调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响*

doi:10.13385/j.cnki.vacuum.2022.03.07

真空 ›› 2022, Vol. 59 ›› Issue (3): 29-34.doi: 10.13385/j.cnki.vacuum.2022.03.07

调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响^*

谌曲平¹, 林松盛², 刘灵云², 郭朝乾², 石倩², 汪云程¹, 吕亮¹, 刘若愚¹, 易出山¹

1.中国航发南方工业有限公司,湖南株洲 412000;
2.广东省科学院新材料研究所,现代材料表面工程技术国家工程实验室,广东省现代表面工程技术重点实验室,广东广州 510650

收稿日期:2021-11-11 出版日期:2022-05-25 发布日期:2022-06-01
通讯作者: 林松盛,教授级高工。
作者简介:谌曲平（1973-）,男,湖南省岳阳市人,高级工程师。
基金资助:
*广东省特支计划团队项目（2019BT02C629）; 广州市产学研协同创新重大专项“燃气轮机关键零部件表面处理及维修”; 广东省科学院科技计划项目（2021GDASYL-202110302005）

Effect of Modulation Structure on Properties of Cr-CrN-Cr-CrAlN Multilayer Films

CHEN Qu-ping¹, LIN Song-sheng², LIU Ling-yun², GUO Chao-qian², SHI Qian², WANG Yun-cheng¹, LÜ Liang¹, LIU Ruo-yu¹, YI Chu-shan¹

1. Aecc South Industry Company Limited, Zhuzhou, 412000, China;
2. Institute of New Materials, Guangdong Academy of Sciences, National Engineering Laboratory of Modern Materials Surface Engineering Technology, Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology, Guangzhou 510651, China

Received:2021-11-11 Online:2022-05-25 Published:2022-06-01

摘要/Abstract

摘要： 为提高钛合金的服役性能,采用真空阴极电弧离子镀技术,在TC4钛合金上制备不同R_Cr-CrN:R_Cr-CrAlN调制比的多层膜。使用扫描电镜（SEM）、X射线衍射仪（XRD）、显微硬度计、划痕仪、应力测试仪和砂粒冲蚀试验仪检测并分析了多层膜的截面形貌、结构、厚度、硬度、结合力、残余应力和抗砂粒冲蚀性能等。重点研究了R_Cr-CrN:R_Cr-CrAlN调制比对多层膜性能的影响。结果表明：所制备的多层膜厚度均在7~8μm,过渡层约1.5μm厚,单一周期厚度在150~200nm;膜层均呈现（200）择优生长面心立方结构;随着Cr-CrAlN层占比的增加,膜层的硬度、残余应力和膜基结合力均相应地上升;在90°攻角下不同调制比的多层膜未完全破损前,其抗砂粒冲蚀能力是TC4基材的3倍以上,而在30°攻角下多层膜的抗砂粒冲蚀能力则约为TC4基材的8倍;R_Cr-CrN:R_Cr-CrAlN调制比为1∶2时所制备的多层膜具有最佳的综合性能。

关键词: 调制比, 多层膜, 抗砂粒冲蚀性能, 电弧离子镀, 钛合金

Abstract: In order to improve the service performance of titanium alloy, multilayer films with different R_Cr-CrN:R_Cr-CrAlN modulation ratio were prepared on TC4 titanium alloy by vacuum cathodic arc ion plating. Scanning electron microscope(SEM), X-ray diffraction (XRD), microhardness tester, scratch tester, stress tester and sand erosion tester were used to detect and analyze the cross-section morphology, structure, thickness, hardness, adhesion, residual stress and sand erosion resistance of the multilayer films. The results show that the thickness of multilayer films is 7-8μm, the transition layer is about 1.5 μm, and the thickness of single cycle is 150-200nm. All the multilayer films exhibit (200) preferred growth face centered cubic structure. With the increase of the proportion of Cr-CrAlN layer, the hardness, residual stress and adhesion of the film increase accordingly. The sand erosion resistance of multilayer films with different modulation ratios at 90° angle of attack is more than 3 times that of TC4 substrate before they are completely damaged, and at 30° angle of attack, the sand erosion resistance of multilayer films is about 8 times that of TC4 substrate. When the modulation ratio of R_Cr-CrN:R_Cr-CrAlN is 1∶2, the multilayer films have the best comprehensive properties.

Key words: modulation ratio, multilayer film, sand erosion resistance, arc ion plating, titanium alloy

中图分类号:

TG174

谌曲平, 林松盛, 刘灵云, 郭朝乾, 石倩, 汪云程, 吕亮, 刘若愚, 易出山. 调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响^*[J]. 真空, 2022, 59(3): 29-34.

CHEN Qu-ping, LIN Song-sheng, LIU Ling-yun, GUO Chao-qian, SHI Qian, WANG Yun-cheng, LÜ Liang, LIU Ruo-yu, YI Chu-shan. Effect of Modulation Structure on Properties of Cr-CrN-Cr-CrAlN Multilayer Films[J]. VACUUM, 2022, 59(3): 29-34.

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调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响^*

Effect of Modulation Structure on Properties of Cr-CrN-Cr-CrAlN Multilayer Films

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