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Study on Fluid-thermal-solid Coupling Numerical Simulation on the Temperature Rise of Hydrogen Storage Cylinder During Fast Filling Process Based on ANSYS
YANG Gang, OU Chen-xi, CHEN Xin-hui, HUANG Si
VACUUM    2024, 61 (3): 26-32.   DOI: 10.13385/j.cnki.vacuum.2024.03.05
Abstract122)            Save
Taking a vehicle carbon fiber fully-wound hydrogen storage cylinder as the research object, based on the ANSYS workbench platform, the difference of the cylinder structure layer and the uneven distribution of temperature load are fully considered, and the fluid-thermal-solid coupling numerical simulation and analysis are carried out. The specific method is to firstly carry out 3D numerical simulation of the gas flow field inside the cylinder during the fast filling process to study the law of temperature rise, then load the flow field calculation results into the cylinder structural layer for steady-state thermal analysis, and finally load both the flow field and thermal analysis results into the cylinder structural layer for structural static analysis. The results show that the maximum temperature of the cylinder and the maximum stress on the carbon fiber composite layer appear at the connection between the end head and the cylinder when the filling is finished. The thermal stress caused by the temperature load is small compared with the mechanical stress caused by the internal pressure. The difference between the mechanical stress and the coupling stress is not large, and the mechanical stress on the carbon fiber composite layer is slightly smaller than the coupling stress, while the thermal stress caused by the temperature load on the aluminum alloy liner layer is partly offset by the mechanical stress due to the large expansion coefficient, making the coupling stress smaller than the mechanical stress.
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Development of Rectangular Planar Magnetic Control Target with Dynamic Magnetic Field
LIU Wen-li, LIU Xu, YIN Xiang
VACUUM    2023, 60 (5): 47-50.   DOI: 10.13385/j.cnki.vacuum.2023.05.06
Abstract83)            Save
To solve the problem of low target utilization rate during the use of rectangular magnetron sputtering targets, NAURA designed and fabricated a rectangular planar magnetic control target with dynamic magnetic field whose magnet components can move horizontally and vertically. The equipment drives the magnet assembly to scan along the width direction of the target material through the motor, so that the etching track expands in the width direction on the target surface, the etched area of the target surface increases, and the utilization rate of the target material improves. The vertical height of the magnet assembly is adjusted by the motor to reduce the relative change of the magnetic field intensity on the surface of the target material and to improve the utilization rate of the target material. The test results show that the target utilization rate of the dynamic magnetic field rectangular planar magnetic control target designed and fabricated by NAURA increases to 55%~60%, which greatly reduces the production cost. At present, the equipment has been recognized by industry customers.
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Study on Uniformity of Inclined Magnetron Sputtering with Small Circular Plane Target
FU Xue-cheng, XU Jin-bin, WU Li-ying, HUANG Sheng-li, WANG Ying
VACUUM    2021, 58 (4): 1-5.   DOI: 10.13385/j.cnki.vacuum.2021.04.01
Abstract467)            Save
Based on the actual situation of the inclined magnetron sputtering with the circular plane target, the mathematical model is established according to the characteristics of the angle between the annular etching groove of the target and the horizontal workpiece table. Matlab software is used to simulate and study the influence of different angle on the film thickness distribution when the target and workpiece table are facing each other and the height is fixed. We found that the film thickness increases first and then decreases in the horizontal distance between the worktable and the target. When the target angle is appropriate, the film deposition rate changesapproximately in a straight line within the fixed area of the worktable. We simulated the uniformity on the 4-inch substrate according to the actual characteristics of thedecreasing distribution of the film thickness in the horizontal plane of the worktable. According to the results of theoretical simulation,tantalum nitride films with nonuniformity less than 0.6% were prepared on a 4-inch substrate, which verified the correctness of the mathematical model. The reason why the experimental results are better thanthat of the simulation is explained. This work provides a reference for the design and manufacture of magnetron sputtering coating equipment.
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Preparation of Molten Heater Assembly
LIU Yan-wen, MENG Ming-feng, ZHANG Xiao-lin, ZHU Hong, WANG Guo-jian, ZHAO Heng-bang, WANG Xiao-xia, ZHANG Zhi-qiang
VACUUM    2022, 59 (4): 76-79.   DOI: 10.13385/j.cnki.vacuum.2022.04.14
Abstract129)            Save
Microwave vacuum electronic devices are used in a wide variety of areas such as radar, space technology and electron accelerators. The heater assembly is one of the cores for the vacuum electronic devices. Their performances directly determine the reliability and lifetime of the electronic devices. A strategy to develop a new type of method for heater assembly is proposed in order to overcome the shortcomings of traditional heater assembly preparation process. High temperature vacuum sintering technology is used to melt the heater and the insulating material together, which improves the compactness of the heater assembly, reduces the adsorption of residual gas, enhances the impact resistance of the heater assembly, and overcomes the shortcomings of brittleness of the heater.
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High-temperature working infrared detector Dewar heat load test technology
ZHANG Ya-ping, YANG Xiu-hua, HE Yin, HUANG Yi-bin, WANG Bo, WANG Yan, NIE Xi-liang
VACUUM    2019, 56 (3): 60-65.   DOI: 10.13385/j.cnki.vacuum.2019.03.14
Abstract699)            Save
Based on the development of the high temperature working infrared detector Dewar module, the conduction heat load and radiation heat load, which influences the Dewar heat load index importantly, are analyzed and the improved method of Dewar design is proposed. The conventional method of Dewar leak test and the defects of Dewar heat load test under high operating temperature are analyzed. The vacuum protection calorimetry method is adopted to realize a reliable method for heat load detection of high working temperature type Dewar components, which can promote the development of three generations of infrared focal plane detector components.
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Development and Application of Multi-Chamber Tunnel Continuous Vacuum Sintering Furnace and Heat Treatment Furnace
WANG Zhi-rong, MA Qiang, LONG Guo-liang, LI Xue-feng, LIU Cheng
VACUUM    2019, 56 (5): 6-11.   DOI: 10.13385/j.cnki.vacuum.2019.05.02
Abstract696)            Save
This paper introduces the design principle and development process of the first multi-chamber continuous vacuum sintering furnace in China. It introduces its application background, system composition and working principle of each main unit, and develops and designs a set of production equipment with its own characteristics according to relevant technical requirements.
