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VACUUM ›› 2021, Vol. 58 ›› Issue (6): 33-37.doi: 10.13385/j.cnki.vacuum.2021.06.06

• Thin Film • Previous Articles     Next Articles

Study on Magnetron Sputtering Film Process on Inner Wall of Cylinder with Different Matrix Materials

HE Ping1, ZHANG Xu1, YANG yang1   

  1. The Institute of Physical and Chemical Engineering of Nuclear Industry, Tianjin 300180, China
  • Received:2020-11-26 Online:2021-11-25 Published:2021-11-30

Abstract: The barrel is made of composite materials and metal flexible components. The cylinder can not directly contact with the working medium, and thus a protective film needs to be deposited onto the inner wall. In this paper, through the screening of different material pretreatment processes of the cylinder, the magnetron sputtering process is used for process research and trial production. Finally, the integrated coating process route is determined and the corresponding process parameters are developed. The process parameters were used to realize one-time coating on the inner wall of the cylinder successfully. The as-prepared film is complete and has a certain binding force and film thickness.

Key words: composite materials, magnetron sputtering, coat process, binding force

CLC Number: 

  • O484.5
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