The structural characteristics of a three chamber vertical vacuum induction precision casting furnace is introduced first. Then the overview of other major types of precision casting furnaces are described. Finally, through the comparison of technology and market situation, the current market situation and the future development direction of precision casting furnace are analyzed.

With the rapid evolution of the MEMS and VLSI technologies, small nano-satellite, being low cost and competent in complicated tasks, has become a crucial orientation of the commercial aerospace in the world. The on-orbit maneuverability ability of the small nano-satellite promotes the serial micro-electric propulsion system′s development and on-orbit verification. In this paper, the demands of the electric propulsion system for the small nano-satellite are firstly demonstrated. Then the characteristics of the micro-electric propulsion system are introduced, including the product engineering and on-orbit verification of the micro-electric propulsion system at domestic and overseas. Finally, the development and on-orbit application of the micro-electric propulsion in China are prospected.

Oxide thin film transistors(TFT) are the core driving components of active matrix organic light-emitting diodes, and are the key technology for developing new displays today. They have broad application prospects in flat panel displays. However, there are a large number of defect states in oxide semiconductors caused by oxygen vacancies, which destroy the performance and stability of TFT device, and become a bottleneck technical problem for its commercialization. Therefore, IZO TFT was prepared by RF-sputtering and treated with O₂ plasma to study the effects of O₂ plasma treatmert on IZO film and device performance and stability. The results show that after plasma treatment, the mobility of IZO TFT increases from 8.2cm²/（V·s） to 9.5cm²/（V·s）, the threshold voltage changes from -3.2V to -5.1V, the sub-threshold swing decreases from 0.45V/decade to 0.38V/decade, and the switch ratio changes from 2.3×10⁷ to 4.4×10⁷. Under negative light bias, the threshold voltage drift of the device reduces from 7.1V to 3.2V. The threshold voltage drift of the device decreases from 12.5V to 6.4V when aging at 100℃. O₂ plasma treatment can effectively improve the electrical performance and stability of IZO TFT.

A special equipment is developed to meet the emission requirements of hydrogen, methane and carbon dioxide wastes and the injection requirements of carbon dioxide into the sealed chamber during the thermal vacuum tests of the environmental control and life support system (ECLSS) of a spacecraft. The equipment adopts a scheme which combines the electric heating belt and the multi-layer insulation materials to keep the pipeline temperature above 12℃. The scheme solves the problem of hydrogen and methane condensation in extreme low temperature conditions and avoids risks of pipe blocking due to carbon dioxide freezing. The scheme also improves the safety level during methane emission via mixing the highly pure nitrogen into methane, solving the safety issue for the emitting methane into vacuum space, since the concentration of methane decreases to within 3.6%, lower than its blasting threshold of 4.4%. Eventually, the stability and the fulfillment of the requirements of the equipment are verified by the practical thermal vacuum tests.

For the internal channel surface treatment of quartz and ceramic devices in the field of precision instrument and device manufacturing, RF discharge plasma bombardment cleaning is used. Pollutants are discharged through physical action and chemical reaction to achieve cleaning effect after the surface is bombarded by high-energy plasma. In this work, the process of RF shielding, luminescence adjustment and process parameters exploration during plasma discharge cleaning are explored. The influence of electrode spacing and installation form on luminescence, and the influence of the change of related process parameters on the temperature rise of the device during plasma discharge are studied. The results show that the greater the RF output power and the intake air flow, the faster the workpiece temperature rises. The above results may provide effective guidance for the surface treatment of internal channels in quartz and ceramic devices.

By controlling winding speed, cathode power, process pressure, linear ion source current, thickness of NiCr seed layer, roll to roll magnetron sputtering machine was used to deposit nano-copper film on the surface of organic film substrate, in order to improve electronic property of copper current collector. The sheet resistance of copper coating was characterized by four-probe method, and the influence of different process parameters on the sheet resistance of copper coating were obtained. The results show that with the increase of running speed of substrate, the sheet resistance increases quadratically, and with the increase of cathode power, the sheet resistance decreases in power. In the process pressure range of 0.13~0.45Pa, the sheet resistance reaches the minimum at 0.2Pa. With the ion source current increasing in the range of 0~0.7A, the sheet resistance decreases linearly. NiCr seed layer can improve the sheet resistance of copper layer, and the sheet resistance of copper coating with 6.7nm NiCr seed layer is 23.2% lower than that of copper coating without seed layer.