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Design of Chamber C1 for Low-E Glass Coating Line
CHEN Hai-feng, LIN Le-zhong
VACUUM    2019, 56 (5): 47-51.   DOI: 10.13385/j.cnki.vacuum.2019.05.09
Abstract473)            Save
The chamber C1 of Low-E glass coating line is a very important vacuum chamber for the whole production line. Its cycle time determines the fastest cycle time that the whole glass coating line can achieve. This paper puts forward a series of requirements for the design of the chamber C1, and gives the corresponding design principles. Starting from the direction of reducing equipment manufacturing cost, reducing energy consumption and increasing the applicability of equipment, it also gives the direction different from the conventional design. In the special design, the pumping time and pump group parameters are calculated. The C1 chamber was designed and manufactured according to this design. We tested a series of parameters and the special design of the occupying block changed the pumping time by 43.2%, which has been proved.
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Application Research of SLM Metal 3D Printing Technology in Main Pump Prototype Test
ZHAO Teng-jiao, JIN Nan, LIN Bin, WANG Zhi-guo
VACUUM    2019, 56 (6): 64-67.   DOI: 10.13385/j.cnki.vacuum.2019.06.12
Abstract285)            Save
The metal 3D printing process has the advantages of high material utilization rate, easy to form complex structure and flexible customized production, etc. It is suitable for rapid manufacture of model-level test impellers, guide vanes, inducers and other small metal functional parts. Among them, the selective laser melting forming technology(SLM), as the main metal 3D printing technology, can obtain metallurgical bonding, tissue compactness, high dimensional accuracy and good mechanical properties. The SLM technology was used to directly form the impeller and vane of the main pump test prototype for a project. The material is 17-4PH stainless steel. The integrated printing of the impeller and the assembled shaft saves the assembly cost. The studies on printing model optimization, processing parameters and process monitoring ensure the successful printing of the tall integrated shaft impeller and guide vane with large diameter. The printing parts were heat treated and finish machining, and finally the gas-liquid two-phase performance test of the main pump prototype was carried out. The test results show that the rotating and stator components manufactured by SLM metal 3D printing technology is successfully applied in the prototype test of the main pump, which significantly shortens the processing cycle of the prototype, and the machining accuracy, surface quality and mechanical properties all meet the test requirements.
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Study of Leak Detection Technology for Large-Scale Overlength Tank in Vertical Status
GU Zhong-hua, ZHANG Xin, LI Shu-xin, ZHOU Qing, WANG Ri-jie, HAN Lei
VACUUM    2020, 57 (1): 17-20.   DOI: 10.13385/j.cnki.vacuum.2020.01.03
Abstract361)            Save
To meet with the requirement of helium mass spectrometric leak detection for large-scale overlength tanks of the next generation launch vehicle, a new leak test method with the tank in vertical status is proposed in this paper. Theoretic analysis and simulation tests are both used to study the air stratification caused by the gravity along the vertical direction. The results show that there is no significant helium stratification when the leak detection is performed with the large-scale overlength tanks in the vertical status and the error caused by the stratification is negligible, which confirm the engineering feasibility of the leak detection with overlength tanks in vertical status.
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Design of Intelligent Screw Air Compressor Performance Testing System
LI Fu-song, WANG Wen-jun, LIN Wei-jian, PAN Ya-juan
VACUUM    2021, 58 (1): 19-22.   DOI: 10.13385/j.cnki.vacuum.2021.01.05
Abstract323)            Save
Combined with hardware structure design, network communication, website development and other technologies, this paper studies and designs a set of B/S mode intelligent screw air compressor performance test system, including the design of hardware test structure and cloud software system,as well as the implementation of key technologies. The system can automatically collect test data, calculate the performance parameters and energy efficiency values of the whole machine according to the air compressor acceptance test standards, generate test reports, and form the big data of air compressor test. Users can analyze statistics at any time, form various charts, etc. It meets the testing needs of various aspects of the product, and complys with the development trend of product intelligence and information technology.
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VACUUM    2020, 57 (2): 94-96.   DOI: 10.13385/j.cnki.vacuum.2020.02.18
Abstract269)            Save
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Research Progress of NS/DSMC Coupling Calculation Method in the Transitional Flow of Rarefied Gas
LIU Wan-suo, YUE Xiang-ji, LIN Zeng
VACUUM    2022, 59 (4): 33-40.   DOI: 10.13385/j.cnki.vacuum.2022.04.07
Abstract254)            Save
The transition flow is solved by the joint calculation of NS and DSMC methods. The NS/DSMC coupling method has the advantages of the computational efficiency of NS method and the computational accuracy of DSMC method.In this paper, the principle of key technologies in the development of coupling method is introduced in detail, the application progress of coupling method in spatial plume research is discussed, and the shortcomings of computational domain partition method are explained. Then the application of coupling technology in the flow around neighbor spacecraft is analyzed. It is proposed that the error between the coupling calculation and the experimental results may be caused by DSMC statistical scattering, which can be eliminated by cumulative statistics. In addition, the application of NS/DSMC coupling method using two-phase flow model in MEMS field is also discussed. Finally, the application of coupling method in vacuum field and the research direction of coupling algorithm in the future are prospected.
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Study on Pressurization, Depressurization and Repressruization Test Method for Electronic Equipment Stand-Alone Products
WU Yue, CHANG Dong-lin, REN Xiao-yu, XIE Zheng, DU Peng, WANG Lei, WANG Jing
VACUUM    2020, 57 (4): 50-53.   DOI: 10.13385/j.cnki.vacuum.2020.04.11
Abstract594)            Save
Pressurization, depressurization and repressruization test is primarily applied to investigate the adaptability of electronic equipment stand-alone products to the depressurization and repressruization environment under the condition of above normal atmospheric pressure. Combining with the characteristics of pressurization, depressurization and repressruization test, we develop a set of pressurization, depressurization and repressruization test equipment. It solves the difficult problems such as gas temperature decrease during depressurization test, condensation on the inner surface of specimens and containers, precise control of rate during depressurization and repressruization, etc. The results prove that all of the test equipment technical indicators meet the technical requirement, which can ensure the smooth process of pressurization, depressurization and repressruization test.
