The anode layer ion source, with simple structure, high beam density and controllable ion energy, can be applied for surface modification especially in large area. It can be also applied for applications of ion beam assisted deposition, thin film etching and surface cleaning. This paper reviews the history and development of anode layer ion source. It introduces the principles of anode layer ion source and research status, discusses its key designs, including the design requirements of magnetic field, electromagnetic field and gas discharge simulation. Finally, it summarizes the applications and future developments of anode layer ion source.

Spacce traveling-wave tube (STWT) are used in a wide variety of areas, such as radar, space technology and electron accelerators. The vacuum is one of the basic conditions for the work of STWT. We use ultra -high vacuum exhaust station to obtain a microwave device with the ultimate vacuum better than 5 伊 10 -9Pa; The residual gases in a macro-wave device during thermal degassing was in-situ monitored with quadrupole mass spectrometer ( QMS ). The major residual gases, including but not limited to H2O, CO, and H2, was investigated. It is shown that 36 hours was economically for the baking exhaust time. The operating principle and method of vacuum leak detection using QMS are introduced, and the leak detection was conducted for macro-wave device experimentally. Satisfactory results were obtained and showed that QMS has so predominant advantage that no leak detector can get over. A test platform for measuring the vacuum of the microwave device has been established. After the STWT sealing off the exhaust equipment, sophisticated, storage and high and low temperature test process of vacuum was tested. When the STWT is sophisticated, the vacuum in the device is reduced by an order of magnitude. After 140h, the vacuum of the device rises to 5.0 伊 10-8 Pa under the ion pump. At this time, the vacuum remained basically unchanged after removing the ion pump. Finally, high and low temperature impact experiments were performed and stored at room temperature for 6 months, the vacuum of the STWT is kept in good. These results provide a good basis for analyzing the quality of the STWT.

With the development of carbon composite materials, the temperature of graphitization is getting higher and higher, while the external dimensions of the workpiece are getting bigger and larger. The requirements for the high temperature graphitization furnace are thus put forward. In this paper, the power calculation of large size graphitization furnace with a resistance heating cylindrical heat preservation structure is introduced including the technological characteristics, structure type and the selection of calculation parameters.

In recent years, additive/subtractive hybrid manufacturing (A/SHM) has become one of the main methods of intelligent manufacturing. It relies on additive manufacturing to realize material layer forming, using material reduction technology to improve surface quality and improve stress state. This technology takes into account the high precision of rapid prototyping and reduces material manufacturing for additive manufacturing. This paper first expounds the general situation of additive manufacturing technology and the overview of A/SHM. Then, the research on the surface residual stress and roughness of the materials in the process of A/SHM at home and abroad will be explained. Then the paper explains the research on theA/SHM of the equipment at home and abroad and the research on the surface quality of A/SHM. Finally, this paper summarizes and forecasts the main problems and future development trends of the A/SHM.

Field emission electron sources have been found potential applications in X-ray tube, negative hydrogen ion source, display devices and other fields because of its several merits. In this paper, several applications of field electron emission are introduced firstly. Different field emission electron sources and their characteristics are compared and analyzed. Finally, the feasibility of using diamond like carbon film as cathode materials for field electron emission is analyzed on the basis of our experimental research. From the analysis i) it can be known that Spindt is difficult to fabricate and easy to be damaged; ii) carbon nanotube is the hottest issue in the current research because of its unique structure; iii) diamond like carbon film is easy to be synthesized and the composition can be adjusted. The advantages of both diamond and graphite in diamond like carbon film help it be the potential ideal field electron emission cathode material.

Arc ion plating is one of the most commonly used technique in vacuum film depsition technology, a long -term development in the fields of scientific research and industrial production have been obtained in present. However, the effects of some process parameters including arc current, deposition pressure, deposition temperature, etc. on film structure and properties were often scattered in different literatures during film deposition, being not conducive to the deep understanding of these parameters. This present paper reviews the role of the process parameters including arc current, deposition pressure, target - substrate distance, substrate bias, deposition temperature and external magnetic field, etc. It can be deeply recognized for the roles of these parameters on film structure and properties, through the summary of these process parameters during film deposition, which promotes the process development and progress of vacuum film deposition technology.