Vacuum micropumps are of great importance for the vacuum packaging of micro-electro-mechanical systems(MEMS)and vacuum microelectronics devices. Based on the operating principle and process realization, the microminiaturization feasibility of common traditional vacuum pumps is analyzed. The developments of vacuum micropumps including membrane pump, Knudsen pump, vapor-jet/diffusion pump and ion sorption pump are introduced, and the technical difficulties are summarized. The results show that although the vacuum micropumps have obvious decrease in exhausting performances and reliabilities compared with their macro predecessors, they are still necessary for the portable and high-vacuum required microsystems with the merits of low-power consumption and ease of integration.

Multi-scale flows are not only used in hypersonic vehicles,orbit change/attitude adjustment of spacecraft and other aerospace fields, but also the scientific and engineering practices such as the mass transfer/heat transfer in micro/nano manufacturing and device. Accurate and rapid simulation of multi-scale flows is of great significance to this kind of scientific research and engineering practice. The discrete ordinates method based on unified gas kinetic scheme is introduced to study the field simulation of multi-scale flows, and the internal flow field simulation of a dynamic gas lock model is completed. The temperature field, velocity field and density field of the model are obtained, and the results are in line with theoretical expectations.

The basic principles, particle trajectories and structures of the compact emission guns for electrons and argon ions are introduced respectively. The typical electron guns are used for charge neutralization, pulse emission and high energy electron diffraction. The types of argon ion gun are usually classified to cold cathode, hot cathode and plasma sources. The compact emission guns are playing important roles in the development and application of scientific research, semiconductor industry, life sciences, defense and aerospace.

Mechanical vacuum pump system has gradually replaced the steam vacuum pump system in the field of steel refining, and a reasonable and efficient dust removal system is a necessary measure to ensure the normal operation of the mechanical vacuum pump system. This paper introduces the design and working principle of mechanical vacuum pump dust removal system, and analyzes the common problems and causes of dust removal system. Combined with the relevant engineering practical experience, the dust removal system is optimized and improved, including two-stage gas cooling system, automatic pulse purge system, automatic dust transferring system, and waste gas monitoring and alarm system. The optimized and improved dust removal system has been continuously operated in the RH vacuum refining furnace project of a new electric furnace steel-making plant for more than one year, effectively protecting the operation of mechanical vacuum pump and meeting the production process requirements for RH vacuum refining furnace.

To solve the problem of low target utilization rate during the use of rectangular magnetron sputtering targets, NAURA designed and fabricated a rectangular planar magnetic control target with dynamic magnetic field whose magnet components can move horizontally and vertically. The equipment drives the magnet assembly to scan along the width direction of the target material through the motor, so that the etching track expands in the width direction on the target surface, the etched area of the target surface increases, and the utilization rate of the target material improves. The vertical height of the magnet assembly is adjusted by the motor to reduce the relative change of the magnetic field intensity on the surface of the target material and to improve the utilization rate of the target material. The test results show that the target utilization rate of the dynamic magnetic field rectangular planar magnetic control target designed and fabricated by NAURA increases to 55%~60%, which greatly reduces the production cost. At present, the equipment has been recognized by industry customers.

The measurement of secondary electron emission coefficient is very important for the development of vacuum electronic devices. To measure the secondary electron emission coefficient of materials with low electrical conductivity, it is necessary to design a high performance electron gun with adjustable energy, beam spot diameter, deflection and pulse. According to the performance index of the electron gun, its electron emission, electron optical system and potential relationship are preliminarily designed. The pulse emission of electron beam was realized by applying pulse voltage to the control pole. The CST software was used to model and simulate the electron gun, the influence of focusing pole voltage on the beam spot size was obtained, and the effect of the deflector electrode was simulated. The results show that when the cathode voltage is -1000V, the control electrode voltage is -1005V, and the first anode voltage is -880V, as the focusing voltage increases from -400V to 1000V, the beam spot diameter increases from 0.2mm to 10mm, the relationship between them is almost directly proportional. The quadrupole electrostatic deflector is more suitable for use in the same space by comparing two deflection components. When the working distance is 30mm and the deflection voltage is 200V, the deflection sensitivity can reach 34mm/kV and the corresponding deflection angle is 12.8°. The design of the electron gun is reasonable and meets the requirements of the index, it can be used to measure the secondary electron launcher.