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Effect of Hall Source Sputtering Cleaning Process on Bonding Properties of Ion Plating TiN Coatings
ZHONG Li, DAN Min, SHEN Li-ru, JIN Fan-ya, CHEN Mei-yan, LIU Tong, DENG Zhi
VACUUM    2020, 57 (6): 5-6.   DOI: 10.13385/j.cnki.vacuum.2020.06.02
Abstract525)            Save
Aiming for studying the mechanism and regularity of the effect of sputtering cleaning process on the surface characteristics of substrates, the Hall ion source was used to generate argon ion beam to clean substrates. The surface characteristics of substrates after ion beam cleaning under different discharge voltage and the bonding strength of coatings were then compared after changing discharge voltage of ion beam by adjusting the vacuum degree. The results show that with the increase of vacuum, the discharge voltage of ion beam increased gradually, the contact angle of substrate decreased gradually, and the surface roughness of substrate decreased first and then increased. The bonding strength of the coatings increased gradually with the increase of ion beam discharge voltage, up to 60N. It can be a concluded that the substrate surface could obtain good wettability, ductility and cleanliness after high energy argon ion beam sputtering cleaning, which can effectively improve the bonding performance of the coating.
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Structure Optimization of Graphite Furnace for Vacuum High Temperature Heat Treatment Furnace
WANG Ying, MING Yue, DAI Yu-bo, CHE En-lin, WANG Biao
VACUUM    2020, 57 (6): 27-30.   DOI: 10.13385/j.cnki.vacuum.2020.06.06
Abstract430)            Save
In this work, the numerical calculation model for the graphite furnace fluid area of the vacuum high temperature heat treatment furnace is established. The numerical calculation model of the graphite furnace inside fluid was performed based on the CFD, the inner fluid field was analyzed, and the optimal solution of flow field structure is obtained by the analysis of different structure. This work may provide a theoretical basis for design.
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Study on Thermal Stability of CrCN Films Prepared by FCVAD Technology
WU Shuai, LIU Shuang, QIN Li-zhao, ZHANG Xu, ZHANG Tong-hua, LIAO Bin, WANG Ke-ping
VACUUM    2022, 59 (5): 14-19.   DOI: 10.13385/j.cnki.vacuum.2022.05.03
Abstract112)            Save
CrCN films prepared by magnetic filtration cathodic arc deposition(FCVAD)technology have excellent mechanical properties and can be used as surface modified films in textile equipment, pcb drill bits and piston rings. In this paper, the thermal stability of CrCN films was investigated for the situation that the structure and properties of films will change due to high temperature caused by friction or high temperature of application environment. Structure of the films from room temperature to 800℃ was characterized by X-ray diffraction(XRD), field emission scanning electron microscopy(FESEM), Raman spectroscopy(Raman), and X-ray photoelectron spectroscopy(XPS). The results show that the upper limit of thermal stability of CrCN films prepared by FCVAD technique is about 400℃. When the temperature is below 400℃, the structure of CrCN films is stable and remains disordered. When the temperature reaches 500℃, fine grains appear on the surface of the films, and the CrN phase in the films is transformed into Cr2N phase. As the temperature continues to increase, the CrCN solid solution phase starts to graphitize, and the grain size within the films becomes larger. When the temperature is greater than 700℃, carbon in the films leaves in the form of CO or CO2, and Cr element exists in the form of Cr2O3 phase and grows into grains with a size of about 400nm at 800℃.
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High Vacuum Maintaining Technology for Hemispherical Resonator Gyro
ZHANG Hong-bo, QU Tian-liang, WANG Peng
VACUUM    2023, 60 (4): 75-79.   DOI: 10.13385/j.cnki.vacuum.2023.04.14
Abstract100)            Save
The required vacuum of hemispherical resonator gyro inner cavity was confirmed by theoretic calculation, and the relation of vacuum of the inner cavity with increasing time was found according to the outgassing rate experimental test data. The appropriate getter was chosen, the absorbable capacity of getter was tested, and the equivalent outgassing rate of inner cavity with getter was measured. The test results indicate that the getter can meet the requirement of keeping high vacuum of hemispherical resonator gyro.
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Numerical Simulation and Experimental Research on Miniaturized Anode Layer Thruster
LI Ping-chuan, XU Li, ZHAO Jie, ZHANG Fan, XIONG Si-wei, JIAN Yi, ZHANG Zheng-hao, TANG De-li
VACUUM    2023, 60 (4): 36-41.   DOI: 10.13385/j.cnki.vacuum.2023.04.07
Abstract98)            Save
In this paper, particle grid combined with Monte Carlo collision method was used to simulate the miniaturized anode layer Hall thruster. Meanwhile, the discharge experiment of the miniaturized anode layer Hall thruster was carried out to evaluate its performance. The results show that the discharge of the miniaturized anode layer thruster is stable, and the ion beam presents a bunched mode. The discharge voltage range is 300~1100V, the specific impulse range is 234~2047s, and the thrust range is 0.5~5.4mN. This study can provide certain data support for further optimization design of high efficiency, light mass and high performance micro anode layer Hall thruster.
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Development of Circulating and Boosting Pump for Tritium Transportation
YI Jun, ZHOU Fan, DENG He, YUE Xiao-bin, WANG Bao-rui, HAN Zhi-jia, WANG Jin
VACUUM    2023, 60 (4): 69-74.   DOI: 10.13385/j.cnki.vacuum.2023.04.13
Abstract125)            Save
For the requirement of tritium gas transportation, a set of bellow pump is developed, which includes a boosting pump and a rocking pump. Swashplate-rod with piston structure is developed for the boosting pump, in which three reciprocating plunger pistons are adopted to get high compression ratio to deal with the low vacuum and booster. Rocking piston is adopted in rocking pump to increase the gas flow and decrease the vacuum pressure, which ensure the inlet pressure is 50Pa and outlet pressure is 0.4MPa. Double bellows are used to separate the tritium from the shaft system, which can prevent the transporting gas from any pollution. Helicoflex sealing is used to separate the tritium from the environment, and leaking ratio of 1.0×10-7Pa·m3/s is achieved. The self developed circulating and boosting pump can meet the request of tritium boosting transportation.