To meet the needs of high-frequency, miniaturized vacuum microwave devices, to find suitable cathode materials and laser systems, the photocathode for microwave vacuum electronic devices were studied. The photocathode with diffusion barrier was prepared, by heating the layer of emissive material storage chamber to provides a controlled photoemissive layer for replacing the evaporation loss of the active material, thereby extending the life of the cathode and recovering from poisoning and exposure to the atmosphere. The Cs3Sb photocathode was prepared in an ultra-high vacuum system. The quantum efficiency is about 0.145% at the wavelength of 532 nm, when the photoelectric is illuminated by the continuous laser with an energy of 0.37 W, a current density of 29.2 mA/cm² of the photoemission can be obtained. If the photocathode is damaged by the high-intensity laser, it can be reheated and activated. The photoelectric emission can be restored to a certain degree and stabilized for a long time. This photocathode has the characteristics of reproducible activation and is expected to be ideal electronic source for microwave vacuum electronic devices.

The cleaning sources with argon ions using vacuum arc discharge technology are new methods to improve the adhesive strength between top layer and substrate, where electrons coming from arc discharge plasma by hollow cathode gun, heater filament gun and vacuum cathode arc sources produce argon ions and then the argon ions were used to clean the samples before coating process. With the help of this technology, bias currents on substrate holder can reach between 10A and 30A under the condition of bias voltages of only 200V. This new clean method has great advantage, since it brings the high ion density. The article also gives a brief introduction on the vacuum arc deposition systems and magnetron sputtering system with this advanced Ar ⁺ cleaning sources.

The material of photocathode determines the important properties of photoemission, such as quantum efficiency, dark emission current and energy distribution of emitted electrons. Various types of photocathode emission materials, including alkali metal and semiconductor materials, are introduced in this paper. Among them, the multi-alkali photocathode and negative electron affinity (NEA) photocathode in semiconductor materials are mainly introduced, and the preparation process and performance test of the multi-alkali photocathode and the factors affecting the quantum efficiency of NEA photocathode are analyzed in detail.

As the third generation of rare earth permanent magnet material, NdFeB occupies a pivotal position in the magnetic materials field. NdFeB is widely used in fields such as national defense, aerospace, information communications, automobiles, energy, energy conservation, environmental protection and medical equipment. However, the low resistance of NdFeB to corrosion limits its application to further expand. The phase composition, corrosion process and corrosion products of NdFeB are reviewed in this study. The corrosion characteristics of NdFeB such as high temperature oxidation, wet heat hydrogen absorption and electrochemical corrosion were described. The corrosion protection technology of NdFeB is discussed from the aspects of corrosion resistance improving and surface coating protection, focusing on the basic principles, research progress and development direction of electroplating, electroless plating, organic coating and physical vapor deposition. The research of NdFeB corrosion protection technology is the key to promote the application of NdFeB permanent magnets.

In this article, the selection of thin film materials, failure mechanism, mechanical properties test method and fatigue failure are reviewed. The influence of tensile bending on the microstructure of the film and the initiation, electrical properties, expansion and saturation of microcracks were analyzed. The effects of film material, grain size and film thickness on the fatigue life of thin film were summarized. On membrane surface, along the thickness direction and control of fatigue crack was discussed. It is shown that the future studies on mathematical modeling and film fatigue experiment need to be combined together for better results.

Atomic layer deposition(ALD) technology is a thin film growth technology based on self-limiting interfacial reaction. The atomic layer technology can prepare thin films with dense structure, high conformal, low defect density, excellent performance and great uniformity. Alumina is the most common thin film deposited by atomic layer deposition（ALD-Al₂O₃）. Al₂O₃ film has high transparency, high band gap width, high dielectric constant, and high barrier properties as well as good chemical and thermal stability. As a passivation layer, gas permeation barrier layer and grid dielectric layer, alumina is widely used in solar cell passivation layer, OLED packaging, organic solar cell dielectric layer, printed electronics and microelectronic device encapsulation. This article reviews the principle, online diagnosis and application development status of ALD-Al₂O₃, including the growth mechanism, monomer selection, deposition method, and in-situ diagnosis of alumina film. The application and the future development trend of ALD-Al₂O₃ film are predicted.