Firstly, the mainstream forms, technical characteristics, and current usage status of liquid metal cooling directional solidification/single crystal furnaces are introduced. Then the applications of Sn and Al as medium to LMC furnace are compared. Finally, the development prospects of Sn cooling and Al cooling directional solidification equipment are analyzed.

Tungsten, molybdenum, rhenium and other refractory metal parts, often used in the power source for maintaining the operation of space orbiting satellites and space stations, such as nuclear power and electric propulsion. Most of these components work in ultra-high vacuum environment, accompanied by high temperature, radiation and particle irradiation, and other extremely harsh environmental conditions. Based on the structural characteristics of most components, and the shape,dimensional accuracy, coating composition and structural stability of the materials and components need to be protected, related vacuum process equipment is designed to be well structure with suspended workpieces. This paper introduces the development of a vacuum brazing equipment for the manufacture of nuclear power components in detail. It is a special "deep well" structure with upper discharge. An innovative and optimized design in reliability, operability and security was carried out. The test results show that the thermal (1600℃) vacuum degree of the equipment reached 3×10^-4Pa, and the temperature uniformity reached ±4℃.

The electric propulsion technology is an important propulsion system technology for Chinese satellites in the future. It has the advantages of higher specific impulse, lower thrust and higher propellant utilization compared to the conventional chemical propulsion. The ion thrusters mainly use xenon as propellant. Helium is used as the leakage gas in the conventional sealing test of the propulsion system. There is a conversion relationship between the leakage detection result and the actual leakage rate of the xenon. In order to accurately evaluate the actual leakage state and leakage rate of the electric propulsion system, it is urgent to carry out relevant research. In this paper, the feasibility of xenon in-situ leak detection technology is verified by building a several tracer gases testing system. Through theoretical analysis and experimental research, the leak rate conversion relationship between xenon, helium and krypton, as well as the theoretical upper and lower limits of the conversion coefficient, are preliminarily obtained. It will provide a reference for the leak detection of the electric propulsion system.

In this paper, particle grid combined with Monte Carlo collision method was used to simulate the miniaturized anode layer Hall thruster. Meanwhile, the discharge experiment of the miniaturized anode layer Hall thruster was carried out to evaluate its performance. The results show that the discharge of the miniaturized anode layer thruster is stable, and the ion beam presents a bunched mode. The discharge voltage range is 300~1100V, the specific impulse range is 234~2047s, and the thrust range is 0.5~5.4mN. This study can provide certain data support for further optimization design of high efficiency, light mass and high performance micro anode layer Hall thruster.

For the requirement of tritium gas transportation, a set of bellow pump is developed, which includes a boosting pump and a rocking pump. Swashplate-rod with piston structure is developed for the boosting pump, in which three reciprocating plunger pistons are adopted to get high compression ratio to deal with the low vacuum and booster. Rocking piston is adopted in rocking pump to increase the gas flow and decrease the vacuum pressure, which ensure the inlet pressure is 50Pa and outlet pressure is 0.4MPa. Double bellows are used to separate the tritium from the shaft system, which can prevent the transporting gas from any pollution. Helicoflex sealing is used to separate the tritium from the environment, and leaking ratio of 1.0×10^-7Pa·m³/s is achieved. The self developed circulating and boosting pump can meet the request of tritium boosting transportation.

This article briefly introduces the basic principles of relativity and quantum mechanics, which cites the recent scientific news to discuss the application and usage of vacuum science and technology in these fields. As we know(everyone knows, including the content that does not appear in the books), as the mother of the universe, vacuum is bigger and older than the universe. Moreover,vacuum is the physical environment of relativity and quantum mechanics. Vacuum science and technology is an essential theory for the study of relativity and quantum mechanics. The modern physics is on the eve of a great revolution. The research problems of black holes, dark matter, dark energy, gravitational waves and the origin of particles have put forward serious challenges to physics. Perhaps physics can gain ground from studying scientific problems or resolving the contradictions between relativity and quantum mechanics. This article is divided into three parts: (1) The recent progress of relativity and vacuum technology; (2) Previous ideology frames were sorted out; (3) The relevant knowledge of quantum mechanics and zero point energy.