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Synthesis of ZnO Nanorod Arrays Grown on Different Substrates and Their Field Emission Performances
CHEN Ya-wei, DONG Ming-liang, QIAN Wei-jin, TU You-qing, HUANG Wei-jun, DONG Chang-kun
VACUUM    2023, 60 (6): 32-36.   DOI: 10.13385/j.cnki.vacuum.2023.06.05
Abstract96)            Save
Zinc oxide nanorod arrays were prepared on five different substrates using low-temperature hydrothermal method, and the microstructure and elemental composition of the products were characterized by SEM, TEM, XRD, EDS, and XPS. The field emission (FE) properties of zinc oxide nanorod arrays grown on different substrates were investigated. The results show that the turn-on fields of samples grown on Si, conductive glass, nickel, stainless steel, and nickel titanium alloy increase in turn. Attributing to the better adhesion between zinc oxide nanorods and the Si substrate, the samples grown on Si substrate have the best FE performance and the best emission stability, with a current fluctuation less than 10% under the current density of 0.5mA/cm2 in DC mode for 15 h.
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Simulation Study of the Effect of Surface Properties on Gas Separation Characteristics for Ratchet-type Knudsen Pumps
HAN Feng, ZHANG Zhi-jun, ZHANG Shi-wei, WANG Xiao-wei
VACUUM    2024, 61 (3): 13-19.   DOI: 10.13385/j.cnki.vacuum.2024.03.03
Abstract71)            Save
The Knudsen pump, a type of micro-pump, is widely used in microelectromechanical systems (MEMS). The paper proposes a ratchet-type Knudsen pump with varied surface accommodation coefficients. The gas flow characteristics of this pump are simulated numerically by using the direct simulation Monte Carlo (DSMC) method. The results show that surface accommodation characteristics significantly influence the flow field and gas separation features. Distinct surface reflection characteristics give rise to varying thermally induced flow mechanisms within the Knudsen pump. The primary thermally induced flow in the Knudsen pump at αn=σt=0 of the inclined edge of the triangle is the radiometric flow, which is advantageous for gas separation. At αn=σt=1 of the triangular inclined edge, the primary thermally induced flow is the thermal edge flow, which is not clearly advantageous for gas separation. The velocity difference and diffusion velocity difference between He and Xe are greatest near the upper vertex of triangular ratchet at αn=σt=0 of the triangular inclined edge, while the differences are greatest near the left vertex of triangular ratchet at αn=σt=1. Moreover, the flow velocity and diffusive velocity increase as the gas becomes lighter. This paper may establish a theoretical foundation for creating and producing miniature gas separation devices applicable in practical engineering contexts.
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Application of Vacuum Technology in High-temperature Superconducting Electrodynamic Suspension Transportation System
HU Hao, LI Kai, LIU Hong-tao, SHAO Qing, HAN Tian, YU Miao, LIU Hang, LI Hao-chen
VACUUM    2024, 61 (3): 105-109.   DOI: 10.13385/j.cnki.vacuum.2024.03.19
Abstract116)            Save
In a high-temperature superconducting (HTS) electrodynamic suspension (EDS) transportation system, the application of vacuum technology provides a perfect vacuum environment which can obtain and maintain the superconductive performance of the coils for HTS magnets, so that it can satisfy the requirements of the train propulsion, levitation, and guidance. In this paper, the EDS transportation system principle and the structure composition of onboard HTS magnets are introduced. Through vacuum system design and vacuum acquisition equipment selection, combined with vacuum measurement and leak detection technology, the high vacuum holding system with a vacuum degree of 1×10-5 Pa and a maximum leakage rate of 1.33×10-10 Pa·m3/s for superconducting magnet was developed. And it has been stably put into service in the full elements test system of HTS EDS which is the first self-developed in China.
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Application of Grinding Process in the Post-treatment Stage of Titanium Alloy Castings
ZHANG Hai-chao, LIU Jun-jie
VACUUM    2024, 61 (4): 92-95.   DOI: 10.13385/j.cnki.vacuum.2024.04.17
Abstract69)            Save
Grinding is an important processing method in the post-treatment stage of titanium alloy castings. After grinding processing, the product can reach the desired shape, size, surface roughness and quality standards. However, titanium alloy has excellent properties different from the other metals, causing difficulties in the grinding and reducing processing. By describing the material properties of titanium alloy and the characteristics of different grinding processes, this paper lists and analyzes the main grinding processing methods and solutions of titanium alloy castings in the post-treatment stage in combination with the difficult points of titanium alloy grinding in the actual grinding processing, in order to give full play to the irreplaceable advantages of grinding processing in micro-grinding processing and the important supporting role in the field of aerospace technology.
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Research Status of MHD Sealing Technology in Vacuum Heat Treatment Equipment Based on Superconducting Coils
HUANG Zhi-qiang, WANG Zhen-hong, LI Xin-ke, GAO Yuan, SU Ning, CHEN Ding, CHE En-lin, DAI Yu-bo, MO Fan
VACUUM    2024, 61 (6): 79-84.   DOI: 10.13385/j.cnki.vacuum.2024.06.14
Abstract85)            Save
Magnetic fluid sealing technology has natural advantages such as no friction, no pollution and long life, it has broad application prospects in vacuum sealing. Combining with the practical engineering application, the principle and characteristics of magnetic fluid seal, the research status and products of MHD sealing technology at home and abroad, and the application of magnetic fluid sealing in vacuum equipment are described. The development status of the heat treatment equipment and technology of superconducting coils and the defects of existing magnetic fluid sealing structures in the sealing of superconducting coils vacuum heat treatment furnace are introduced, and a new type of water-cooled magnetic fluid sealing device for vacuum heat treatment furnace was proposed. This device can achieve gapless sealing and only enough cooling water is needed to ensure thermal balance, which can effectively reduce the cost.