This paper studies the filling algorithm of planar contour based on direction-parallel filling path, and solves the problem that the traditional filling algorithm of direction-parallel contour is only suitable for filling polygon contour with relatively simple shape, but it is easy to fail in dealing with polygon contour composed of a large number of short lines. The algorithm first generates the scan lines of the plane contour, then generates all monotone chains of the plane contour polygon, and then establishes the undirected graph of the parallel filling trajectory based on the generated scan lines and monotone chain set. In the undirected graph, the edge types of undirected graph are divided into three types of segment edge, horizontal edge and vertical edge. Finally, the direction-parallel filling trajectory joining algorithm based on undirected graph is studied, and the effectiveness of the algorithm is verified by computing examples.

Due to the lack of uniform specifications, how to use alcohol to efficiently and quickly determine the leak point has always been a key concern for vacuum coating companies. In this paper, the effectiveness of the alcohol spray leak detection in vacuum coating equipment is studied, and the cesium mass spectrometer leak detection is used for verification and calibration. The three main influencing factors including air pressure working range, pumping rate and leak point structure are systematically studied. The following conclusions, the alcohol-based leak detection and helium mass spectrometry leak detection of vacuum coating equipment were studied. It was mainly found that, in the 1.0×10^-1Pa~9.9×10^-1Pa pressure range due to the large size of the leak point, after the alcohol is sprayed, the air pressure rises directly and then falls. However, in the air pressure range of 5.0×10^-3Pa~9.9×10^-2Pa, the air pressure trend of alcohol leakage detection is firstly decreased, then increased and then decreased. When the air pressure is lower than 5.0×10^-3Pa, the alcohol leak detection cannot detect the leak point. At different pump speeds, compared with the operation of two molecular pumps, the alcohol and helium mass spectrometer leak detectors have a long waiting time and are prone to miss detection when a molecular pump is working for leak detection. In the case of alcohol leak detection, the complex leaky point pressure reaction takes longer than the simple structure leak point. The above research results provide effective guidance for vacuum production and application units using alcohol efficient and easy leak detection.

After entering the nano era, the properties of nano-materials and nano-devices are not only determined by the properties of bulk materials, but also by the properties of material′s surface and interface. In order to avoid ucontrollable changes and damages caused by surface contaminations, the thin film materials and nano-scale devices must be processed in ultra-high vacuum environment. This paper introduces the necessity, functions and applications of Nano-X.

Computational fluid dynamics and theoretical fluid dynamics, experimental fluid dynamics together constitute the fluid mechanics research field. With the development of computer science and technology, and the progress of mathematical theory and numerical method, computational fluid dynamics (CFD) is gaining more and more attention by researchers and engineering technicians. The prediction accuracy of CFD theoretical model is widely recognized, and CFD has become a research tool for complex flow and heat transfer problems, and an important design tool used in engineering fields and teaching tool of thermal fluid mechanics. CFD method has applied in vacuum engineering as a research tool to investigate the working mechanism of vacuum equipment. Numerical study of inner flow behavior in a steam-jet vacuum pump was carried out, the simulation results was analyzed to reveal the effect on the pumping performance by CFD approach, which can be used to optimize the structure and improve performance of the steam-jet pump.

Vacuum packaging is a technology with wide applicability and large market demand. This article introduces the purpose and significance of vacuum packaging, explains the principles and selection methods of several types of vacuum packaging equipment, summarizes the application of vacuum packaging machine, and discusses its development trend.

The vacuum leak detection is an important technology to obtain high vacuum in the drift tube linear accelerator (DTL). The quadrupole mass spectrometer is an important tool for analyzing the components of the residual gas in the vacuum system, and can also be used as a means of leak detection. In this paper, the DTL1^# cavity was detected by two means of helium mass spectrometer leak detector and quadrupole mass spectrometer. When the coil of the 12^# drift tube was applied current, the pressure, leakage rate and residual gas composition of the cavity were all changed, and the spectral peak of water increased most significantly. So there's something wrong with 12^# drift tube. The cavity quickly obtained the high vacuum of 10^-6 Pa by proper treatment, which met the requirements of the linear accelerator for vacuum system.