Cool-down time, base pressure, pumping speed and gas capacity are key parameters of cryopump. In this paper systematic measurements and analysis of 200mm diameter ICP200N cryopump with the designed comprehensive performance test platform were carried out. The results show that the cool-down time of ICP200N cryopump is less than 90 minutes. The base pressure can reach the level of 10^-7Pa without baking, and the main residual gas ingredients are water and hydrogen. The testing method of 30s recovery capacity was given, which is very important in the realistic PVD applications. The corresponding capacity for argon and nitrogen is 820L and 590L, respectively. A simple flow calibration device to improve the pumping speed measurement accuracy was also designed, and the test results show that the nitrogen and argon pumping speed of ICP200N cryopump is comparable with that of international mainstream competitor. So far the ICP200N cryopump has been widely used in the PVD equipment of domestic semiconductor production line.

In high-altitude environments, both temperature and air pressure will significantly decrease, which have a certain impact on the human body and equipment. Through high altitude simulation systems, the performance and adaptability of materials, devices, equipment, and organisms in high altitude environments can be tested. This article is based on the Chengdu XX wind tunnel project, a high altitude simulation system is designed by using a vacuum pump to simulate the altitude of the wind tunnel, and the changes of temperature and humidity with the altitude is also considered. The design parameters, composition, working principle, and operation process of the system is introduced detailedly.

The required vacuum of hemispherical resonator gyro inner cavity was confirmed by theoretic calculation, and the relation of vacuum of the inner cavity with increasing time was found according to the outgassing rate experimental test data. The appropriate getter was chosen, the absorbable capacity of getter was tested, and the equivalent outgassing rate of inner cavity with getter was measured. The test results indicate that the getter can meet the requirement of keeping high vacuum of hemispherical resonator gyro.

A layer of organic film was coated on the PET substrate with polyacrylate polyol resin, and an inorganic film was deposited on the organic coating by plasma enhanced atomic layer deposition(PE-ALD)to obtain functional PET composite film. The effects of organic coating thickness, PE-ALD coating type and PE-ALD coating temperature on the water vapor barrier property and light transmission property of PET composite films were investigated by water vapor transmittance tester and ultraviolet-visible-near-infrared spectrophotometer. The results show that the thickness of polyacrylate polyol organic coating film has little effect on the water vapor barrier property and light transmittance of the PET composite film.The Al₂O₃ film deposited by PE-ALD can greatly improve the water vapor barrier property of the PET composite film, and the water vapor barrier property is the best when the PE-ALD coating temperature is 100℃,reaching 0.17g·m^-2·d^-1.

The smelting and purification methods of active metals,the basic forms of plasma beam melting furnace and the current situation at home and abroad are summarized. The composite melting technology of ion beam cooling bed and induction cold crucible and induction cold crucible continuous casting technology are introduced. A magnetic stirring cooling bed technology is proposed. The application of plasma technology in metal smelting reduction and purification is introduced, and the application direction of plasma technology is prospected.

Vacuum arc skull furnace is a special material casting equipment. In the process of centrifugal casting, it may be affected by periodic excitation force and vibration of external equipment, which will induce resonance of its own shell. In consequence, shell resonancereduces the casting quality and formssecurity risk. In this paper, the modal analysis of avacuum arc furnace is carried out, and it is found that the local design deficiency is the cause of the low-order local mode. By reinforcing the structure, the first-order mode frequency is increased from 56.786Hz (close to the power frequency) to 77.610Hz(relatively safe), and the amplitude is reduced from 3.540mm to 0.323mm. In conclusion, modal shape optimization method has achieved a good effect of vibration reduction design.

The drift tube linac(DTL) is the main part of CSNS linac, which is responsible for accelerating the negative hydrogen ion beam with a pulse current of 15mA from 3MeV to 80MeV, and then injecting it into the fast cycle synchrotron(RCS) for further acceleration. In order to avoid energy loss, ion beam acceleration must be completed in a high vacuum environment.This paper first introduces the composition of the DTL tank vacuum system, and then analyzes the current vacuum leakage, describes in detail the vacuum leakage solutions in different situations such as pickup leakage, drift tube leakage(including water leakage, air leakage, internal leakage), and reduces the leak detection area by simulation calculation by Monte Carlo method. Due to the high leakage frequency of drift tubes, this paper gives a standardized operating procedure for drift tube leakage to improve leak detection efficiency.