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Aerodynamic Optimization Design of Intake Pipe of Centrifugal Vacuum Pump in Confined Space
QI Dawei, LI Chuanxu, CHEN Dejiang, ZHAO Shunhong
VACUUM    2025, 62 (2): 35-41.   DOI: 10.13385/j.cnki.vacuum.2025.02.05
Abstract40)            Save
Aiming at the problem that the inlet flow of large-scale centrifugal vacuum pump is difficult to distribute uniformly in parallel operation in confined space, the aerodynamic analysis of four-way and five-way inlet pipes of centrifugal vacuum pump is carried out by numerical simulation analysis. The aerodynamic structure with uniform inlet flow, small flow pressure loss and uniform flow distribution is obtained, and it is verified by practical application. The results show that the strategy of dividing intersecting cone into two and then dividing into four is an effective four-way and five-way diversion strategy in confined space. Under the condition that the length of the front and rear air inlet paths is quite different, it is difficult to meet the flow uniformity and flow resistance matching at the same time, so the rectifier is designed to match the flow resistance difference. The practical test results of pressure difference between the main pipeline and inlets of optimized pneumatic structure and their flow rate are consistent with the calculated results, indicating that the design method is effective and feasible.
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20kV high voltage based on double transistor forward converter pulse power supply for metal deburring
LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan
VACUUM    2018, 55 (5): 19-24.   DOI: 10.13385/j.cnki.vacuum.2018.05.04
Abstract674)            Save
In the process of removing tiny metal burrs in the vacuum tube, DC high voltage dedurring has some problems such as removing burr, removing unclean, larger burr residual, and influencing the test of product voltage and frequency. In order to overcome the technical shortcomings of DC high-voltage deburring, high voltage pulse with low repetition rate is used to remove the burr. In order to overcome the complicated design and high cost of the traditional high -voltage pulse power supply with vacuum tube as pulse switch and the whole circuit and control loop of all solid-state high-voltage pulse power supply with semiconductor device as pulse switch, a high voltage low frequency and wide duty ratio based on two transistor forward converter pulse for deburring power supply is developed. Through increasing the number of two transistor forward converters, and dual forward converter, it can meet the wide duty cycle of high voltage output. The design of the main circuit and control loop of the power supply is simple, stable, reliable, expansibility and low cost, which provides a relatively new solution for the design of high -voltage pulse power supply. The experimental results show that the output parameters of the power supply meet the design requirements, and are stable and reliable.
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Design of automatic sealing and locking scheme for lunar sample
JI Ming, SUN Liang, YANG Min-bo
VACUUM    2018, 55 (6): 24-27.   DOI: 10.13385/j.cnki.vacuum.2018.06.06
Abstract371)            Save
One of the key tasks of China's lunar exploration phase three project is to collect lunar sample and return to earth under the condition of unmanned state, and to maintain the original state of the lunar sample, and to ensure the accuracy of the ground data analysis. Aiming at the characteristics of the mission for the lunar sampling in China, and by referring to the successful experience abroad, this paper designs a sealing structure and locking mechanism to automatically seal the lunar sample. The design can realize the vacuum seal with extremely low leakage rate of the lunar sample, and can still maintain the leakage rate of the sample container after withstanding some mechanical environment conditions. The ground test verification indicate that the design can meet the expected target and the needs of lunar sampling mission in China.
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Carbon nanotube field emission cathode based on direct growth technique
ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun
VACUUM    2018, 55 (5): 10-14.   DOI: 10.13385/j.cnki.vacuum.2018.05.02
Abstract544)            Save
Carbon nanotube(CNT) field emission cathode has the advantages of quick start, high resolution, long lifetime, and low power consumption. The CNT cathode can be employed in a variety of vacuum electronic devices and components, including flat panel display, vacuum measurement, and vacuum electronic devices. This article discusses major methods for development of carbon nanotube cathode, and emphasizes on direct growth of CNT emitters on catalytic substrate by chemical vapor deposition and substrate anodization with strong adhesion and advantages for applications in the X -ray tube and other vacuum electronic devices. The field emission properties of CNT cathode grown directly on stainless steel substrate are investigated, with the turn -on electric field of 1.46 V/滋m. The high current emission and stability properties of the direct grown CNT emitters are improved significantly comparing with that of the CNT cathode by conventional synthesis on catalytic metal film. The substrate anodization improves clearly the CNT structure and field emission performance. Advantages of large scale production of up to 2 cm in diameter and high current emission of 500 mA/cm2 are also demonstrated.
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Reflectance spectroscopy study on TBCs prepared by EB-PVD
CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping
VACUUM    2018, 55 (5): 46-50.   DOI: 10.13385/j.cnki.vacuum.2018.05.10
Abstract386)            Save
In order to study the spectral reflectance characteristics of the thermal barrier coatings deposited on the surface of turbine blades in aero-engines, the NiCrAlYSi and NiCoCrAlYHf bondcoat of thermal barrier coatings (TBCs) were deposited on the 304 stainless steel substrate by vacuum arc ion plating and the topcoat of YSZ was deposited by EB -PVD. The spectral reflectance of TBCs within a wavelength range of 0.3 to 2.5 μm at room temperature was measured by UV -VIS -NIR spectrophotometer. The results show that no matter which kind of bondcoat is, the reflectance spectra of the NiCrAlYSi/YSZ and NiCoCrAlYHf/YSZ with the same thickness of bondcoat and topcoat are very close in the whole wavelength band. The spectral reflectance of the NiCrAlYSi/YSZ coat shows different characteristics under the topcoat thickness of 20, 100 and 170μm. Within the wavelength range from 0.3 to 0.45 μm, the coating with a 20 μm topcoat shows the strongest reflct ability on purple light, while the other two grayish-white sample show similar ability. Reflectance has a positive relativity to the YSZ thickness in the 0.45 to 2.5 μm wavelength range. Compared with that of the conventional YSZ, the spectral reflectance of micro laminate deposited by modified EB-PVD process is improved by two times.