The activity of titanium increases rapidly by the elevation of temperature, and it tends to react with various material intensively at high temperature. Currently, the predominate melting technique of high quality titanium alloys is the 3 times vacuum consumable melting protected by vacuum or inert gas. The temperature of titanium alloy liquid is above 1750 ℃, thus the use of cooling water is necessary to protect the important devices such as copper crucible, electrode rod and furnace body. Under improper handling or equipment fault conditions, the cooling water may flow into the crucible and react with the hot titanium alloy liquid. In practical mass production, severe explosion may occur, which will lead to casualty and property losses. The current work is based on mass production and equipment management experience. Potential risks of the design of vacuum consumable melting device is identified, and precautions are systematically analyzed in this paper.

The cleaning method of steel tube in the pretreatment of coating was studied. The steel tube was cleaned by multiple ultrasonic cleaning modes, then dried naturally, cured at high temperature, and the pretreatment quality of the steel tube coating was analyzed. The test results show that the stainless steel pipe after precision polishing adopts the solvent ultrasonic cleaning + tap water ultrasonic cleaning + deionized water ultrasonic cleaning + deionized water washing + drying process is feasible and can meet the requirements of the subsequent coating process for future realization. The production automation process operation improves the test basis.

Ion getter pumps (IGPs) are particularly appropriate for use in modern accelerator facilities because of their high reliability, cleanliness and the absence of vibration that could disturb the trajectory of the beam. Normally, T-pieces are used to connect the pumps to the beam tube. These reduce the effective pumping speed and require the use of radiofrequency (RF) shielding which is complicated and expensive. Moreover, very often the accelerated particles are sensitive to stray magnetic fields and the impedance of the surrounding vacuum tube. Magnetic fields generated by the ion pump magnets, which are asymmetrically oriented to the beam tube, can be a major drawback. To overcome these problems, we have developed, in collaboration with the Deutsche Elektronen -Synchrotron (DESY), an innovative in -line ion getter pump which can be mounted directly into a beam line without a T -piece and which has a symmetrical arrangement of the magnets around the beam tube. Additionally, RF shielding can be easily integrated inside the in-line pump. Using this innovative in-line concept (Patent EP2 431996A1) ion pumps will become an integral part of the beam tube for the first time when installed on the X -FEL system at DESY. The arrangement of the magnets and the geometry of the pole piece, used to guide the magnetic field lines, were designed to minimize any disturbance on the beam trajectory. Moreover, the element location inside the pump has been optimized to“selfshield”the beam, without requiring the addition of expensive and complex optical shields. Finally, thanks to the in-line solution, a simple RF shield (a copper coated tube with pumping slits) can now be easily installed directly inside the pump at the accelerator site installed directly inside the pump at the accelerator site.

Electron Impact(EI) ion source is a core component for the miniaturized magnetic mass spectrometer, and its performance has a great impact on the mass resolution and sensitivity of the instrument. In this study, the structure of ion repeller electrode was optimized and the voltage driving method was improved to enhance the overall performance of the EI source. Three-dimensional model of the miniaturized EI source was constructed using the ion simulation software simion-8.0, and the simulation was focused on investigating the influence of geometric parameters, ion repeller shape and the electric parameters on the ion focusing performance and ion transfer efficiency. By simulating the trajectory of ions, the ion motion parameters were obtained. At the same time, the ion focusing effect and ion transfer efficiency of the EI source were analyzed using the phase space method. The theoretical simulation results show that the ion's position focusing radius was less than 0.08 mm and ion transfer efficiency of over 99% were achieved when S₁=1.2mm, S₂/S₁=1.6, S₃=2mm, ion repeller was arc shape and the ion focusing lens and the main slit were driven by the high voltage and constant voltage tracking method. The ion transfer efficiency and the ion focusing performance could be greatly improved when the ion repeller structure and the voltage driving method were improved. Furthermore, high ion focusing performance could be maintained during the whole mass range. The optimized EI source could greatly improve the sensitivity and mass resolution of miniaturized magnetic mass spectrometer. Although we only investigated the performance of geometric parameters and repeller structure and electric parameters by simulation, the achievements would be helpful and instructional for further experiments and study.

