VACUUM ›› 2025, Vol. 62 ›› Issue (5): 44-52.doi: 10.13385/j.cnki.vacuum.2025.05.07
• Thin Film • Previous Articles Next Articles
NI Jun1,2, GUO Teng1,2, LI Canlun1,2, HE Hengyang3, LI Rongyi3
CLC Number: TB43
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