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Light shell design of low temperature adsorption bed and its optimization
SHEN Fu-bo, WANG Jie, ZHAI Yue, ZHOU Zhi-peng
VACUUM    2018, 55 (6): 42-44.   DOI: 10.13385/j.cnki.vacuum.2018.06.10
Abstract347)            Save
The low-temperature adsorption bed is an crucial part for the pressure recovery system of the chemical laser. In order to reduce the weight of its shell, this paper uses the finite element analysis method to explore the design method and optimization scheme to make adsorption bed shell and lid with low-temperature aluminum alloy material instead of stainless steel. The results show that the strength and vacuum condition of the aluminum alloy material adsorption bed have both met the design specifications, opening a new approach to design the low-temperature adsorption bed for the use of lightweight material.
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A new high-conductance ion pump for particle accelerator
Alessandro Abatecola
VACUUM    2019, 56 (1): 16-19.   DOI: 10.13385/j.cnki.vacuum.2019.01.04
Abstract821)            Save
Ion getter pumps (IGPs) are particularly appropriate for use in modern accelerator facilities because of their high reliability, cleanliness and the absence of vibration that could disturb the trajectory of the beam. Normally, T-pieces are used to connect the pumps to the beam tube. These reduce the effective pumping speed and require the use of radiofrequency (RF) shielding which is complicated and expensive. Moreover, very often the accelerated particles are sensitive to stray magnetic fields and the impedance of the surrounding vacuum tube. Magnetic fields generated by the ion pump magnets, which are asymmetrically oriented to the beam tube, can be a major drawback. To overcome these problems, we have developed, in collaboration with the Deutsche Elektronen -Synchrotron (DESY), an innovative in -line ion getter pump which can be mounted directly into a beam line without a T -piece and which has a symmetrical arrangement of the magnets around the beam tube. Additionally, RF shielding can be easily integrated inside the in-line pump. Using this innovative in-line concept (Patent EP2 431996A1) ion pumps will become an integral part of the beam tube for the first time when installed on the X -FEL system at DESY. The arrangement of the magnets and the geometry of the pole piece, used to guide the magnetic field lines, were designed to minimize any disturbance on the beam trajectory. Moreover, the element location inside the pump has been optimized to“selfshield”the beam, without requiring the addition of expensive and complex optical shields. Finally, thanks to the in-line solution, a simple RF shield (a copper coated tube with pumping slits) can now be easily installed directly inside the pump at the accelerator site installed directly inside the pump at the accelerator site.
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Mechanism research of double seal leakage in single-O-ring seal structure
GUO Chong-wu, SUN Li-chen, SUN Li-zhi, QI Fei-fei, LI Wen-bin
VACUUM    2018, 55 (6): 19-23.   DOI: 10.13385/j.cnki.vacuum.2018.06.05
Abstract629)            Save
During the vacuum leak detection testing of standalone product for single-O-Ring seal model, the leakage rate curve demonstrates continuous and tardy up-trend. Moreover, sharp corner phenomenon appears that is similar to the typical doubledeck elastic seal. It is essential to thoroughly study this issue for subsequent leak detection, as this issue has impact on the reliability of testing results. In this paper, the reason was located theoretically, by establishing the mathematical model to simulate the leakage process of double seal structure. Besides, the working sets has been designed and the experimental results were analyzed adequately. These researches may have guiding significance for the leak detection testing in the future.
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Effect of Mg doping concentration on Ga2O3 thin films prepared by RF magnetron sputtering
WANG Xiao-ran, MA Yan-bin, DUAN Ping, LI Ru-yong, ZHUANG Bi-hui, CUI Min, YUAN An-juan, DENG Jin-xiang
VACUUM    2018, 55 (6): 68-72.   DOI: 10.13385/j.cnki.vacuum.2018.06.15
Abstract339)            Save
Radio frequency magnetron sputtering was used to deposit Mg doped Gallium oxide(Ga2O3) thin films with different Mg concentrations by alternate sputtering of Ga2O3 and MgO targets. The results showed that with the increase of Mg concentration, the crystallinity of the films decreased and the thickness of the films reduced; the light transmittance had no obvious change, but the band gap increased gradually, so we can change the band gap width of Ga2O3 film continuously by doping Mg into Ga2O3 film rangeing from 4.96 eV to 5.21eV; The PL spectroscopy results show that the doping of Mg leads to a blue shift of the PL peak, and a new luminescence peak appears near the 473 nm blue light.
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Harm and prevent measures for chamber pollution of gas quenching furnace
ZHU Lei, LI Jing
VACUUM    2019, 56 (1): 59-62.   DOI: 10.13385/j.cnki.vacuum.2019.01.13
Abstract434)            Save
Vacuum heat treatment is widely used by more and more enterprises because of its advantages such as non-oxidation and decarbonization, good comprehensive mechanical properties, high degree of automation, and green and pollution -free. However, due to its high degree of automation and the requirements for sealing the chamber, high requirements are placed on the operator's skills, daily maintenance and the cleanliness of the furnace; this paper studied the causes and harm of pollution in the chamber of gas quenching vacuum furnace. The measures to prevent the pollution of chamber during using the equipment and the daily maintenance were discussed.
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VACUUM    2019, 56 (2): 78-80.   DOI: 10.13385/j.cnki.vacuum.2019.02.16
Abstract264)            Save
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Studies on fatigue failure of flexible thin film materials
CHEN Bo, YANG Fei, LI Jian-chang
VACUUM    2019, 56 (1): 20-26.   DOI: 10.13385/j.cnki.vacuum.2019.01.05
Abstract925)            Save
In this article, the selection of thin film materials, failure mechanism, mechanical properties test method and fatigue failure are reviewed. The influence of tensile bending on the microstructure of the film and the initiation, electrical properties, expansion and saturation of microcracks were analyzed. The effects of film material, grain size and film thickness on the fatigue life of thin film were summarized. On membrane surface, along the thickness direction and control of fatigue crack was discussed. It is shown that the future studies on mathematical modeling and film fatigue experiment need to be combined together for better results.