NADCAP project is the process certification of special process production in the supply system of aerospace industry, and is the basis of cooperation with international well-known aviation enterprises. Based on the practical experience of Beijing Institute of Aeronautics and materials in the process of NADCAP certification, this paper shares the personal opinions and experience on the key points of AMS2750E certification, the summary and cause analysis of errors prone to be made in the audit, and the implementation process of corrective measures for nonconformities.

The continuous expansion of the application field of vacuum technology has promoted the mutual integration of different disciplines and the birth of interdisciplinary. The advancement of ultra-high vacuum and high-vacuum technology has promoted the development of high-tech industries such as semiconductors, aerospace and nuclear power energy, and has provided a guarantee for the sustainable development of mankind. In recent years, vacuum chambers, pumps, valves, and seals have made new progress driven by the development of additive manufacturing, nuclear fusion, particle accelerators, and integrated circuits, which have supported important theoretical verification and major engineering construction, and gave birth to new scientific research achievements. This article focuses on the typical applications of several vacuum technologies, and discusses the key technologies among them.

In this paper, we successfully developed a test method based on the L300 series helium mass spectrometry of LEYBOLD to test the total leakage rate of spacecraft used to a non-vacuum accumulative helium detection method. After many tests, the results show that the as-developed spacecraft total leakage rate test system has high measurement accuracy and stable performance. It not only reduces the total leakage rate of the spacecraft system to a minimum, but also reduces the weight of the equipment and increases the mobility. It has some engineering applications and popularization values.

Large vacuum containers are required in modern large science projects, but the design of large vacuum containers needs to consider various factors. It is an important scientific issue how to design large vacuum containers. We designed and analyzed a large-scale horizontal vacuum container in this paper. And the vacuum containers with an inner diameter of 5 m and a length of 6 m were designed, which had many large square flanges. The finite element analysis software, ANSYS-Workbench was used for the analysis, which obtained the stress and deformation distribution of vacuum container under the working condition. And then the structure was optimized and the stability was analyzed. The analysis results show that the design is reasonable and feasible.

HfO₂ thin films were prepared on Si and quartz wafers by magnetron sputtering. SEM, XRD, XPS, UV-visible spectrophotometer and HP4284A precision LCR tester were used to study the surface morphology, microstructure, composition, optical properties and electrical properties of HfO₂ thin film. The main conclusions were as followsthe surface of HfO₂ thin film prepared by magnetron sputtering method is flat and dense with uniform grain size. The grain size is mostly between 10nm~20 nm. The thin film has a polycrystalline structure and a monoclinic crystal structure. The atomic ratio of O and Hf approached 21, and the atomic ratio of O and Hf increased with increase of the ratio of argon to oxygen. The transmittance is above 85% in the wavelength range of 400nm-800 nm, and the refractive index is above 2.0. The thin film has a small leakage current and a dielectric constant of 16 or more. High dielectric HfO₂ material is suitable to replace traditional SiO₂ as gate dielectric material.

The pressure within capsule need to be regulated and controlled by the pressure control system outside the vessel in the process of thermal vacuum test for spacecraft with capsule. Generally, the capsule is connected with the pressure control system via pressure -controlled pipeline (metal bellows). Any leak in the joint of the pressure -controlled pipeline and capsule would make the thermal vacuum test for spacecraft impossible, hence it is of great importance to ensure that the leak rate of joint meet the test requirements. This thesis, studying the specific structure of joint, achieves the leak detection method of the joint, which is verified by test and acquires good effect.

Four refrigerator cooled cryopumps (DN1250 LN₂) were designed and manufactured by BISEE. The pumps were used in space environment simulation system to meet the demand of the high vacuum in thermal vacuum test. The design and test method for pumping speed, cool down time and crossover were introduced in this paper. A test system was built to test the main performance of the cryopumps. The experimental results show that the pumping speed for N₂ of the pump is up to 57000 L/s, the cool down time is about 330min, and the crossover is over than 3.0 ×10⁵Pa·L.

This article introduces the preparation method and development state of flexible coating materials and their applications, as well as the application and development trend of flexible coating materials in the flexible circuit board industry, mainly describes the development and preparation of high performance flexible circuit board materials by magnetron sputtering.