As an important cooling equipment of nuclear power plants, the tightness of condenser is directly related to the safe operation of nuclear power plants. In this paper, the real working conditions of the condenser(the vacuum side is 7500Pa, the pressure side is 110kPa) are simulated, an experimental system is built based on quadrupole mass spectrometer, and the leakage rates of three gas media including helium, air and SF₆ are studied under different magnitudes of leakage holes(helium equivalent leakage rate is 10^-7~10^-1Pa·m³/s). The results show that under condenser conditions, the leakage rate of the gas medium within the measured magnitude has nothing to do with the type of medium, but only with the nominal leakage rate.

Most studies on ferroelectric thin films are focused on perovskite structural materials. However, these traditional ferroelectric materials have a variety of problems, such as poor compatibility with Si, environmental pollution caused by Pb, large physical thickness, low resistance, and small band gap. Different dopants such as Si, Zr, Al, Y, Gd, Sr and La can induce ferroelectric or antiferroelectric properties in HfO₂ films, resulting in residual polari stion up to 45 µC·cm^-2 and coercivity (1~2 MV·cm^-1) approximately one order of magnitude greater than that of conventional ferroelectric films. At the same time, the thickness of HfO₂ films can be very thin (below 10 nm) and the band gap is large (~ 5 eV). These advantages over traditional ferroelectric materials can overcome the obstacles of traditional ferroelectric materials including ferroelectric field effect transistors and 3D capacitors in thin film memory applications. In addition, the electrical and thermal coupling of antiferroelectric films holds promise for a variety of applications, such as energy harvesting/storage, solid state cooling, and infrared sensors. HfO₂ doped thin films can be deposited by different deposition techniques, such as ALD, sputtering and CSD, and ALD has more obvious advantages in film deposition. In this paper, the recent progress of ferroelectric and antiferroelectric properties in HfO₂ doped thin films is reviewed. The effects of different doping elements, film thickness, grain size, electrode, annealing, and stress on the ferroelectric properties of HfO₂ thin films are described in detail.

This paper introduces a set of high-precision measuring device for the outgassing rate of vacuum materials based on the method of switching between two pumping paths developed by the engineering machinery vacuum auxiliary laboratory of SSRF Ⅱ beamline project. Based on this method, the outgassing rate of common oxygen free copper material samples in the synchrotron radiation vacuum system was tested. The outgassing amount of the sample with background and the background in the conditions of different temperature, outgassing time,and after the gas path conversion was measured and caculated. The results show that the oxygen free copper outgassing rate is 3.06×10^-12Pa·m³·s^-1·cm^-2 after 72h baking at 150℃, it indicates that the device has a high test accuracy of outgassing rate which can meet the measurement requirements of synchrotron radiation device for the outgassing rate of ultra-high vacuum materials.

Vacuum coating is a green manufacturing technology which can prepare high performance coating material and high quality surface under vacuum environment. At present, the hard coating series products which is majorly prepared by physical vapor deposition technology can help the manufacturing industry to achieve low-carbon manufacturing and sustainable development. In the process of vacuum coating application, tribology and surface interface are important scientific issues, while key technical problems need to be solved for advanced vacuum coating equipment, such as high-end core parts, coating process and control system, in particular to the initiative into the fourth tide of the industrial revolution as well as exploring the road of the digital revolution. This paper introduces the specific path of vacuum coating to help low-carbon manufacturing and sustainable development. In addition to mature markets such as tool industry and automobile industry, vacuum coating can also provide important support for the innovation and development of medical industry, aerospace and semiconductor industry.

Graphene vacuum standard leak is a kind of new vacuum standard leak based on graphene-derived materials, and the lower limit of leakage rate is lower than the general helium permeation leak rate, which can be used in the calibration of ultra-sensitive leak detection system. Based on the material characteristics of graphene, the leakage rate of graphene vacuum standard leak will change with temperature. In this paper, the influence of temperature on the leakage rate of graphene vacuum standard leak was studied. By measuring the leakage rate of the standard leak in different temperature environments, the temperature coefficient and the change rule of the leakage were obtained. The results show that the leakage rate of graphene vacuum standard leak changes linearly with temperature, and the temperature coefficient is lower than 2.5%/℃.