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Numerical simulation of a DC arc thermal plasma torch
CHEN Wen-bo, CHEN Lun-jiang, Liu Chuan-dong, CHENG Chang-ming, TONG Hong-hui, ZHU Hai-long
VACUUM    2019, 56 (1): 56-58.   DOI: 10.13385/j.cnki.vacuum.2019.01.12
Abstract417)            Save
In this paper, a three dimensional model of DC arc thermal plasma torch was established. The CFD software FLUENT was then used to simulate the spatial distribution of temperature and velocity for nitrogen thermal plasma, and the influence of the working gas flow on the spatial distribution of temperature were studied base on the model. The results show that the highest plasma temperature occurs near the cathode and decreases with increasing the axial distance, while the situations will reverse for plasma velocity and it reaches the maximum at the torch exit. There was no significant effect on the spatial distribution of plasma temperature by increasing the working gas flow rate, while the plasma temperature tends to decrease as increasing the working gas flow rate.
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Design and finite element analysis of large-scale horizontal vacuum container
SUN Zhi-ming, HE Chao, ZHANG Ying-li, ZHU Zhi-peng, YUE Xiang-ji, ZHANG Bin, BA De-chun
VACUUM    2019, 56 (2): 26-30.   DOI: 10.13385/j.cnki.vacuum.2019.02.05
Abstract774)            Save
Large vacuum containers are required in modern large science projects, but the design of large vacuum containers needs to consider various factors. It is an important scientific issue how to design large vacuum containers. We designed and analyzed a large-scale horizontal vacuum container in this paper. And the vacuum containers with an inner diameter of 5 m and a length of 6 m were designed, which had many large square flanges. The finite element analysis software, ANSYS-Workbench was used for the analysis, which obtained the stress and deformation distribution of vacuum container under the working condition. And then the structure was optimized and the stability was analyzed. The analysis results show that the design is reasonable and feasible.
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Vacuum cooling for food
SUN Qi-da
VACUUM    2019, 56 (3): 52-56.   DOI: 10.13385/j.cnki.vacuum.2019.03.12
Abstract601)            Save
Vacuum cooling is developing as a new high technology for food in recent years. In this paper, the principal and application for fresh vegetable & fruit, fresh food and cooked food etc.,are described.
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VACUUM    2019, 56 (3): 78-80.   DOI: 10.13385/j.cnki.vacuum.2019.03.18
Abstract347)            Save
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Developed a method to test total leakage rate of spacecraft based on helium mass spectrometry of LEYBOLD
LIU Xing-yue, WANG Zhen, DOU Ren-chao, CUI Yu-hao, YANG Ding-kui
VACUUM    2019, 56 (2): 62-65.   DOI: 10.13385/j.cnki.vacuum.2019.02.12
Abstract781)            Save
In this paper, we successfully developed a test method based on the L300 series helium mass spectrometry of LEYBOLD to test the total leakage rate of spacecraft used to a non-vacuum accumulative helium detection method. After many tests, the results show that the as-developed spacecraft total leakage rate test system has high measurement accuracy and stable performance. It not only reduces the total leakage rate of the spacecraft system to a minimum, but also reduces the weight of the equipment and increases the mobility. It has some engineering applications and popularization values.
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Applications and research progress of field emission electron sources
LI Jian, TONG Hong-hui, DAN Min, JIN Fan-ya, WANG Kun, CHEN Lun-jiang
VACUUM    2019, 56 (3): 27-31.   DOI: 10.13385/j.cnki.vacuum.2019.03.06
Abstract1158)            Save
Field emission electron sources have been found potential applications in X-ray tube, negative hydrogen ion source, display devices and other fields because of its several merits. In this paper, several applications of field electron emission are introduced firstly. Different field emission electron sources and their characteristics are compared and analyzed. Finally, the feasibility of using diamond like carbon film as cathode materials for field electron emission is analyzed on the basis of our experimental research. From the analysis i) it can be known that Spindt is difficult to fabricate and easy to be damaged; ii) carbon nanotube is the hottest issue in the current research because of its unique structure; iii) diamond like carbon film is easy to be synthesized and the composition can be adjusted. The advantages of both diamond and graphite in diamond like carbon film help it be the potential ideal field electron emission cathode material.
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Design of an Intermeshing Twin Screw Extruder for Food
ZHONG Dong, ZHAO Chun-lei, GAN Shu-yi
VACUUM    2019, 56 (4): 59-61.   DOI: 10.13385/j.cnki.vacuum.2019.04.14
Abstract478)            Save
There are many kinds of screw extruder used for food processing. This paper introduces the design process of a intermeshing twin screw extruder, including the calculation and construction design of the screw, shaft core, kneading disc and cylinder design. Building block structure is used to make the machine adapt to different actual production conditions.
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In-situ Growth of Graphene on Cemented Carbide through Amorphous SiC
RAN Biao, LIU Fei, YU Xiang
VACUUM    2019, 56 (4): 24-30.   DOI: 10.13385/j.cnki.vacuum.2019.04.06
Abstract351)            Save
Graphene is a thin film material with six angle honeycomb layered structure, exhibiting an ultralow friction coefficient in vacuum. Aiming at the lubrication problem of cemented carbide drilling tool in space drilling, amorphous SiC thin films were deposited on cemented carbide substrates by magnetron sputtering, and in situ growth of graphene on cemented carbide was obtained by the bonded phase Co. This paper demonstrated the effects of annealing temperature, annealing time and C/Si atomic ratio on the quality of graphene, and summarized the mechanism of Co catalyzed amorphous SiC in the preparation of graphene. Which provided a theoretical basis for graphene in the application of vacuum drilling tool.