Single Langmuir probe processing system is a processing software based on LabVIEW, which uses a single probe to measure and diagnose the plasma discharge in accordance with the Maxwellian electron distribution. The system can eliminate the big error data through the Grubbs criterion. The Savitzky-Golay filter is used to smooth the V-I curve. The relevant parameters of plasma discharge are obtained by processing and calculating the curve of transition region after the ion current is removed. Using this system, we can make the complicated probe data processing work simple and accurate, which provides the practical application for Langmuir probe. The V-I curve of electron cyclotron wave resonance plasma discharge with power variation was processed by using this probe processing system and the accurate results were obtained.

Ceramic materials have excellent thermal and mechanical properties with important application prospects in many fields. Its inherent high strength and high hardness bring many difficulties to the forming of ceramic parts. The introduction of material-adding manufacturing technology into ceramic forming will effectively overcome such difficulties and provide a new possibility for the complex forming processes of ceramic materials. In this paper, from the point of view of raw material status, the research status and progress of several common ceramic augmentation manufacturing technologies are reviewed in detail. The advantages and disadvantages of each technology in the field of ceramics are systematically compared. The development of ceramic augmentation manufacturing technology in the future is prospected.

With the rapid development of superconducting technology, more and more attention has been paid to the refrigeration system that provides cryogenic environment for superconducting materials. This paper introduces a sub -cooled nitrogen cooling system for HTS motor based on the principle of decompression and cooling. It includes the technical specifications and related requirements, the overall structure, key technologies, thermal load analysis and calculation, etc. The system adopts vacuum cooling to obtain sub-cooled liquid nitrogen and coil wires in the cooling motors. Liquid nitrogen inlet and outlet temperatures are 68K and 72K, respectively. The utility model is mainly composed of a liquid supply dewar, a sub-cooled box, an evacuation pump, a superconducting coil dewar, a reflux dewar, a low temperature pipeline and a temperature meter. The experiment indicates that the cooling system is reasonable in design and easy to operate, and the loading operation of the superconducting motor is successfully realized.

This paper introduces the classification, working principle and characteristics of vacuum fine grain casting furnace used for producing aero-castings. It emphatically analyzesthe structure style and the core technology for fine grain casting furnace and double-properties casting furnace.Finally, it prospects the future development of domestic vacuum fine crystal (double-properties) casting furnace.

The experimental principle, device, sample preparation, test procedures and data processing of volumetric adsorption isotherm are introduced in detail. It was proved that the adsorption performance of 5A molecular sieve for CO₂, N₂ and H₂ was better than that of the 13X molecular sieve at liquid nitrogen temperature and low pressure. On the basis of analyzing the adsorption isotherms of 5A and 13X molecular sieves to CO₂, N₂ and H₂ at liquid nitrogen temperature and low pressure, the characteristics of adsorption isotherms of 5A and 13X molecular sieves at LNG and LH₂ temperatures were analyzed. The adsorption isotherms of 5A and 13X molecular sieve obtained under test at liquid nitrogen temperature and low pressure can provide good reference data for engineering design.

Based on the Fabry-Perot filter structure, a preliminary three-channel filter structure is designed theoretically by optimizing the interference of the space layer. In order to further reduce the channel half-bandwidth and improve the filtering property, the reflectivity of reflective film can be improved appropriately. Finally, a three-channel filter with half-bandwidth of less than 5 nm and peak transmittance of more than 95% was designed.

Vacuum elevator is a new kind of elevator, which can realize the up-going and down-going of the car by controlling the differential pressure between the two sides of the car roof. At present, vacuum elevator has formed an industrial chain represented by PVE in foreign countries. In China, vacuum elevator is still in the developmental stage. The related patents mainly focus on three aspects as drive structure modification, accessory parts innovation and control system optimization. Compared with the traditional one, vacuum elevator does not need the pit, wire rope, traction wheel and other devices, and has obvious advantages such as quick assembly, environment-friend, energy saving, fashionable appearance, safety and reliability. Vacuum elevator has very broad application direction and market prospect.

