钎焊技术的温度场研究[J]. 真空, 2021, 58(4): 58-62.
[9]	吕乾乾, 孙振川, 周建军, 杨振兴, 陈瑞祥, 游慧杰. 低真空管道系统性能室内实验研究^*[J]. 真空, 2021, 58(3): 7-12.
[10]	余清洲, 张俊, 李斌, 高明燚, 刘明昆, 柴晓彤, 干蜀毅. 空调散热器真空除油干燥箱温度场优化[J]. 真空, 2021, 58(1): 82-85.
[11]	张世伟, 孙坤, 韩峰. 螺杆真空泵设计的常见问题分析[J]. 真空, 2021, 58(1): 23-28.
[12]	胡纯栋, 郎嘉琪, 谢远来, 王铭翔, 张照元, NBI团队. 中性束注入器低温真空空间气体温度分布模拟研究^*[J]. 真空, 2020, 57(5): 75-78.
[13]	向玉春. 衬底温度对脉冲激光沉积法制备的CuO薄膜性能的影响[J]. 真空, 2020, 57(5): 24-27.
[14]	赵兴旺, 刘艳梅, 付和国, 史吉鹏, 关峰. TC4薄壁钛合金激光对接接头组织及力学性能研究^*[J]. 真空, 2020, 57(4): 89-94.
[15]	高超, 张吉峰, 唐榕. 应用于石墨烯制备的CVD反应炉研制[J]. 真空, 2020, 57(3): 30-33.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed