碳纳米管与氧化锌纳米棒的场发射低压传感特性研究*

doi:10.13385/j.cnki.vacuum.2024.05.10

真空 ›› 2024, Vol. 61 ›› Issue (5): 74-79.doi: 10.13385/j.cnki.vacuum.2024.05.10

碳纳米管与氧化锌纳米棒的场发射低压传感特性研究^*

彭文广, 涂友情, 陈贵滔, 钱维金, 董长昆

温州大学温州市微纳光电器件重点实验室,浙江温州 325035

收稿日期:2024-05-06 出版日期:2024-09-25 发布日期:2024-10-10
通讯作者: 董长昆,教授。
作者简介:彭文广（1998-）,男,湖南省衡阳市人,硕士。
基金资助:
*国家自然科学基金（62374118）

Comparative Study of Low Pressure Sensing Performance for Carbon Nanotube and Zinc Oxide Nanorod Field Emitters

PENG Wen-guang, TU You-qing, CHEN Gui-tao, QIAN Wei-jin, DONG Chang-kun

Wenzhou Key Laboratory of Micro-nano Optoelectronic Devices, Wenzhou University, Wenzhou 325035, China

Received:2024-05-06 Online:2024-09-25 Published:2024-10-10

摘要/Abstract

摘要： 开发了一种基于气体吸附的场发射低压气体传感技术,通过化学气相沉积（CVD）直接在镍合金基底上制备了碳纳米管（CNT）阴极,应用水热法制备了ZnO纳米棒阴极和Al-N共掺杂ZnO纳米棒阴极（结合CVD法制备）,然后对比研究了CNT与ZnO的场发射与低压氮气传感性能。结果表明：CNT阴极具有较好的场发射性能,开启场强为1.99 V/μm,而ZnO纳米棒的开启场强达到了14.9 V/μm;通过Al-N掺杂,ZnO纳米棒的场发射性能显著改善,开启场强降至8.9 V/μm;在10^-4~10^-7 Pa区间内,CNT阴极的低压N₂传感效应最好,10^-4 Pa下5 min内传感电流增幅达到350％;ZnO纳米棒几乎没有传感效应,而Al-N掺杂ZnO纳米棒展示了良好的传感特性,表明掺杂增加了活性位点,有效改善了ZnO材料的场发射低压气体传感性能。

关键词: 场发射, 碳纳米管, 氧化锌, 低压, N₂传感

Abstract: A field emission low pressure gas sensing technique based on gas adsorption effects was developed. In this work, CNTs were grown directly on Ni alloy substrates by thermal chemical vapor deposition (CVD) method, ZnO nanorodes were prepared by the hydrothermal method, and the Al-N co-doped ZnO nanorodes were further synthesized by CVD. Then the field emission and low pressure N₂ sensing performances were investigated for CNT and ZnO nanorode field emitters. The results show that CNT emitters present good field emission performance with the turn-on field of 1.99 V/μm, while ZnO emitters show higher turn-on field of 14.9 V/μm. With the doping of Al-N elements, the field emission performance is improved significantly with the turn-on field of 8.9 V/μm. In the pressure range of 10^-4-10^-7 Pa, the CNT cathodes demonstrate best sensing behavior, and the sensing current rises up to 350％ within 5 min test under N₂ pressure of 10^-4 Pa. The pristine ZnO emitters show almost no sensing effect, but Al-N co-doped ZnO emitters display decent sensing behavior, indicating that Al-N doping effectively improves the gas sensing performance resulting from the addition of active sites on the ZnO emitter.

Key words: field emission, carbon nanotube, zinc oxide, low pressure, N₂ sensing

中图分类号: TP212;TB772;TB383

彭文广, 涂友情, 陈贵滔, 钱维金, 董长昆. 碳纳米管与氧化锌纳米棒的场发射低压传感特性研究^*[J]. 真空, 2024, 61(5): 74-79.

PENG Wen-guang, TU You-qing, CHEN Gui-tao, QIAN Wei-jin, DONG Chang-kun. Comparative Study of Low Pressure Sensing Performance for Carbon Nanotube and Zinc Oxide Nanorod Field Emitters[J]. VACUUM, 2024, 61(5): 74-79.

参考文献

[1] SU J, GUO D Z, XING Y J, et al.Improved field emission properties of MgO-nanoparticle-doped carbon nanotube films and their application in miniature vacuum gauges[J]. Physica Status Solidi(a),2013,210(2):349-355.
[2] MEYYAPPAN M.Carbon nanotube-based chemical sensors[J]. Small, 2016, 12(16): 2118-2129.
[3] SEIYAMA T, FUJIISHI K, NAGATANI M, et al.A new detector for gaseous components using zinc oxide thin films[J]. Journal of the Society of Chemical Industry Japan, 1963, 66(5): 652-655.
[4] HOSSEINI Z S, MORTEZAALI A.Room temperature H₂S gas sensor based on rather aligned ZnO nanorods with flower-like structures[J]. Sensors and Actuators B: Chemical, 2015, 207: 865-871.
[5] 王杰, 康颂, 董长昆.微型碳纳米管低压传感器工作性能研究[J].真空, 2021, 58(1): 1-5.
[6] 康颂, 董长昆, 张纯. 基于多壁碳纳米管场发射与吸附原理的压力传感技术研究[J]. 真空与低温, 2019, 25(4): 237-242.
[7] 董长昆, 康颂, 何剑峰, 等. 基于碳纳米管场发射的新型压力传感技术[C]//中国电子学会真空电子学分会,微波电真空器件国家级重点实验室.中国电子学会真空电子学分会第二十一届学术年会论文集.温州大学微纳结构与光电器件研究所, 2018: 846.
[8] NILSSON L, GROENING O, EMMENEGGER C, et al.Scanning field emission from patterned carbon nanotube films[J]. Applied Physics Letters, 2000, 76(15): 2071-2073.
[9] LEE J, JUNG Y, SONG J, et al.High-performance field emission from a carbon nanotube carpet[J]. Carbon, 2012, 50(10): 3889-3896.
[10] DRESSELHAUS M S, DRESSELHAUS G, JORIO A.Raman spectroscopy of carbon nanotubes in 1997 and 2007[J]. The Journal of Physical Chemistry C, 2007, 111(48): 17887-17893.
[11] DRESSELHAUS M S, JORIO A, HOFMANN M, et al.Perspectives on carbon nanotubes and graphene Raman spectroscopy[J]. Nano Letters, 2010, 10(3): 751-758.
[12] SAITO R, HOFMANN M, DRESSELHAUS G, et al.Raman spectroscopy of graphene and carbon nanotubes[J]. Advances in Physics, 2011, 60(3): 413-550.
[13] KAYASTHA V K, ULMEN B, YAP Y K.Effect of graphitic order on field emission stability of carbon nanotubes[J]. Nanotechnology, 2007, 18(3): 035206.
[14] ELETSKII A V, BOCHAROV G S.Emission properties of carbon nanotubes and cathodes on their basis[J]. Plasma Sources Science and Technology, 2009, 18(3): 034013.
[15] 康颂. 基于场发射原理的碳纳米管真空系统压力传感技术研究[D]. 温州: 温州大学, 2019.
[16] DONG C K, LUO H J, CAI J Q, et al.Hydrogen sensing characteristics from carbon nanotube field emissions[J]. Nanoscale, 2016,8(10): 5599-5604.
[17] GONZÁLEZ-BERRÍOS A, PIAZZA F, MORELL G. Numerical study of the electrostatic field gradients present in various planar emitter field emission configurations relevant to experimental research[J]. Journal of Vacuum Science & Technology B, 2005, 23(2): 645-648.
[18] DEAN K A, CHALAMALA B R.The environmental stability of field emission from single-walled carbon nanotubes[J]. Applied Physics Letters, 1999, 75(19): 3017-3019.
[19] SEMET V, BINH V T, VINCENT P, et al.Field electron emission from individual carbon nanotubes of a vertically aligned array[J]. Applied Physics Letters, 2002, 81(2): 343-345.
[20] PURCELL S T, VINCENT P, JOURNET C, et al.Hot nanotubes: stable heating of individual multiwall carbon nanotubes to 2000 K induced by the field-emission current[J]. Physical Review Letters, 2002, 88(10): 105502.

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碳纳米管与氧化锌纳米棒的场发射低压传感特性研究^*

Comparative Study of Low Pressure Sensing Performance for Carbon Nanotube and Zinc Oxide Nanorod Field Emitters

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