The counter design of solid rocket engine nozzle profile is directly related to nozzle efficiency and thrust, which is an important research topic in the design of nozzle. In this paper, the research progress on the nozzle profile of solid rocket motor has been reviewed from the aspects of nozzle design method, profile parameter optimization and nozzle fluid-solid coupling analysis. The nozzle design methods such as the direct optimization method, length-shorted nozzle, the six-time Bézier curve, Bi-cubic spline, the B-Spline curve and the method of characteristics are summarized. The applications of computational fluid dynamics and stochastic optimization methods in solid rocket motor design optimization are introduced. The fluid-solid thermal coupling problem of solid rocket engine nozzle has been analyzed. The classical computational fluid dynamics algorithm, characteristic-based split finite element algorithm and a lattice Boltzmann algorithm are used in the study of fluid-solid coupling problems.

In this paper, the standards related to optical coating technology in the US military standards, ISO standards and Chinese standards are summarized. Among the US military standards, there are 7 optical coating standards, which are classified according to their content. In ISO standards, the main content and development of ISO 9211 are described in detail. In Chinese standards, the current optical coating standards are enumerated and classified. The development of these optical coating standards are prospected. The US military standards will still be active in the optical coating industry for a long time. The optical coating standards of ISO will be constantly improved and widely used in the industry. In China, there will be more and more optical coating standards, and their technical requirements will be in line with the ISO standards step by step.

Based on the development of the high temperature working infrared detector Dewar module, the conduction heat load and radiation heat load, which influences the Dewar heat load index importantly, are analyzed and the improved method of Dewar design is proposed. The conventional method of Dewar leak test and the defects of Dewar heat load test under high operating temperature are analyzed. The vacuum protection calorimetry method is adopted to realize a reliable method for heat load detection of high working temperature type Dewar components, which can promote the development of three generations of infrared focal plane detector components.

The boron neutron capture therapy(BNCT) device consists of an ECR ion source, a low energy transmission line(LEBT), a 3.5 MeV radio frequency quadrupole accelerator(RFQ), a high energy transmission line(HEBT)and a target station. The article first introduces the composition of the BNCT vacuum system, compares the differences between the BNCT and CSNS ion source vacuum systems, and gives the HEBT vacuum system design scheme and gas production calculation method. Using the Molflow software, the static pressure distribution of the HEBT vacuum system and the dynamic pressure distribution during beam bombardment are calculated and compared with the current vacuum state.

This paper introduces the design principle and development process of the first multi-chamber continuous vacuum sintering furnace in China. It introduces its application background, system composition and working principle of each main unit, and develops and designs a set of production equipment with its own characteristics according to relevant technical requirements.

Carbon films were deposited on different substrates, such as silicon, high-speed steel and stainless steel, by magnetron sputtering. Keeping other parameters constant, the pulsed negative bias varying from 100 V to 400 V was applied to the substrate in order to investigate the change of micro-structure and performance of the carbon films. The results show that all the as-deposited carbon films are amorphous and hard with good surface quality. The hardness, thickness as well as deposition rate of the carbon films increase initially and then decrease with increasing pulsed bias, while the friction coefficient behaves oppositely. The optimized mechanical properties of the carbon films are obtained at the pulsed negative bias of 200 V.

In the development process of the microwave tubes, the main purpose of vacuum degassing system for the electron gun is to obtain the data between current/voltage and temperature, to test the quick start parameter, to measure thermal expansion and to minimize the material evapotranspiration and outgassing. According to the relation between structure and property of the electron gun, two operating station vacuum degassing system was designed and developed with the function of temperature, thermal expansion and other measure property. The final system pressure is better than  2×10^-7 Pa. In the vacuum degassing system, mechanical pump is used as the backing up pump, while the molecular pump and the ion pump are the main pumps. Each operating station can work simultaneously to improve the quality and to save time for increasing the efficiency. Indicator lights are equiped with the system to prevent the potential problems for the electron guns or the vacuum system that is caused by misoperation. A large amount of data obtained from experiments verifies the working principal, structure design and good properties of the system. It is applicable to different types of electron guns for microwave tubes, which has important significance in the small amount production of klystrons.