The formation mechanism of air hole defects on the surface of superalloy ingots produced by vacuum induction melting process was studied through microstructure observation of the superalloy ingots and thermogravimetric analysis of the attachments in the ingot mold. The results show that during pouring, a small amount of rust(Fe₂O₃) attached to the inner wall of the ingot mold decomposes into Fe₃O₄ under the action of high temperature, during which gas outgassing occurs. The expansion of the generated gas at high temperature is the main reason for the formation of holes on surface of alloy ingot.

In this paper, effects of substrate surface roughness, peeling angle and temperatureon the peeling property of graphene films are studied in details by molecular dynamics(MD) simulations. In addition, a theoretical model characterizing the peeling force and the peeling angle ispresented. The results show that the peeling force increases with the increasing surface roughness of the substrate and temperature. Meanwhile, the effect of temperature on the preparation of graphene films by metal assisted stripping is also highlighted, graphene with different layers can be peeled out by adjusting the temperature reasonably. The peeling force gradually decreases when the peeling angle changes from 0° to 90°, which is in consistent with the theoretical prediction. The results can provide a reference for exploring the peeling performance of graphene film from a rough substrate.

In view of the problems of condensation and dripping water and frost on the outside of the interlayer caused by decreasing vacuum degree for the vacuum interlayer of some beamline liquid nitrogen cooling monochromators, and the loss of cooling capacity of the liquid nitrogen pipeline in the Shanghai Synchrotron Radiation Facility, which threaten the operation safety. An automatic pumping system with vacuum feedback and timing start function is designed. Simulation and calculation of the cooling loss under different vacuum degrees of the interlayer help to determine the vacuum degree threshold and other parameters for the system to start. The as-designed pumping system currently works well on beamline liquid nitrogen cooling monochromators, helping to stabilize the beamline operation.

Since GaAs was first discovered to have a negative electron affinity in the 1960s, negative electron affinity(NEA)materials have been widely studied and used in photoelectron emission,secondary electron emission and cold cathode. Compared with conventional emitting materials, the conduction band minimum of bulk NEA materials is higher than their surface vacuum energy level, which makes it easier for electrons in the conduction band to be emitted from the surface into the vacuum, and therefore these materials are ideal for electron emission. This paper introduces the NEA materials from the definition, main material classification and applications in cold cathodes, and gives a conclusion of the bottleneck and future development direction of NEA material.

Diamond-like carbon（DLC） film is a kind of film material with high wear resistance and high chemical stability,so it is more and more widely used. With the increasingly harsh service environment of key material components,the protection and reliability of key components are facing new challenges. In recent years,more and more attention has been paid to the corrosion resistance of DLC. This paper focuses on the corrosion and wear resistance mechanism of DLC,and summarizes the research focus of the corrosion resistance of DLC film on alloy surface. Different preparation methods of DLC applied on material surface are introduced. The structure and protection mechanism of single-layer DLC,multi-layer DLC and doped DLC are briefly described. Multilayer DLC has great research value and broad application prospects. Finally,the development trend and challenges of DLC film for substrate surface protection are prospected.

In order to develop a screw vacuum pump, which can efficiently adapt to a wide working pressure range of 0.1-100kPa and meet the expected extreme vacuum process conditions, a segmented progressive pitch screw rotor is designed. The lead of the first part,which is located at the suction end, changes from small to large, while the leads from the second part, gradually change from large to small. This lead structure ensures good dynamic balance of the screw rotor and the integrity of the tooth surface structure. The first two stages of leads determine the suction capacity of the screw vacuum pump, and the ratio of adjacent leads determines the compression capacity. The end lead pitch changes little, and the screw tooth width is large, ensuring the processing performance of the screw. The experiment show that the screw vacuum pump using a segmented gradient screw rotor can maintain a relatively high pumping speed throughout the entire working pressure range, and the pitch parameters may be optimized according to work expectations, which can greatly reduce the specific power in the set working pressure range, improve the pumping efficiency, significantly reduce the driving power and achieve good pump operation effect.

The high-power proton beam accelerator is widely used in basic physics, nuclear industry, home safety and other fields, and the high-power waveguide RF cavity is an extremely important component. The ship-shaped RF cavity has the highest no-load Q value and shunt impedance, which is a good choice for GeV proton beam accelerator. For the manufacture of ship-shaped copper RF cavity, the main difficulty lies in the forming of the complex contour shell of the cavity,thus the detailed forming process research is developed in this work. Through the PAM-STAMP 2G simulation software, the die forming numerical simulation for the complex contour shell of the high frequency cavity is carried out, and the thinning amount, residual stress and forming rebound of the shell during the elliptical arc forming process are simulated respectively, which provides a theoretical basis for the actual die forming. The high frequency cavity elliptical shell forming mold designed based on the simulation results has successfully implemented the actual molding of the elliptical arc.