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The Vacuum System of LRBT at CSNS
WANG Peng-cheng, HUANG tao, LIU Jia-ming, SUN Xiao-yang, LIU Shun-ming, DONG Hai-yi
VACUUM    2019, 56 (5): 21-25.   DOI: 10.13385/j.cnki.vacuum.2019.05.04
Abstract680)            Save
The proton accelerator at China Spallation Neutron Source (CSNS) consists of the negative hydrogen ion (H-) Linac with an energy of 80 MeV, the Linac to Rapid Cycling Synchrotron (RCS) Beam Transport (LRBT) and RCS to Target Beam Transport (RTBT), and the RCS that accumulates and accelerates the proton beam to 1.6 GeV. The LRBT section with a total length about 200 meters is an important part for the accelerator. This paper introduce the LRBT vacuum system including vacuum layout design, physical requirements, vacuum parameters, key equipments, installation and commissioning work. At present, the dynamic vacuum of LRBT is better than 2×10-6 Pa when the target power is 50kW, meeting the physical requirements. The vacuum equipments are stable and reliable without failure in the past two and a half years of long-term operation includes each vacuum non-standard equipment, vacuum acquisition and measuring equipment, etc.
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Experimental Study on the Influence of the Constant Diameter on the Performance of the Steam Ejector
HAN Yu, WANG Xiao-dong, GUO Li-xin, LI Cui-ling, WANG Cheng-xiang, ZHANG Guang-li
VACUUM    2019, 56 (5): 30-33.   DOI: 10.13385/j.cnki.vacuum.2019.05.06
Abstract440)            Save
A steam ejecter refrigeration cycle system consisting of an ejector, an evaporator, a generator, and a condenser was established. The effects of different constant diameters of the diffuser on the pumping performance of the ejector were investigated. When the throat diameter of the diffuser is increased from 24 mm to 28 mm, the entrainment ratio of the ejector is significantly increased, the pumping efficiency is improved, but the critical back pressure of the ejector is reduced. The effect of the constant diameter of the diffuser on the pumping performance of the ejector under different operating parameters was also analyzed. The results show that with the increase of working steam pressure, the entrainment ratio increases first and then decreases. When the pressure reaches 0.36MPa, the maximum entrainment ratio of the ejector is 0.53. The entrainment ratio remains constant when the back pressure is less than the critical back pressure. When the back pressure is greater than the critical back pressure, the entrainment ratio is reduced to zero until the back pressure is 7000Pa. There is an optimum constant diameter of diffuser to maximize the ejector pumping efficiency under certain operating parameters. In actual design and production, it is necessary to take into account both the exhaust efficiency and the ultimate exhaust capacity of the ejector.
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Study on Magnetron Sputtering and Wet Etching Technology of Chromium Silicon Thin Film Resistive Layer
LUO Jun-yao, LIU Guang-zhuang, YANG Zhao, LI Bao-chang, TA Shi-wo
VACUUM    2019, 56 (5): 61-64.   DOI: 10.13385/j.cnki.vacuum.2019.05.12
Abstract672)            Save
In this paper, nickel chromium silicon thin film was deposited on 96 alumina substrate by DC magnetron sputtering method, and then the resistance patterns of different requirements are realized bylithography and wet etching. In the graphic process, to comparethe etching effects of HNA etching system, TMAH etching system and catalytic oxidation etching system , and then choice the best etching system and optimizethe process parameters. In the catalytic oxidation etching system (CNAHNO3H2O) with CNA content of 30% etching temperature 50℃, the etching rate of about 4 nm/s, etching effect is best, and the design dimension deviation is small, which can realize nickel chromium silicon thin film etching line width to (15±1)μm, meet the requirements of the design and production of high precision precision membrane resistance.
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A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes
HE Jian-feng, HUANG Wei-jun, DONG Chang-kun
VACUUM    2019, 56 (6): 12-15.   DOI: 10.13385/j.cnki.vacuum.2019.06.03
Abstract466)            Save
In this paper, a new type of cold cathode ionization vacuum gauge with carbon nanotube(CNT) field emission cathode is designed. The device consists of a field emission cathode, an anode grid, and an ion collector, with the anode and ion collector coaxial arranged. The carbon nanotubes were grown directly on the metal substrate by chemical vapor deposition, and two types of cathodes with 4mm×5mm rectangle and Φ 0.1mm circular emission surfaces were investigated respectively. The carbon nanotube cathodes presented excellent field emission performance with turn-on electric field of 1.70 V/μm. In the nitrogen environment, the vacuum measurement performance of the gauges based on two kinds of cathodes is investigated respectively, the normalized current (Ii/Ia) range and the pressure show a good linear relationship from 10-7 to 10-3 Pa, and the measurement sensitivities of the gauges corresponding to the cathodes of rectangular and circular emission areas are 3.1×10-2 Pa-1 and 1.3×10-2 Pa-1, respectively.
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Study on the Technology of Ultrahigh Vacuum Surface Treatment in 316LN Special-Shaped Vacuum Box
XING Yin-long, WU Jie-feng, LIU Zhi-hong, BO Li, ZHOU Neng-tao
VACUUM    2019, 56 (6): 27-29.   DOI: 10.13385/j.cnki.vacuum.2019.06.05
Abstract550)            Save
The third-generation synchrotron requires to design a vacuum box with different shapes at different locations to ensure that the electron beam operates in an ultrahigh vacuum (<1.3E-8Pa) environment. As one of the key parts of the third-generation synchrotron device, the surface treatment of the material is the key problem in the manufacturing process. However, the surface treatment technology for 316LN special-shaped vacuum box of ultrahigh vacuum has not been published at home and abroad, and the research on the surface treatment technology of 316LN special-shaped vacuum box of ultrahigh vacuum has rarely been reported. Therefore, this paper puts forward a reasonable process plan for 316LN special-shaped vacuum box of ultrahigh vacuum surface treatment process, and designs and sets up a complete set of four-pole mass spectrometry residual gas detection and analysis system for 316LN special-shaped vacuum box of ultrahigh vacuum surface treatment process. It provides a theoretical basis for the study of the treatment of 316LN type vacuum box with ultra-high vacuum indication.
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VACUUM    2019, 56 (6): 85-86.   DOI: 10.13385/j.cnki.vacuum.2019.06.16
Abstract248)            Save
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