The proton accelerator at China Spallation Neutron Source (CSNS) consists of the negative hydrogen ion (H^-) Linac with an energy of 80 MeV, the Linac to Rapid Cycling Synchrotron (RCS) Beam Transport (LRBT) and RCS to Target Beam Transport (RTBT), and the RCS that accumulates and accelerates the proton beam to 1.6 GeV. The LRBT section with a total length about 200 meters is an important part for the accelerator. This paper introduce the LRBT vacuum system including vacuum layout design, physical requirements, vacuum parameters, key equipments, installation and commissioning work. At present, the dynamic vacuum of LRBT is better than 2×10^-6 Pa when the target power is 50kW, meeting the physical requirements. The vacuum equipments are stable and reliable without failure in the past two and a half years of long-term operation includes each vacuum non-standard equipment, vacuum acquisition and measuring equipment, etc.

In the process of removing tiny metal burrs in the vacuum tube, DC high voltage dedurring has some problems such as removing burr, removing unclean, larger burr residual, and influencing the test of product voltage and frequency. In order to overcome the technical shortcomings of DC high-voltage deburring, high voltage pulse with low repetition rate is used to remove the burr. In order to overcome the complicated design and high cost of the traditional high -voltage pulse power supply with vacuum tube as pulse switch and the whole circuit and control loop of all solid-state high-voltage pulse power supply with semiconductor device as pulse switch, a high voltage low frequency and wide duty ratio based on two transistor forward converter pulse for deburring power supply is developed. Through increasing the number of two transistor forward converters, and dual forward converter, it can meet the wide duty cycle of high voltage output. The design of the main circuit and control loop of the power supply is simple, stable, reliable, expansibility and low cost, which provides a relatively new solution for the design of high -voltage pulse power supply. The experimental results show that the output parameters of the power supply meet the design requirements, and are stable and reliable.

Two different specifications of diffusion pump oils were obtained by distillation cutting through petroleum base oil by using molecular distillation technology. The two kinds of diffusionion pump oils are then subjected to full-scale distillation, and the data obtained after cutting the two-stage and five-stage fractions. The experimental results show that the diffused pump oil fully distilled has a narrow distillation range, a smaller slope and a narrower distillation range. We found that the light fraction and heavy fraction contained in the diffusion pump oil are less, the mixed components are relatively uniform, and the ultimate vacuum is higher. After cutting two and five fractions, kinematic viscosity distribution is uniform, which indicates that the mixed components in the diffusion pump oil are uniformly distributed and the purity is higher.

In this paper, the trilobal Roots pump is taken as the research object, starting from its basic structure and working principle, its internal gas transport process was analyzed thermodynamically. Taking the gas as the research object, the time sequence analysis was carried out, and the process of the gas in the pump was decomposed into intake, transport, recoil, discharge, and discussing the characteristics and mechanism of each stage in detail. The knowledge of thermodynamics and the amount of backflow were taken into account. Calculating gas backflow through model. The quantitative analysis of each phase was carried out, and the time-variation formulas of thermodynamic parameters were deduced, such as pressure, volume, mass, and internal energy. The formula was used to explore the relationship between exhaust power and import and export pressure.

The wall current probe, as a probe for measuring the longitudinal size and intensity of the bunch, is widely used in the accelerator system. The accelerator vacuum system is an ultra-high vacuum system, and the alumina ceramics are resistant to high temperature with high insulation performance, low outgassing rate and high dielectric strength. Stainless steel is resistant to corrosion, can be baked and has low outgassing rate, which is a common and excellent material for ultra-high vacuum system. This paper introduces the brazing technology of ceramic and Kovar, the argon arc welding structure of Kovar and stainless steel and the helium mass spectrometer leak detection.

In this paper, nickel chromium silicon thin film was deposited on 96 alumina substrate by DC magnetron sputtering method, and then the resistance patterns of different requirements are realized bylithography and wet etching. In the graphic process, to comparethe etching effects of HNA etching system, TMAH etching system and catalytic oxidation etching system , and then choice the best etching system and optimizethe process parameters. In the catalytic oxidation etching system (CNAHNO₃H₂O) with CNA content of 30% etching temperature 50℃, the etching rate of about 4 nm/s, etching effect is best, and the design dimension deviation is small, which can realize nickel chromium silicon thin film etching line width to （15±1）μm, meet the requirements of the design and production of high precision precision membrane resistance.