温度对石墨烯真空标准漏孔漏率的影响研究*

doi:10.13385/j.cnki.vacuum.2024.02.06

真空 ›› 2024, Vol. 61 ›› Issue (2): 37-41.doi: 10.13385/j.cnki.vacuum.2024.02.06

温度对石墨烯真空标准漏孔漏率的影响研究^*

刘楚彦, 刘招贤, 任国华, 韩琰, 孙立臣, 闫荣鑫, 孟冬辉

北京卫星环境工程研究所,北京 100094

收稿日期:2023-08-14 出版日期:2024-03-25 发布日期:2024-03-28
通讯作者: 孟冬辉,研究员。
作者简介:刘楚彦（1999-）,男,北京人,硕士生。
基金资助:
^*国家自然科学基金航天先进制造联合基金（U1537109）; 国防科工局技术基础计量课题（JSJL2018203B016）

Effect of Temperature on the Leakage Rate of Graphene Vacuum Standard Leak

LIU Chu-yan, LIU Zhao-xian, REN Guo-hua, HAN Yan, SUN Li-chen, YAN Rong-xin, MENG Dong-hui

Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China

Received:2023-08-14 Online:2024-03-25 Published:2024-03-28

摘要/Abstract

摘要： 石墨烯真空标准漏孔是基于石墨烯衍生材料研制的新型真空标准漏孔,其漏率下限低于一般的石英渗氦型标准漏孔,可用于超灵敏度检漏系统的校准。基于石墨烯的材料特性,石墨烯真空标准漏孔的漏率会随温度变化。本文针对温度对石墨烯真空标准漏孔漏率的影响进行了研究,通过测量漏孔在不同温度环境下的漏率,得到该种漏孔的温度系数与变化规律。研究结果表明,石墨烯真空标准漏孔的漏率随温度呈线性变化,且温度系数低于2.5%/℃。

关键词: 石墨烯, 标准漏孔, 超灵敏度检漏, 温度系数

Abstract: Graphene vacuum standard leak is a kind of new vacuum standard leak based on graphene-derived materials, and the lower limit of leakage rate is lower than the general helium permeation leak rate, which can be used in the calibration of ultra-sensitive leak detection system. Based on the material characteristics of graphene, the leakage rate of graphene vacuum standard leak will change with temperature. In this paper, the influence of temperature on the leakage rate of graphene vacuum standard leak was studied. By measuring the leakage rate of the standard leak in different temperature environments, the temperature coefficient and the change rule of the leakage were obtained. The results show that the leakage rate of graphene vacuum standard leak changes linearly with temperature, and the temperature coefficient is lower than 2.5%/℃.

Key words: graphene, standard leak, ultra-sensitive leak detection, temperature coefficient

中图分类号: TB77

刘楚彦, 刘招贤, 任国华, 韩琰, 孙立臣, 闫荣鑫, 孟冬辉. 温度对石墨烯真空标准漏孔漏率的影响研究^*[J]. 真空, 2024, 61(2): 37-41.

LIU Chu-yan, LIU Zhao-xian, REN Guo-hua, HAN Yan, SUN Li-chen, YAN Rong-xin, MENG Dong-hui. Effect of Temperature on the Leakage Rate of Graphene Vacuum Standard Leak[J]. VACUUM, 2024, 61(2): 37-41.

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温度对石墨烯真空标准漏孔漏率的影响研究^*

Effect of Temperature on the Leakage Rate of Graphene Vacuum Standard Leak

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