Plasma enhanced magnetron sputtering was used to prepare TiCrSiCN and TiCrSiCON nanocomposite coatings on H13 hot working mould steel. Rc indentation method, nanoindentation method, micro-bead blaster, potentiostat were used to detect the adhesion force, toughness, erosion and corrosion resistance of the coatings, respectively. The influences of oxygen addition on the properties of the coatings were emphatically discussed. The results show that the TiCrSiCN and TiCrSiCON nanocomposite coatings have good adhesion to the substrate. The TiCr based nanocomposite coatings could improve the erosion and wear resistance over the uncoated H13 steel by 4~5 times, and the TiCrSiCON coating has better erosion resistance than TiCrSiCN coating. The polarization resistance of TiCrSiCN, TiCrSiCON, and H13 steel decreases sequentially. Oxygen addition is beneficial for improving the adhesion between TiCr based coatings and the substrate, but it will reduce the toughness and the corrosion resistance of the coating.

The NiCrAlYSi (HY3) metal-bonded layer was prepared on the DZ125 alloy substrate by vacuum arc plating (ARC), and then the yttrium oxide stabilized zirconia(6-8YSZ) ceramic coatings were deposited by electron beam physical vapor deposition(EB-PVD) at five incidence angles of 0°, 20°, 40°, 60°, and 80°, respectively. The effect of incident angle on the morphology and properties of the coating was studied. The results show that the thermal barrier coatings with five incidence angles can form columnar crystal structure, and the porosity and columnar crystal tilt angle gradually increase with increasing incidence angles, while the coating thickness gradually decreases. The bonding strength of the coated specimens was tested, and the bonding strength is above 55MPa at the incidence angles of 0° to 40°, and decreases to 15.7MPa when the incidence angle increasing to 80°. Under the thermal shock conditions, TGO is formed between the ceramic surface layer and the substrate.The porosity of the coating is different at different incidence angles, and the growth rate of TGO is inconsistent, resulting in significant differences in the thermal shock life. The thermal shock life of the coating at the incidence angles of 0° to 40° exceeds 4000 times, while that of the coating at the incidence angle of 60° is 3371 times and the shortest one at the incidence angle of 80° is only 1836 times.

Copper(Cu) foils were deposited by high power impulse magnetron sputtering(HiPIMS) method. The effects of sputtering voltage on the microstructure and properties of the Cu foils were investigated. The results show that the Cu foils deposited with the sputtering voltages of 700-950V present (111) crystal preferred orientation obviously, their grain sizes are between 27.7nm and 36.5nm, and the relative densities are between 96.1% and 98.5%, which is distinctly superior to that of the Cu foils prepared by ordinary DC magnetron sputtering. With the increase of sputtering voltage, the Cu foil gradually changes from ductility to brittleness, and the resistivity gradually decreases to 2.38μΩ·cm, which is close to the solid-state resistivity of pure Cu.

In low temperature storage and transportation, due to the outgassing of materials in the vacuum interlayer, the vacuum degree of the interlayer will decrease, the heat will be introduced from the outside to increase the evaporation rate of the low temperature container and the loss of low temperature liquid, and the vacuum life will be shortened. Therefore, it is very important to study the outgassing properties of materials in vacuum interlayer. In this paper, the outgassing rate of multilayer insulation material and FRP in vacuum for low temperature storage tank is tested and studied. The outgassing rate per unit area of multilayer insulation material and D3848 FRP is 4.93×10^-8Pa·m³/(s·m²) and 1.13×10^-7Pa·m³/(s·m²). The results can provide a reliable basis for the design of adsorption dose of vacuum interlayer.

