VACUUM ›› 2025, Vol. 62 ›› Issue (5): 53-57.doi: 10.13385/j.cnki.vacuum.2025.05.08
• Thin Film • Previous Articles Next Articles
ZHAO Ying1,2, LIU Yuandong3, LIN Bing2, ZHANG Hailong2
CLC Number: TB34
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