This paper takes the super large vacuum vessel gate with a diameter of 10m as the research object, the design and analysis of the super large vertical vacuum vessel gate are introduced. The strength and deformation of the gate under external pressure and lifting are simulated and analyzed by using the method of reliability design and simulation optimization, and the stiffener arrangement of the gate is optimized according to the analysis results. The research work shows that the problem of local stress overrun of the gate can be effectively reduced by setting a reinforcing plate between head and stiffener at the place where the curvature changes greatly. Reducing the number of head stiffeners to six can reduce the material consumption. In this case, the maximum stress increases to 97.37MPa and the maximum deformation increases to 4.1mm, which can still meet the material use requirements. When lifting, the whole gate bears the gravity load with the maximum deformation of 0.13mm and the maximum stress of 18.6MPa, which can meet the material use requirements.

In the vacuum melting casting process of superalloys, the intermediate package system is used to transfer the molten alloy into the ingot mold system. The intermediate package system is typically made of refractory materials. In this paper, the formation mechanism of erosive surface of alumina based refractory was studied by observing the change of surface morphology and Cr layer thickness under different erosion times. The results show that under the action of the superalloy liquid erosion, the cross-section of the refractory produces a zonal Cr layer, and its thickness increases first and then decreases with the increase of the erosion time, and finally tends to be stable. When the erosion time is 145min, the refractory and the superalloy liquid reach a dynamic equilibrium state, and the average thickness of Cr layer is stable at about 400μm.

The Quantum Pascal project under the european metrology programme for innovation and research(EMPIR) aims to develop a photon-based vacuum measurement standard for converting the international unit of pressure(Pa) into a unit of gas density. The project focuses on various optical methods, including the refractive index method, absorption spectroscopy, and the cold atom method, to establish quantum vacuum standards. These methods offer high precision and repeatability, and each has its unique features. The refractive index method and absorption spectroscopy rely on the interaction mechanism of gas molecules in vacuum, while the cold atom method uses the properties of Bose-Einstein condensed matter. In this paper, these principles and application devices are introduced in detail, providing a valuable reference for the development of quantum vacuum metrology technology. The advancement of these technologies will enable more accurate vacuum measurements and more precise scientific research, which is crucial for various fields, such as semiconductor manufacturing, materials science, and quantum information.

Zinc oxide nanorod arrays were prepared on five different substrates using low-temperature hydrothermal method, and the microstructure and elemental composition of the products were characterized by SEM, TEM, XRD, EDS, and XPS. The field emission (FE) properties of zinc oxide nanorod arrays grown on different substrates were investigated. The results show that the turn-on fields of samples grown on Si, conductive glass, nickel, stainless steel, and nickel titanium alloy increase in turn. Attributing to the better adhesion between zinc oxide nanorods and the Si substrate, the samples grown on Si substrate have the best FE performance and the best emission stability, with a current fluctuation less than 10% under the current density of 0.5mA/cm² in DC mode for 15 h.

Graphene, a new two-dimensional material with excellent performance, has great potential for applications in the fields of aerospace, electronic devices, and bio-medical. Plasma enhanced chemical vapor deposition (PECVD) was used to prepare grapheneon copper foil using a mixture of hydrogen and methane gas. The mechanism of H₂ on the nucleation and growth of graphenein growth and cooling stage of PECVD was studied. The results show that in the PECVD process, the pre-etching of copper substrate by H₂ plasma before graphene growth would increase the roughness of the substrate, which is not conducive to the growth of low-density and large-size graphene grains. During the growth process, H₂ could etch multiple layers of graphene, and a single layer of graphene could be formed at higher H₂ flow rate. After the end of growth, holdingthe graphene in H₂ for a certain period of time, it would be etched into ribbons, and the etching would be intensified with the extension of holding time.

The effect of oil mist pollution on micromorphology and element content of sputtered substrate(silicon wafer, weighing paper, copper foil and glass slide) was studied through optical microscope, field emission scanning electron microscope, energy spectrometer and atomic force microscope. The results show that after sputtering deposition for different times, spherical particles appear on the silicon substrate, and the particles gather or grow with the increase of sputtering time. The carbon content of silicon wafer before sputtering is 4.55%, and it rises to about 31.55% after 50s of sputtering deposition. The optical morphology of copper foil and weighing paper after sputtering deposition for 50s has little difference from the sample before sputtering, and there is no spherical particle. The optical morphology of glass slide after sputtering deposition for 50s is similar to that of the silicon slide, spherical particles are randomly distributed on the surface. The silicon substrate is extremely sensitive to oil mist pollution, which is characterized by spherical particles distributed on the surface of the sample after sputtering treatment,and the mass fraction of carbon is about 7-8 times of that before sputtering.